POLYGENERATION OF ELECTRICITY, HEAT and ULTRA PURE WATER for SEMICONDUCTOR INDUSTRY

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POLYGENERATION OF ELECTRICITY, HEAT and ULTRA
PURE WATER for SEMICONDUCTOR INDUSTRY
Chuanfeng Liu Supervisors Andrew Martin
EGI KTH Aapo Sääsk
Xzero AB Henrik Dolfe
Xzero AB
Heat and Power Technology, Stockholm, Sweden
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Content

• Objectives of thesis
• Current UPW system in semiconductor industry
• Principle of air gap membrane distillation
• Xzero test facility of Air Gap Membrane
  Distillation
• Integrated MD in cogeneration cycle
• Conclusion

Heat and Power Technology, Stockholm, Sweden
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Objectives

• Integrate MD technology into traditional heat and
  power cogeneration cycle to produce UPW for
  semiconductor industry
• Theoretical study of membrane distillation
• Experimental study of air gap membrane
  distillation
• Economic analysis

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UPW Consumption in Semiconductor Industry

• 50 of total UPW market worldwide.
• More than 6000 liters UPW for one eight-inch
  wafer
• 1.4-4.8 million liters UPW per day
• The cost of a UPW system in a fab is more than
  10 million.

Heat and Power Technology, Stockholm, Sweden
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Present UPW Production System

• Reverse osmosis (RO) and Electro-deionization
  (EDI)
• 10-20 KWH per cubic meter UPW
• 2-3MW-- 6 of total fab energy consumption

Heat and Power Technology, Stockholm, Sweden
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Make-up Section
Raw Water Tank
Multi Media Filter
Carbon Filter
Heat Exchanger
Cartridge Filter
Reverse Osmosis and EDI
Break Tank with Nitrogen Blanket
Degas
Primary Mixed Bed Exchange
UV System
Cartridge Filter
Reject
To Polishing Loop Section
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UPW Polishing Loop Section
From Make up section
UPW Water Tank With nitrogen blanket
TOC UV
Heat Exchanger
Polishing Mixed Bed Ion Exchange
UPW return line
Germicidal UV
Cartridge Filter
Ultra Filter
Fab Tool Use
Drains Rinse
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Principle of Membrane Distillation
Membrane
Hot Side
Cold side
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Advantages of MD

• 100 (theoretical) rejection of non-volatile
  matters
• lower operating temperatures
• lower operating pressure
• reduced chemical interaction
• reduced vapor spaces compared distillation
  processes

Heat and Power Technology, Stockholm, Sweden
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Flow Diagram Of Xzero Test Facility
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Computer Simulation of Membrane Distillation
Module emplyed in Aspen Utilites
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Integrated Cogeneration of MD in the
Semiconductor Industry

• The power requirement of one typical
  semiconductor fabrication plant is equal to what
  7500 single-family homes consume.
• The average power consumption for the fab is 2.18
  KW/m2, and the average cooling load is 1.53
  KW/m2.

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Combined Heat Recovery Chiller With MD Units
Waste Heat From Fab
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Combined MD With Waste Heat From Fab

• Total 35-40 MW
• Air conditioner system 4-5MW
• Condenser side 12 MW
• 20,000 l/hour possible with readily available
  waste heat sources
• About 1/3 of fab UPW requirement

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Integrated MD With Power Production

• 36 Mwei (fab electricity demand covered )
• 48,000 L/hr (2/3 UPW demand)

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Conclusion

• Polygeneration is promising in semiconductor
  industry.
• With CHP and waste heat utilization , up to 65
  m3/hr UPW possible for a fab with 5000 wafers
  production per week.
• Capital cost is around 3 per cubic meter UPW.