prezentare ZnO

1
Institute of Physical Chemistry Ilie
Murgulescu, Romanian Academy
Improved TCO materials for the next generation
transparent electronics and their complex
investigation by wide range ellipsometry from UV
to Mid IR
PN II-ID-PCE-IDEI 12/05.10.2011
Project Director Dr. Mariuca Gartner
1
2
Project Summary

• Transparent conductive oxides (TCO) are materials
  that exhibit electrical conductivity and high
  optical transparency together with a wide
  band-gap. The traditional applications of these
  materials are flat-panel displays, light-emitting
  diodes, solar cells, and imaging sensors.
• The aim of this project is the preparation by
  low-cost sol-gel methods of improved TCO (ITO,
  ZnO) and of new generation of TCO (Nb or V doped
  TiO2, SrCu2O2) n and p type films with various
  morphologies on different substrates (silicon,
  glass and plastics), having a very stable
  surface.
• A complete optical and microstructural
  characterization of the TCO samples will be
  performed by ellipsometry in a wide spectral
  range, from UV to Mid-IR (our IR ellipsometer
  being the only one available in Romania) and the
  results will be corroborated with those obtained
  by complementary methods (UV-VIS, IR and Raman
  spectroscopy, XRD, XPS, AFM, SEM, TEM, electrical
  measurements).
• A database for optical constants of the TCO
  investigated materials in the IR range (2-33?m),
  which for the moment is lacking in the
  literature, will be provided.
• In the frame of this project the best films
  obtained will be used in specific tests for
  solar-cell application.

2
3
Budget
No. Budget category 2011 (lei) 2012 (lei)
1. Staff expenses 63500.00 333500.00
2. Indirect expenses 16700.00 116700.00
3 Mobilities 0.00 42753.80
4. Logistic costs 20000.00 207246.20
TOTAL 100200.00 700200.00
3
4
Re
Research team
No. Surname and first name Year of birth Scientific title Doctorate
1 Zaharescu Maria 1938 Senior Researcher I M.C. Acad, Dr
2 Osiceanu Petre 1949 Senior Researcher I Dr
3 Mihaiu Susana 1952 Senior Researcher II Dr
4 Anastasescu Mihai 1971 Senior Researcher III Dr
5 Predoana Luminita 1973 Senior Researcher III Dr
6 Stoica Mihai 1979 Researcher assistent Dr
7 Stroescu Hermine 1976 Researcher Ph D Student
8 Preda Silviu 1977 Researcher Ph D Student
9 Marin Alexandru 1986 Researcher Ph D Student
10 Penea Cornelia 1962 technician -
4
5
Project objectives in 2011
Objectives activities / Year

• (1a) Deposition of ITO films by reactive
  sputtering
• (1b) Stabilization of the surfaces by thermal
  treatment of these
• samples in N2 atmosphere

Project objectives in 2012

• (2a) Optical and electrical characterization of
  the ITO films
• (2b) Stability study of the samples in time and
  of the optimization
• routes regarding chemical and
  physical stabilization of the
• sample surfaces
• (2c) Obtaining of n and p-type conduction ITO
  and ZnO by sol-gel
• method

5
6
Scientific contributions based on the results
obtained in 2011-2012

• Published papers
• Influence of the Substrate and Nitrogen Amount on
  the Microstructural and Optical Properties of
  Thin r.f.-Sputtered ZnO Films Treated by Rapid
  Thermal Annealing, M. Nicolescu, M. Anastasescu,
  S. Preda, H. Stroescu, M. Stoica, V.S.
  Teodorescu, E. Aperathitis, M. Modreanu, M.
  Zaharescu, M. Gartner, Appl.Surf.Sci., 261
  (2012) 815 823 (FI 2.103)
• Submitted papers
• Influence of thermal treatment in N2 atmosphere
  on chemical, microstructural and optical
  properties of ITO and ITON sputtered thin films,
  H.Stroescu, M.Anastasescu, S.Preda, M.Nicolescu,
  M.Stoica, N.Stefan, E. Aperathitis, M.Modreanu,
  M.Zaharescu, M. Gartner- Thin Solid Films - in
  print (FI1.89)
• Optical investigations of tin and zinc oxides as
  TCOs films, Al. Toader, S. Mihaiu, M. Voicescu,
  M. Anastasescu, H. Stroescu, M. Nicolescu, I.
  Atkinson, M. Gartner, M. Zaharescu, accepted
  Proceedings of SPIE, 2012

