The Carriage of the Wafer Front End & Wafer Cassette Mapping in the Semiconductor Industry

1
The Carriage of the Wafer Front End Wafer
Cassette Mapping in the Semiconductor Industry

• www.kensingtonlabs.com

2
Semiconductor Equipment's

• The semiconductor industry is improving daily,
  either for the production equipment manufacturers
  or the end-users. The transistors in the
  integrated circuit are getting increased along
  with the performance. It is also due to the
  change in the structure of the silicon plates are
  turning out to be a lot more complicated and
  getting delicate and comfortable. It makes the
  manufacturing process to turn out to be a lot
  more expensive.

3
SCARA Wafer Robots

• You must know that the wafer front ends movement
  in the semiconductor manufacturing can be
  obtained with the wafer handling robots help.
  The wafer handling automation is entirely based
  on the compliance arm for the robot assembly.
  The SCARA wafer handling robots gets processed in
  the horizontal work plane and the vertical work
  plane in 1DOF and 3DOF. So, these wafer handling
  robots carry the throughputs of up to 350 wafers
  per hour with the considerable positioning
  repeatability of 100 um.

4
The Wafer Cassette Mapping Process

• There are wafer end effectors at the end of the
  robot arm that is responsible for the wafer
  handling. The end effectors will go beneath the
  FOUP so that the wafer would interrupt the
  mapping sensor beam. Further, the wafers are
  countable too and can be moved up and down all
  the way if they are not placed accurately.

5
Wafer Handling Benefit The Semiconductor
Manufacturing Industry

• Properly distribution of the chemicals
• No requirement of the meters
• High in the quality prospects
• Very budget-friendly option

6

• The wafer cassettes are mainly used for storing
  purposes and transport the wafers in the
  semiconductor manufacturing working process.
• The wafer cassettes are mostly known as the wafer
  carriers for many people. These are specially
  crafted to carry several wafers of equivalent
  sizes.

7
CONTACT US

• Sales  Kensington Robots Stages, Newport PM500
  Stages, Spare Parts
• sales_at_kensingtonlabs.com
• Service - Kensington robot and stage repairs,
  Newport PM500 stage repairs
• service_at_kensingtonlabs.com

Kensington Laboratories, LLC 6200 Village
Parkway Dublin , CA 94568 Phone
510.324.0126 Fax [phone] www.kensingtonlabs.
com
Our Toll Free Number 1-888-977-7800