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Semiconductor Equipment Fire Suppression Compliance

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Enclosed Compartments. Mini-Environments ... 24VDC Fire Alarm System Spot Smoke Detector ... Not effective in Exhausted or 'Open' Compartments. NFPA 12 2005 ... – PowerPoint PPT presentation

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Title: Semiconductor Equipment Fire Suppression Compliance


1
Semiconductor EquipmentFire Suppression
Compliance
  • for
  • SESHA Texas Hill Country Chapter
  • by
  • Matt Wyman, Semiconductor Division Manager
  • KOETTER FIRE PROTECTION INTERNATIONAL
  • June 14, 2007

2
Koetter Fire Protection
  • Specialize in Semiconductor Equipment Fire
    Protection
  • Global Design Install CO2 FWS
  • Bulk Control Systems for CO2 FWS
  • Corrosive Applications (Combustible Plastics)
  • SEMI Standards Fire Protection Task Force Leader
  • Specialize in Equipment Design Integration
  • Code Review Compliance Consulting
  • NFPA/FM Standards
  • SEMI Standards
  • Semiconductor Fire Protection Training Seminars
  • KFP Test Training Bench
  • Industry White Papers
  • Industry Presentations (SESHA)
  • 7 Texas Locations International

3
Overview
  • Are my new and/or existing fire suppression
    systems compliant?
  • Quick CO2 Design Review
  • Local Application Nozzles
  • CO2 Tubing
  • Fire Detectors
  • NFPA 12 2005 Changes
  • Bulk Systems
  • Hatsuta Cabinex Equipment
  • Fine Water Spray
  • Fire Suppression Submittals

4
Fire Codes
  • IFC2006
  • Combustible Tool gt4ft. Wide
  • Sprinkler Head Inside or Gaseous Fire Suppression
  • FM DS 7-7 Semiconductor Fabrication Facilities
  • CO2 or FWS (Fine Water Spray)
  • CO2 is most widely utilized
  • Extinguish 13kW Fire
  • NFPA 12 Carbon Dioxide
  • SEMI S14 Safety Guidelines for Fire Risk
    Assessment Mitigation for Semiconductor
    Manufacturing Equipment
  • SEMI S2 Environmental, Health, Safety
    Guideline for Semiconductor Manufacturing
    Equipment
  • Chapter 14 Fire Protection
  • NFPA 318 Protection of Semiconductor Fabrication
    Facilities

5
CO2 Design
  • Total Flood (TF)
  • Enclosed Compartments
  • Mini-Environments
  • Plenums, Head Cases, Chemical Cabinets
  • Reach 50 CO2 Concentration
  • 60 Second Discharge
  • Compensate CO2 Demand for
  • Process Exhaust Ventilation
  • Damper Violates SEMI S2
  • Unclosable Openings

6
CO2 Design
  • Local Application (LA)
  • Open Compartments
  • Working Surfaces
  • Rate by Volume
  • Assumed 3D Volume
  • 30 Second Discharge
  • No Compensation for Exhaust Ventilation
    Openings
  • Combination System (TF LA)
  • Typically 30 Second Discharge

7
Existing CO2 Systems
  • Quick CO2 Review
  • No Calculations
  • Check that Supply Demand
  • Typical Wet Bench
  • Exhaust Rates 125cfm/linear foot (typical)
  • Quick Demand Calcs
  • TF Demand 11.5 of Volume (60sec)
  • Volume Dimension Exhaust (60sec)
  • LA Demand Average
  • (8ft 50lbs, 6ft 35lbs, 4ft 20lbs)

8
Quick CO2 Review
  • Example 8L x 4D x 6H Enclosed Plastic
    Bench-100lbs. CO2
  • Total Volume (TF) 192cuft x 11.5 22.1 lbs.
  • Exhaust Volume (TF) 125cfm/ft x 8ft x 11.5
    115 lbs.
  • Total Demand (TF) 137 lbs. CO2
  • CO2 Supply NOT ADEQUATE
  • Example 6L x 4D x 5H Open Solvent
    Bench-100lbs CO2
  • Working Surface (LA) 35 lbs. (Typical)
  • Plenum Volume (TF) 6ft x 4ft x 3ft 72cuft x
    11.5 8.3 lbs.
  • Plenum Exhaust (TF) 125cfm/ft x 6ft x 11.5/2
    43.1 lbs
  • Total Demand 86.4 lbs.
  • CO2 System ADEQUATE

9
Nozzle Comparisons
  • LA Nozzles
  • All have cone to absorb discharge pressure
  • Reflected discharge from orifice
  • Less exit velocity (same flow rate)
  • Nozzle absorbs most 600psi discharge pressure
  • TF Nozzles
  • V Nozzle is Vent nozzle (TF)
  • Straight discharge from orifice
  • Full effects of 600psi discharge pressure on
    tool (especially baths)
  • Much higher velocity

10
Local Application Nozzles
  • Working Surface Areas (Wet)
  • Cone shaped for Soft discharge
  • Cone shape provides larger 2D coverage area
  • Nozzles pointed downward towards back wall
  • Provides rolling effect across Working Surface

