S'GENTIL, M' KOHLI, A' SEIFERT IR Microsystems, PSEC, Lausanne, CH'

1
PZT Thick Films by Diol Chemical Solution
Deposition.
S.GENTIL, M. KOHLI, A. SEIFERT IR
Microsystems, PSE-C, Lausanne, CH.

• Frame of this work
• European project for piezoelectric micro-machined
  ultrasonic transducers (pMUTs) for scanning probe
  devices
• The goal for IR-Microsystems
• Developpment of an alternative diol-based
  solution synthesis process compared to 2MOE
  solution fabrication
• significantly less carcinogenic and toxic
• - to reduce the global process time
• With lead zirconate titanate (PZT) films
  propeties optimised

Results Design Of Experiment (DOE) used to
achieve processing optimization for thick and
crack free films Reduction of time-consuming
synthesis time reduced by 50 film
deposition time shortened of about
25. Crack-free PbZr0.53Ti0.47O3 films (1-5 µm)
with 1 0 0 oriented perovskite structure