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Title: Technology CAD (including Lecture-Tutorial-Laboratory Modules)


1
Technology CAD (including Lecture-Tutorial-Labo
ratory Modules)
  • Dept. of Electronics ECE
  • Indian Institute of Technology-Kharagpur

First R D Centre in Information and
Communication Technology (ICT) Development among
IITs and Universities in India PI Prof. C. K
Maiti, Co-PI Prof A. S Dhar, and Prof A. Halder
2
Research Development focus
  1. To develop e-learning materials for Technology
    CAD (TCAD) Course (including tutorial and
    laboratory modules) for final year undergraduates
    and postgraduate students and implement
    Technology CAD (TCAD) online simulation
    laboratory real time simulation laboratory
    accessed through the Internet which can expand
    the range of simulation experiments in Technology
    CAD, transmit online instructions and study
    materials for anyone, anywhere and anytime.
  2. Development of e-content for an integrated
    teaching environment which allows for the
    provision of online live lectures (a 40-lecture
    module with tutorials) and a laboratory (10-12
    simulation experiments) session for
    geographically dispersed students.

3
Steps for Development of RealTIME
Measurement-based Internet Laboratory Design of
Experiment Remote Operation of the
Instruments (via LabVIEW, IC/CV lite, Easy
Expert, VEE etc) Conversion to Web
Application Launching on the Internet
4
Total Budget Outlay
(Rs. in
lakhs) Years Head 1st 2nd 3rd Total C
apital Equipment Rs. 80.00 - - 80.00 FE Comp.
Consumable stores Rs. 10.00 10.00 10.0
0 30.00 Software/License Fee Duty on import (if
any) Rs. nil nil nil nil Manpower
(JPA/RS/Eqv.) Rs. 7.00 8.00 9.00 24.00 Travel
Training Rs. 3.00 4.00 5.00 12.00 Contingen
cies/Accessories Rs. 10.00 13.00 16.00 39.00 Gr
and Total (FE Comp.) 110.00
35.00 40.00 185.00
Grand Total Rs. 185.00
lakhs
5
Course Description
Text Book G. A. Armstrong and C. K. Maiti, "TCAD
for Si, SiGe and GaAs Integrated Circuits, The
Institution of Engineering and Technology (IET),
UK, 2008. 40-50 lectures including tutorial based
on the following contents
Introduction and overview History and
structures The role of TCAD for Semiconductor
technology development TCAD principles Physics
of VLSI fabrication technology Tool Integration
Structure editing and mesh generation CMOS and
Bipolar Process technology Si, SiGe, III-V
Semiconductors Process modeling and simulation
general Simulation of device characteristics
6
Device level simulation challenges Introducing
new device models Heterojunction device
modeling Simulation of silicon germanium (SiGe)
HBTs Simulation of heterostructure FETs (HFETs)
Simulation of AlGaAs/GaAs devices Virtual Wafer
Fabrication (VWF) automation tools Example of
VWF methodology Extraction of DC and SPICE model
parameters Small signal AC analysis for CMOS and
bipolar transistors Application of mixed-mode
simulation TCAD calibration procedure Process
compact model, Design for manufacturing
(DFM), Integration into the CADENCE design
framework.
7
VLSI Engineering Laboratory Module will consist
of the following experiments
  1. Doping Profile Determination
  2. Bipolar Device Characterization
  3. MOS Capacitor Characterization
  4. MOSFET Characterization
  5. High Frequency Characteristics of BJT
  6. MOSFET SPICE Parameter Extraction
  7. Bipolar Transistor SPICE Parameter Extraction
  8. 1/f Noise Characterization in Transistors
  9. Low Temperature Characterization of Transistors
  10. LNA Characterization
  11. Noise Modeling in MOSFETs
  12. Cutoff Frequency Determination

