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Single Arm Atmospheric Wafer Handling Robot


Kensington Laboratories 300mm single arm atmospheric wafer handling robot, part of the MultiLink™ robot family, is designed to meet the industry’s most rigorous 300mm performance standards. – PowerPoint PPT presentation

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Title: Single Arm Atmospheric Wafer Handling Robot

Single Arm Atmospheric Wafer Handling Robot
  • Advanced System Technology

  • Kensington Atmospheric MultiLink SCARA Wafer
    Handling Robots have addressed the needs for
    semiconductor wafer and quartz substrate handling
    for more than a quarter century. Key innovative
    features developed for semiconductor robot wafer
    handling Through Beam Wafer Sensing, 300mm
    Edge-Grip End-Effector Robot Self-Teach
    Functionality. MultiLink SCARA wafer robots are
    used across the semiconductor equipment spectrum
    Metrology Systems, Deposition Systems, Etch
    Systems, Reticle Process Systems Thermal
    Processing Systems.

Key Features
  • Patented edge grip technology
  • Patented Automated Self Teach
  • Through-beam wafer mapping
  • Advanced wafer cassette error detection
  • Direct drive technology
  • Continuous rotation
  • State-of-the-art motion control
  • Off center pick and place
  • Machine tool quality construction
  • High resolution optical encoders on all axes
  • Reduced wear Z axis counter balance

Key Patents
  • Robot Arm with Specimen Edge Gripping End
    Effector, 6256555
  • Robot Arm with Specimen Sensing and Edge Gripping
    End Effector, 6275748
  • Self-Teaching Robot Arm Position Method, 6360144
  • Self-Teaching Robot Arm Position Method to
    Compensate for Support Structure Component
    Alignment Offset, 6366830.

  • 4th axis supinator wafer flipper
  • Vacuum end effectors (200mm and 300mm)
  • Reflective mappers
  • E-diagnostics with GUI

(No Transcript)
  • Sales  Kensington Robots Stages, Newport PM500
    Stages, Spare Parts
  • Service - Kensington robot and stage repairs,
    Newport PM500 stage repairs

Kensington Laboratories, LLC 6200 Village
Parkway Dublin , CA 94568 Phone
510.324.0126 Fax 510.324.0130 www.kensingtonlabs.
Our Toll Free Number 1-888-977-7800