The Estimation of the Residual Stress in Ferroelectric Thin Film

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The Estimation of the Residual Stress in
Ferroelectric Thin Film
Microstructures Size effect, orientation
Properties of ferroelectric film
Interface Electrode, Boundary
Residual stress
Residual Stress in PbTiO3 thin film on different
substrate
Estimating residual stress by Raman scattering.
Assumption
Only a biaxial stress acts in the plane
(perpendicular to the surface) of the thin film
The reciprocal of the dielectric constant with
changing stress according to the modified
Devonshire theory