Measurement of the Mechanical Properties of Thin Films By Microbeam Bending - PowerPoint PPT Presentation
1 / 1
Title:
Measurement of the Mechanical Properties of Thin Films By Microbeam Bending
Description:
Micromachined cantilever beam structures for mechanical testing. Mechanical testing highlights ... Utilizing triangular geometry to extract mechanical behavior ... – PowerPoint PPT presentation
Number of Views:492
Avg rating:5.0/5.0
Title: Measurement of the Mechanical Properties of Thin Films By Microbeam Bending
1
Measurement of the Mechanical Properties of Thin
Films By Microbeam Bending
- Micromachined cantilever beam structures for
mechanical testing - Mechanical testing highlights
- Deposited Cu film on Si beam
- Use nanoindenter to deflect bi-layer
beams - Utilizing triangular geometry to extract
mechanical behavior of the film - An as-deposited 1 mm Cu film has a 0.2 yield
stress of nearly 400 MPa - Pictures on right
- SEM photo of triangular Si microbeam
- Measured stress-strain behavior of an
as-deposited Cu film
User Jeffrey Florando, MSE, Stanford Principal
Investigator Prof. William D. Nix, MSE, Stanford
NNUN Site Stanford Univeristy