6
7
Scientific contributions based on the results
obtained in 2011-2012

• Conferences oral presentations
• Influence of thermal treatment in N2 atmosphere
  on chemical, microstructural and optical
  properties of ITO and ITON sputtered thin films,
  H.Stroescu, M.Anastasescu, S.Preda, M.Nicolescu,
  M.Stoica, N.Stefan, E. Aperathitis, M.Modreanu,
  M.Zaharescu, M. Gartner- EMRS, Spring Meeting,
  13-18 Mai 2012, Strasbourg, Franta
• Influence of the Substrate and Nitrogen Amount on
  the Microstructural and Optical Properties of
  Thin r.f.-Sputtered ZnO Films Treated by Rapid
  Thermal Annealing, M.Nicolescu, M. Anastasescu,
  S.Preda, H.Stroescu, M.Stoica, V.S.Teodorescu,
  E.Aperathitis, M. Modreanu, M.Zaharescu,
  M.Gartner, JVC-14 / EVC-12 / AMDVG-11 /
  CroSloVM-19 conference, 3-8 Iunie 2012,
  Dubrovnik, Croatia.
• Optical investigations of tin and zinc oxides as
  TCOs films, Al. Toader, S. Mihaiu, M. Voicescu,
  M. Anastasescu, H. Stroescu, M. Nicolescu, I.
  Atkinson, M. Gartner, M. Zaharescu, Atom-2012,
  23-26 August, Constanta, Romania
• Transparent Conductive Oxides (TCO) - properties
  and stability studies, M. Anastasescu, M.
  Nicolescu, S. Preda, H. Stroescu, M. Stoica, E.
  Aperathitis, V. Kampylafka, M. Modreanu, M.
  Zaharescu, M.Gartner, Current trends and
  advanced ellipsometry and all X-ray techniques
  for the characterization of TCO, BIO and other
  nanostructured materials workshop,
  12-14,Septembrie 2012, Bucuresti, Romania
• TCO sol-gel films based on tin and zinc oxides,
  Al. Toader, S. Mihaiu, M. Voicescu, M.
  Anastasescu, H. Stroescu, M. Nicolescu, I.
  Atkinson, M. Gartner and M. Zaharescu, Current
  trends and advanced ellipsometry and all X-ray
  techniques for the characterization of TCO, BIO
  and other nanostructured materials workshop,
  12-14,Septembrie 2012, Bucuresti, Romania
• Preparation and Characterization of
  Nanostructured ZnO Thin Films for Solar Cell
  Application, E. P. Zaretskaya , V.A. Ivanov, V.B.
  Zalesski, M. Stoica, M. Nicolescu, M. Gartner,
  International Conference on Modern Applications
  of Nanotechnology, 27-29 June 2012, Minsk ,
  Belarus

7
8
Scientific contributions based on the results
obtained in 2011-2012

• Conferences poster presentations
• The stability of the ITO sputtering films by
  thermal treatment in N2 atmosphere, H. Stroescu,
  E. Aperathitis P.Osiceanu, M. Anastasescu,
  A.Marin, M. Modreanu, O. Buiu, M. Gartner, "7th
  Workshop Ellipsometry", 4-8 Martie, 2012,
  Leipzig, Germania
• Investigation of the surface chemistry of ITO /
  ITON thin films before and after N2 passivation,
  A. Marin, E. Aperathitis, P. Osiceanu, S.Preda,
  M. Modreanu, M. Gartner, M. Zaharescu, EMRS,
  Spring Meeting, 13-18 Mai 2012, Strasbourg,
  Franta
• Structural Characterization of Different TCO
  films obtained by various vacuum deposition
  method, S.Preda, M.Gartner, S.Mihaiu, L.
  Predoana, M. Zaharescu, JVC-14 / EVC- 12 /
  AMDVG-11 / CroSloVM-19 conference, 3-8 Iunie
  2012, Dubrovnik, Croatia
• Structural, morphological and optical properties
  of SrCu2O2 thin films, M. Stoica, H. Stroescu, M.
  Anastasescu, M. Modreanu, N. Jamond, G. Garry, M.
  Gartner, JVC-14 / EVC- 12 / AMDVG-11 /
  CroSloVM-19 conference, 3-8 Iunie 2012,
  Dubrovnik, Croatia
• Optical investigations of tin and zinc oxides as
  TCOs films, Al. Toader, S. Mihaiu, S.Preda, M.
  Gartner, I. Atkinson and M. Zaharescu, Atom-2012,
  23-26 August, Constanta, Romania
• Nitrogen evolution during annealing of sputtering
  Indium Tin Oxide films studied by XPS, A. Marin,
  P. Osiceanu, E. Aperathitis, A. Szekeres, M.
  Modreanu, M. Gartner, "17th International School
  on Condensed Matter Physics", 2-8 Septembrie,
  Varna, Bulgaria
• Optical, structural and chemical study of TCO
  thin film after chemical and physical treatment,
  H. Stroescu, M. Nicolescu, M. Anastasescu, M.
  Stoica, A. Marin, P. Osiceanu, M. Modreanu, E.
  Aperathitis and M. Gartner, "17th International
  School on Condensed Matter Physics", 2-8
  Septembrie, Varna, Bulgaria
• Surface chemistry of RF-sputtering Indium Tin
  Oxide and Indium Tin Oxynitride thin films, A.
  Marin, P. Osiceanu, E. Aperathitis, A. Szekeres,
  M. Modreanu, M. Gartner,Current trends and
  advanced ellipsometry and all X-ray techniques
  for the characterization of TCO, BIO and other
  nanostructured materials workshop, 12-14,
  Septembrie 2012, Bucuresti, Romania
• AFM, XPS and ellipsometric observations on ITO
  thin film versus annealing type, H. Stroescu, M.
  Nicolescu, M. Anastasescu, M. Stoica, A. Marin,
  P. Osiceanu, M. Modreanu, E. Aperathitis and M.
  Gartner, Current trends and advanced
  ellipsometry and all X-ray techniques for the
  characterization of TCO, BIO and other
  nanostructured materials workshop, 12-14,
  Septembrie 2012, Bucuresti, Romania

8