NanoZoom

1
Nano-Zoom

• JMAR Precision Systems, Inc.
• 9207 Eton Avenue,
• Chatsworth, CA 91311
• Phone [phone]
• Fax [phone]
• www.jmar-psi.com

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Nano-Zoom

• The Nano-Zoom combines a high quality optical
  microscope and a state-of-the-art scanning probe
  microscope (SPM) into a single system.
• The Nano-Zooms SPM is capable of
• Atomic Force Microscopy
• Lateral Force Microscopy
• Magnetic Force Microscopy (optional)
• Electric Force Microscopy (optional)
• Use the optical microscope to find a feature on
  your sample.
• Press a button to move that feature precisely
  under the SPM.
• Scan your sample with the SPM at Angstrom
  resolution.
• The Nano-Zoom can be equipped with a vacuum
  chuck for holding disk media or semiconductor
  wafers, or fixtures for a variety of other
  materials.

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Nano-Zoom
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Why use an AFM?

• Resolution.
• The resolving power of an optical microscope is
  about 300 nm.
• AFM offers the best resolution and fidelity. The
  sharp, crisp high definition edge sets the stage
  for good measurement.
• Material independence.
• Versatility.
• Surface topography
• Height measurements
• Width measurements
• Profiles
• Non-Destructive.
• Compare to SEM, whose cross section measurements
  are destructive.

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How Does an AFM Work?

• Instead of using light or electrons to probe the
  sample, the AFM uses a tip suspended above the
  surface.
• The attractions or repulsions between the tip and
  the surface cause the tip to deflect.
• A laser senses the deflection.
• Scanning the tip across the surface generates the
  image.

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Scanned Disk Media

• The next slide shows a 5 mm 5 mm Nano-Zoom
  Atomic Force Microscope (AFM) image of rigid disk
  media. The AFM renders a 3-dimensional image of
  the surface of the media. Features that are too
  small to see in an optical microscope are clearly
  visible in the AFM scan.

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AFM Image of Disk Media
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AFM Image of Disk Media 3D View
The next slide shows a 3 dimensional plot of the
same 5 mm 5 mm AFM scan of rigid disk media.
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AFM Image of Disk Media -- 3D View
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Surface Roughness Calculation

• The Nano-Zoom includes software with many
  features for analyzing AFM data. The next slide
  shows a height histogram and surface roughness
  calculations for the same AFM scan of rigid disk
  media. For this sample, the RMS deviation of the
  surface height is 4 Angstroms.

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Surface Roughness CalculationAFM Data on Rigid
Disk Media
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AFM Image of Grating Pattern

• The next slide shows an AFM image of a metallic
  grating imprinted on a film substrate.

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AFM Image of Grating Pattern Slope View
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AFM Image of Grating Pattern 3D View

• The next slide shows a 3 dimensional rendering of
  the same AFM scan.

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AFM Image of Grating Pattern 3D View
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Measurement View of Grating Pattern

• The next slide shows the measurement screen of
  the AFM software, along with a sample measurement
  of two periods of the grating. The grating pitch
  is 40 mm, conforming to specification!

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Measurement View of Grating Pattern
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Defect View

• The next slide shows the Defect Screen of the
  Nano-Zoom software. Several software features
  are illustrated, including the following
• A defect table with imported data.
• A Polar View of the entire sample surface
  indicating the current field of view and the
  defect locations.
• Live video from the microscope.
• Big Digital Readouts showing the position in the
  sample parts coordinate system.

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Nano-Zoom Defect View
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Nano-Zoom Applications

• Defect Review
• CMP Process Verification
• IC Failure Analysis
• Width, Depth, and Height Measurements
• Surface Roughness
• Fiber Optic Gratings
• Pole Tip Recession
• CD/DVD Inspection
• Disk Media Inspection
• Wafer Inspection
• Thin Film Inspection
• Etc.