8
What is Technology CAD (TCAD)Rising
Technological Complexity
Gate insulator SiO2/HiK Leakage Trapping
Gate Work function Depletion
Channel Mobility
Raised S/D Material Activation Diffusion
S/D extension Activation Junction (USJ)
Device Scaling More Simulation Needed
Application Design, analyze and optimize
semiconductor technologies and devices
9
Full TCAD Flow
10
TCAD Optimization and Manufacturability
11
Sensitivity, uncertainty yield analysis
Determine the most stable process condition
12
Yield analysis
Device spec limits
13
Some Strained-Engineered Devices
14
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15
Some available facilities Hardware facilities
Software Server
NetLAB Server
16
Network Analyzer
Noise Figure Analyzer
Spectrum Analyzer
DC Probe station
17
AFM Setup
Agilent Semiconductor Test Analyzer
18
Software facilities
  • Instrument Control software
  • LabVIEW, VEE, VSA, IC-CAP, IC/C-V light,
    EasyExpert, Microsoft Inst., etc.
  • TCAD software
  • SILVACO, Sentaurus, MEDICI, TSupreme, Taurus,
    Monte Carlo, HSPICE, Nanosim, PCM studio,
    PARAMOS, etc.

19
Requirements List of Equipment
  1. Four Probe Resistivity Meter (25 lakhs)
  2. Mask Aligner (75 lakhs)
  3. Clean Air station (20 lakhs)
  4. Rapid Thermal Annealing System (45 lakhs)
  5. Semiconductor Test System (35 lakhs)
  6. Microwave/ECR Plasma System (55 lakhs)
  7. DC/RF Sputtering System (45 lakhs)
  8. Probe station (50 lakhs)
  9. Programmable power supply (20 Lakhs)
  10. Thickness Measurement system (30 lakhs)
  11. AFM/STM (30 lakhs)
  12. Spectrum analyzer (10 Lakhs)
  13. LCR Meter (10 lakhs)
  14. Semiconductor Parameter Analyzer (50 lakhs)
  15. Noise Figure Analyzer (55 lakhs)
  16. Network Analyzer up to 26 GHz with calibration
    kits (200 lakhs)
  17. Parameter extraction and device/process modeling
    software tools (45 lakhs)

20
Achievement in ICT Area
  1. NetLAB based Measurement and Analysis
  2. First On Line Laboratory Demonstration at Andhra
    University (AU)
  3. First short term course on Information
    Communication Technology (ICT) on Hardware
    Laboratory at IIT-Kharagpur
  4. Arranged several short term courses on Technology
    CAD (TCAD) at IIT-Kharagpur
  5. Arranged several short term courses on Technology
    CAD (TCAD) outside IIT-Kharagpur

21
Book Published
  • 1. Applications of Silicon-Germanium
    Heterostructure Devices, Institute of Physics
    Publishing (IOP), UK, 2001.
  • 2. Silicon Heterostructures Materials and
    Devices, Institute of Electrical Engineers (IEE),
    UK, 2001.
  • 3. Selected Works of Professor Herbert Kroemer,
    Edited, World Scientific, Singapore 2008.
  • 4. Strained-Si Heterostructure Field-Effect
    Devices, CRC Press, London, 2007.
  • 5. TCAD for Si, SiGe and GaAs Integrated
    Circuits, IET, UK, 2008.

22
OUR Publications on INTERNET LABORATORY on
MICROELECTRONICS
  • A. Maiti and S. S. Mahato, Online Semiconductor
    Device Characterization and Parameter Extraction
    Using World Wide Web, Proc. NCNTE, Feb. 29 Mar.
    01, pp.160-163, 2008.
  • A. Maiti and S. S. Mahato, Web-based
    Semiconductor Technology CAD (TCAD) Laboratory,
    50th Intl. Symp. ELMAR-2008, Zadar, CROATIA,
    10-12 September 2008.
  • A. Maiti and S. S. Mahato, Web-based
    Semiconductor Process and Device Simulation
    Laboratory, Proc. of ICEE2008, Intl. Conf. on
    Engineering Education, "New Challenges in
    Engineering Education and Research in the 21st
    Century", PÉCS-BUDAPEST, HUNGARY, JULY 27-31,
    2008.
  • S. C. Pandey, A. Maiti, T. K. Maiti and C. K.
    Maiti, Online MOS Capacitor Characterization in
    LabVIEW Environment, International Journal of
    Online Engineering (iJOE), vol.5, pp.57-60, 2009.
  • A. Maiti, M. K. Hota, T. K. Maiti and C. K.
    Maiti, Online Microelectronics and VLSI
    Engineering Laboratory, International Workshop on
    Technology for Education, Bangalore, Aug 04-06,
    2009.