Front View
Side View
11
LA Nozzle Listings/Approvals
  • All Local Application Nozzles Must Have Coverage
    Chart
  • 2D Coverage of LA Nozzle
  • Ansul CR D Nozzle
  • Ansul D Nozzle
  • Identical Nozzles
  • FM Listing FM testing

12
LA Nozzle Coverage
  • Does this apply to other manufacturers and
    models?
  • Ansul
  • Has Other LA Nozzles
  • Not for Wet Bench (different coverage chart)
  • Hatsuta Cabinex-EWT
  • Has FM Approved LA Nozzle for Wet Bench
  • Has Own Coverage Chart
  • Chemetron
  • Has FM Approved LA Nozzle(s)
  • Not for Wet Bench (different coverage chart)
  • Kidde
  • Has FM Approved LA Nozzle(s)
  • Not for Wet Bench - (different coverage chart)
  • What about Kidde V Nozzle for LA?

13
Kidde V Nozzle
  • Kidde V Nozzle from Compliance review
  • 1st - Listed Approved by UL/FM as TF Nozzle
    ONLY
  • No LA Coverage Chart in Design Manual
  • NOT LISTED/APPROVED FOR USE AS LA NOZZLE
  • 2nd - CAN CREATE A SEVERE SPLASH HAZARD
  • VVent type is designed for high velocity
    discharge to overcome exhaust ventilation.
  • Many documented cases where discharge splashed
    acid baths
  • Dangerous Exposure to Personnel
  • 3rd - Kidde began manufacturing and listing of
    Stainless Steel V nozzle in June 2005.
  • Previously only available in brass.
  • Previous SS installations were not
    listed/approved components
  • 4th - Not supported by Kidde for LA Coverage

14
Kidde V Nozzle
  • Copy of Letter from Kidde regarding use of V
    Nozzle for LA Coverage
  • Dated May 26, 2006

15
SS Corrosion Protection
  • Halar Coating for Stainless Steel Nozzles,
    Fittings, Tubing in Corrosive Areas

CO2 Tubing
CO2 Fittings
CO2 Nozzles
16
SS Tubing Compression Fittings
17
Detection
  • Optical Flame Detection (13kW Fire)
  • Solvent Areas
  • Corrosive Areas
  • High Exhaust Rate Areas
  • Heat Detection (155ºF)
  • Low Exhaust Rates 400cfm limit
  • Slower Response Tolerate Larger Fire
  • Linear Heat Detection (Corrosive Areas)
  • Cross-Zoning Flame Heat Detectors (Asia)
  • Prevents False Discharges
  • But Negative Affect to Performance

18
Flame Detectors
  • Infrared (IR) Ultraviolet (UV) Sensors
  • UV
  • Quartz Window
  • Can be Masked by
  • Gases, Smoke, Fumes
  • IR
  • Near Band (4.3µ)
  • Hydrocarbon Fire
  • Wide Band (0.7-3.5µ)
  • Visible (0.4-0.7µ)
  • Sierra DCR1(S)
  • UV/IR
  • Cheapest
  • Leakage Problems
  • Quartz Window
  • HF

19
Flame Detectors
  • Cabinex SX-7000
  • Triple Band IR (Near)
  • Reliability?
  • Chemical Compatibility?
  • Det-Tronics PM-5MP
  • Dual Band IR (Near)
  • Really Fast
  • False Alarm Issues
  • Fire Sentry FS7
  • Near Band, Wide Band, Visible IR
  • Hydrocarbon Non-hydrocarbon
  • Alarm Pre-Alarm Outputs
  • 5-sec Alarm Verification (Flash Fires)
  • FirePic History
  • Most Reliable Flame Detector!

20
Flame Detector Reliability
  • False Alarm Immunity
  • KFP TEST
  • Compare Reliability of FS7 vs. PM-5MP to Steam
  • Blackbody IR Radiation
  • Alarm Signal (False Alarm)
  • 300ºF - 600ºF
  • 6 36 Distance
  • Det-Tronics Technical Note
  • Alarm from Mini Maglite _at_ 2 w/o window
  • Alarm from Maglite _at_ 1-3 with w/o window
  • Alarm from Quartz Halogen Light _at_ 3ft.

21
Spot Smoke Detectors
  • 2 Types
  • 120VAC First Alert Spot Smoke Detector
  • UL Listed as RESIDENTIAL detector
  • 24VDC Fire Alarm System Spot Smoke Detector
  • UL Listed for use with compatible cross-listed
    FACP
  • SEMI S2 Section 14.4.4 Fire Detection, Alarm,
    Controls
  • 14.4.4.12 All detectors, alarms, and controls be
    accepted and listed by an accredited laboratory
    (example UL or FM) and installed in accordance
    with the terms of that acceptance and appropriate
    national or international standards (ex. NFPA 72)
  • Spot Detectors are NOT Compliant (NFPA/SEMI/UL)
  • Without connection to Fire Control Panel
  • Spot Detectors require 2.5 obs./ft.
    concentration
  • Not effective in Exhausted or Open Compartments