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Specifications AFM Optics

• Scanning Probe Microscope (SPM) Specifications
• X,Y Scan Size 80 µm x 80 µm standard, extendable
  to 200 µm.
• Z Range 8 µm standard, extendable to 20 µm.
• X,Y resolution 1 nm (smaller resolutions are
  available).
• Z resolution lt 1 Å.
• Variety of probe tips available
• Operational modes Contact, Intermittent Contact,
  Broadband, etc.
• Lateral Force Microscopy.
• Optional Magnetic Force Microscopy.
• Optional Electric Force Microscopy.
• Easy probe tip installation and alignment.
• Automatic probe tip engage feature.
• Top Quality Optical Microscope
• Dark field and bright field illumination.
• 5 position lens turret.
• Objective lenses 5x, 20x, 50x, 100x
  standard.Other lenses are available.
• 10X eyepieces standard.
• Optional Differential Interference Contrast
  (DIC).

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Additional Specifications

• Precision Motion Platform
• Computer-controlled R, ?, Z precision motion
  platform.
• R Stage 0.1 micron resolution, 10 inches travel.
• Z Stage 0.1 micron resolution, 6 inches travel.
• ? Stage 0.001 resolution.
• For 150 mm wafers or disks (extendible to 200
  mm).
• Acoustic and vibration isolation included.
• Other features
• Optional scriber with diamond or steel tips to
  etch your sample.
• Acoustic and vibration isolation.
• Small equipment foot print.
• Measurements are non-destructive.

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System Isolation

• Vibration Isolation
• Standard passive vibration isolation system,
  natural frequency 1 Hz.
• Optional AVI-150 active vibration isolation
  system.
• Active isolation 1-200 Hz.
• Passive isolation gt200 Hz.
• Correctional forces to 8N horizontal, 4N
  vertical.
• Isolation in 6 degrees of freedom.
• Virtually no resonance.
• Acoustic Isolation
• Foam-lined enclosure isolates the system against
  acoustic noise and air currents.

Optional AVI-150
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Software Features

• Easy to Use Windows-based software.
• 3D Visualization of AFM images.
• Image refinement with tilt removal, streak and
  spot removal, smoothing and user defined filter.
• Fourier transform analysis for analyzing and
  modifying the frequency spectrum of SPM images.
• Histogram analysis and surface roughness
  measurements.
• Dimensional analysis for measuring feature
  height, width, and length.
• Image storage and retrieval.
• Optional Pax-It image archival software
  maintains a database of images, makes it easier
  to organize, analyze, network, transmit and print
  images.
• Defect classification system. Defect table
  displays list of defects, allows user to move to
  a defect manually or automatically and classify
  it.
• Reads/writes text files containing defect
  positions. Easy to export/import defect data
  to/from other machines.
• Polar view displays a diagram of your sample with
  all defect locations.
• Large digital readouts display part position
  continuously.

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Choosing an AFM Probe Tip
Chose a probe tip with a small enough radius to
resolve features of interest.
Chose a probe tip that is long enough and with a
narrow enough cone angle for the features being
measured.
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JMAR Probe Tips
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JMAR-PSI Sales

• Address
• JMAR Precision Systems, Inc.
• 9207 Eton Ave.
• Chatsworth, CA 91311-5808
• Web
• www.jmar-psi.com
• E-Mail
• salesjpsi_at_jmar-psi.com

• Phone
• 1-800-793-0179
• 1-818-700-8977
• Fax
• 1-818-700-8984

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Image Gallery
The remaining slides have more SPM images and
measurements. Enjoy!
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Alumina Layer
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CeO2 Film
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Crystals on Pr-Ce Pellet Surface
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Sapphire Substrate
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SiO2 Film
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SiO2 on Re Crystal Substrate
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Northrop-Grumman Test Pattern
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Alumina Layer With Vias
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Line Heights
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Pits on CD Media
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Via Height Measurements
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Photoresist Residue on 1-D Refill Lithography
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GaN
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Homoepitaxial SiC
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Polished SiC
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SiC Film
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Corrosion
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Chrome on Glass
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Stainless Steel
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Ti Film
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JMAR-PSI Sales

• Address
• JMAR Precision Systems, Inc.
• 9207 Eton Ave.
• Chatsworth, CA 91311-5808
• Web
• www.jmar-psi.com
• E-Mail
• salesjpsi_at_jmar-psi.com

• Phone
• 1-800-793-0179
• 1-818-700-8977
• Fax
• 1-818-700-8984