23
Currently Available Experiments via INTERNET from
IIT-KHARAGPUR(RealTIME Online Measurement-based)
  1. Gummel Plot of a BJT
  2. Output Characteristics of a BJT
  3. Threshold Voltage of a MOSFET
  4. Output Characteristics of a MOSFET
  5. MOSFET Parameter Extraction
  6. BJT SPICE Parameter Extraction
  7. Low Noise Amplifier Characterization
  8. Surface Analysis using AFM/STM
  9. Circuit Analysis Using NI-Elvis

24
NetLAB Webpage
25
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26
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27
Partner/USER Institutions
Our Current Partners are VIT, Vellore NIST,
Berhampur OUR ONLINE LABORATORY HAS BEEN USED
and TESTED BY More Than 50 ENGINEERING
COLLEGES and 10 UNIVERSITIES
28
Short Term Course/Workshop AICTE/MHRD sponsored
SUMMER SCHOOL at IIT KHARAGPUR May 17-23,
2009 Applications of ICT for Hardware
Laboratory 52 participants from 40 Engineering
Colleges
29
List of Participating Institutions
  • VIT University, Vellore
  • NIST, Berhampur
  • West Bengal University of Technology, Kolkata
  • University of Calcutta
  • Inst. of Radiophysics and Electronics
  • North Bengal University, Siliguri
  • NIT, Durgapur
  • Bengal Engg. and Science University, Shibpur
  • Tezpur (Central) University, Tezpur

30
  • IMPS College of Engg. and Technology, Malda
  • Gurgaon College of Engg., Haryana
  • Hi-Tech Institute of Technology, Khurda
  • National Institute of Technology, Warangal
  • SSN College of Engg., Tamilnadu
  • Synergy Institute of Engg. and Technology,
    Dhenkanal
  • Medi-caps Institute of Technology Management,
    Indore
  • Dr. BR Ambedkar National Institute of Technology,
    Punjab
  • Jaypee Univ. Of Information Tech., Solan, H.P.
  • Dronacharya College of Engg., Gurgaon, Haryana
  • CVR College of Engg., Hyderabad, A.P.
  • Sai Spurthi Institute of Technology, A.P.
  • Lingaya's Institute of Mgt and Technology,
    Faridabad

31
  • Purushottam Institute of Engg. Tech., Rourkela,
    Orissa
  • National Institute of Science Technology,
    Orissa
  • Hi-Tech Institute of Tech., Orissa
  • GLAITM, Mathura, U.P.
  • Dr. B. C. Roy Engg. College, Durgapur
  • Tradient Academy of Tech., Orissa
  • Modern Engg. Management Studies, Orissa
  • GLA Institute of Tech. Management, Mathura
  • Synergy Institute of Engg. Tech., Orissa
  • ITER, Bhubaneswar
  • Synergy Institute of Engg. Tech., Orissa
  • DRIEMS, Cuttack
  • Lingayas University, Faridabad
  • Birla Institute of Technology, Patna
  • Dr. Sivanthi Aditanar College of Engg., Tamilnadu

32
  • PSN Group of Institutions, Tamilnadu
  • Orissa Engg. College, Bhubaneswar
  • JIET, Cuttack
  • Raajdhani Eng. College, Bhubaneswar
  • World Institute of Technology, Gurgaon
  • Dept. of Bio-Medical Engg., Andhra University
  • Andhra University College of Engg., Visakhapatnam
  • GITAM University, Visakhapatnam
  • Chaitanya college of Engg., Visakhapatnam
  • SRKR Engg. College, Visakhapatnam
  • Govt. Polytechnic, Bheemili
  • Sanketika Vidya Parishad Engg. College,
    Visakhapatnam
  • JNTU College of Engg., Hyderabad
  • National Engg. College, Tamilnadu
  • Institute of Technology and Management, Gurgaon

33
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