22
NFPA 12 2005
  • NEW Changes to NFPA 12 2005 Edition
  • Retroactive upon AHJ
  • Labels must meet ANSI Z535
  • Orange Warning Color
  • Warning Triangle Symbol
  • Aspiration Symbol
  • Outside Protected Space
  • At Manual Activation
  • SEMI S1 Compliant

23
NFPA 12 2005
  • Lockout Valves (Not Required)
  • Required except where personnel cant enter space
    (4.3.3.6)
  • Where CO2 can migrate to expose personnel
    (4.3.3.6.1)
  • System should Lockout during maintenance or
    testing (4.3.3.6.3)
  • Lockout Valve should be supervised
  • Pressure Switch installed between Supply and
    Lockout Valves (4.5.4.11)
  • Disable/By-Pass Switch (Required)
  • Electrically operated systems should have service
    disconnect switch (4.3.3.7)
  • Switch should be supervised (keyed)

24
Bulk Systems
  • High Pressure or Low Pressure CO2 or FWS
  • Large Supply of Agent to Protect Multiple Systems
  • Main Reserve
  • Controlled Release of CO2
  • Benefits
  • Floor Space
  • Controls
  • Tool Uptime
  • Life Cycle Cost
  • Negative
  • Higher Install Cost
  • Major Retrofit or New Fab Project

25
Bulk CO2 Compliance
  • What is wrong with this design?
  • 40 Tools on 1 HP Manifold System
  • 1st - Largest FACP has maximum approval of 10
    independent releasing hazards
  • Solution Minimum of 4 releasing panels

26
Bulk CO2 Design
  • FACP Approval/Listings
  • Limited to maximum of 10 independent releasing
    hazards
  • 10 Tools

27
Bulk CO2 Compliance
  • Anything else?
  • 2nd - Location of
  • Selector Valves
  • AT EACH TOOL?
  • Where does CO2 go?
  • What about phase change in pipe?
  • How do you Calc this?
  • CANT!!

28
Bulk CO2 Design
  • Selector Valves Must Be _at_ CO2 Supply Location
  • Minimize CO2 Loss
  • Per Listed Hydraulic Calculation Programs

29
HP Manifold Configuration
LCD80 Wet Deck Annunciator
Horn / Strobe Light
Deck
Manual Pull
Keyed By-Pass Switch
STI
Sensor(s)
Nozzle(s)
CO2 Line
Owner Tech Serv
Fab Level
Selector Valve(s) Flow Switch(s)
Owner Fac Ops
SLC Loop (Device Signals)
Other Decks (10 max)
CO2 Cylinder Bank
RS485 Comms (Signal Data)
Copper (Comms)
Fiber Network (Comms)
Valve Control Signal
Manifold Control Panel
Building Panel Interface
Manifold Network Panel(s)
Sub Fab Level
30
HATSUTA CABINEX-EWT
  • FM Approved for Semiconductor Tools
  • September 2004
  • Manufactured in Osaka, Japan
  • Specifically designed for Semiconductor
  • Total Flood Local Application
  • Excellent OEM product!
  • Packaged cabinet for cylinder(s) panel
  • Worldwide Compliance!
  • CABINEX-EN NOT COMPLIANT IN USA

31
Cabinex-EWT
  • Control Cabinet
  • Up to 2, 100lb. Cylinders
  • 50 100-lbs.
  • 1.8 x 1.7 x 7.0 Cabinet
  • Integrated Panel
  • Up to 32 Addressable Inputs
  • Cross-Zoning Capable
  • Single Release Zone
  • Solenoid Gas Cartridge Actuators
  • Popular with OEMs
  • TEL, DNS, AMAT

32
Fine Water Spray (FWS)
  • Securiplex
  • Wet Bench Application
  • FM Approved
  • Extinguishing Agent
  • Fab DI Water (DIW)
  • Fab Nitrogen (N2)
  • Mixed at nozzle
  • Dual piping
  • Unlimited Supply
  • Low Pressure
  • PVDF or PFA Nozzles Tubing

33
Submittal Documentation
  • Stamped Drawings of CO2 Mechanical Electrical
    Systems including Isometric
  • FPE or NICET Level 3
  • CO2 Hazard Design Demand Calculations
  • CO2 Hydraulic Flow Calculations
  • Power Supply Battery Backup Calculations
  • Bill of Material List
  • Equipment Data Sheet Submittals
  • Sequence of Events
  • Acceptance Test Certification Form

34
CO2 Solid Modeling
35
Questions
  • Any Questions?
  • Matt Wyman
  • Semiconductor Division Manager
  • KOETTER FIRE PROTECTION
  • Dallas, Texas
  • 972.333.4965 cell
  • mwyman_at_koetterfire.com

36
Discharge Tests
  • Demonstration
  • Mock of Open Wet Bench
  • 8W x 1.6W x 2.5H
  • Recessed baths
  • Exhaust Ventilation
  • Various Discharges
  • Various Configurations
  • VIDEO

37
Test Results
  • CO2 Concentrations
  • See Table
  • Analysis
  • All Extinguish Fire Source
  • IPA/PP Pan Fire
  • Measure CO2 concentrations at various points
  • Vent type nozzles had significant splashing
    results
  • Not recommended over open baths
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