Wafer Manufacturing & Wafer Inspection - PowerPoint PPT Presentation

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Wafer Manufacturing & Wafer Inspection


If you're in the business of making silicon wafers, you've probably heard about the importance of semiconductor wafer inspection. – PowerPoint PPT presentation

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Title: Wafer Manufacturing & Wafer Inspection

Wafer Manufacturing Wafer Inspection
  • Silicon Specialist LLC

  • If you're in the business of making silicon
    wafer, you've probably heard about the importance
    of semiconductor wafer inspection. In addition to
    checking the quality of finished semiconductors,
    the manufacturing process requires bare wafers to
    be inspected for defects. These defects are
    killers for the final chips, and are one of the
    reasons why unpatroned wafer inspection is so
    important. Listed below are some of the steps
    involved in the wafer inspection process.

Defects of Wafer
  • The first step is to inspect the wafer for
    defects. A defect can either be in a region or at
    the edge of the wafer. The inspection process
    involves comparing images of a patterned wafer
    with a bare wafer to find the position of a
    defect. This information is used to determine
    whether a particular defect is present or not.
    Depending on the type of defect, a computer-aided
    design or an op-art image can determine if it's a
    small, medium, or large one.

Today's semiconductor industry faces many
challenges in wafer manufacturing.
For Example
  • 3D IC stack devices and High-Volume Manufacturing
    processes both require highly accurate wafers.
    Because of the multiple process steps, wafers are
    subject to an increased stress level. This stress
    causes defects, so it's essential to find the
    defects earlier and resolve them before they've
    caused a defect. Intelligent defect analysis, or
    Idi, uses advanced software to detect defects

Methods for Wafer Inspection
  • Optical and e-beam systems use different methods
    for wafer inspection. The e-beam system uses a
    light or electron beam to measure the pixel-sized
    area on a wafer. The difference between the two
    is the scattering process, and the image
    contrast. If the pattern measurements are outside
    the specified range, it will lead to a
    malfunction of the device, and the exposure
    transfer will require rework.
  • Digital imaging systems use a camera to detect
    and inspect a wafer. In addition to the digital
    imaging process, the scanning systems have the
    capability to scan wafers at a high resolution.
    The Optical Image Analysis (II) system is a
    high-precision microscope that enables automated
    wafer inspection. With the help of an o-E-M, the
    camera can detect the presence of traces of
    impurities on a wafer.

Role of Optical Imaging
  • Optical imaging is essential in the semiconductor
    manufacturing process. It is crucial for ensuring
    that wafers are of high quality. The Microrod (r)
    DI system is an advanced solution for defect
    analysis. Its multiple modules allow users to
    classify defects and define regions of interest
    (ROI) based on the wafer's surface. For
    structured and multi-layer wafers, the
    Opti-relational-imaging system is a
    highly-sensitive, scalable and easy-to-use tool.
  • Non-patterned-Wafers are the most common
    semiconductor components, so the
    non-patterned-Wafer inspection system is used in
    these processes. It is important to inspect the
    non-patterned wafer to ensure it is free of
    particles. The Non-patterned Wafer Inspection
    system is used for non-patterned wafers. This
    system also helps manufacturers improve the
    cleanliness of their equipment. It also detects
    defects on bare-wafers and smooth-films.

Optical-Wafer Inspection
  • Optical-Wafer inspection is essential for
    semiconductor manufacturers to monitor the
    quality of their products. A well-functioning
    system should be able to detect any defects that
    affect the quality of the product. A defect-free
    wafer is the key to a successful semiconductor
    manufacturing process. It will also provide a
    better product to consumers. Ultimately, it's all
    about quality. If you want your semiconductors to
    be safe and reliable, you need to know the right
    way to make sure they're as good as possible.

Inspection System
  • An inspection system is vital for the quality of
    a wafer. It should be able to detect any defect
    on any surface, and it should have the capability
    to perform parallel inspections of various
    layers. A defect in one layer can ruin a fab's
    entire production process. A defective reticle is
    a significant cause of a defect on a patterned or
    non-patterned wafer. The defects in the reticle
    could ruin thousands of devices.
  • An inspection system can detect physical and
    pattern defects in a wafer. A patterned wafer has
    defects in every layer. A defect inspection
    system can detect these defects. In contrast,
    unpatroned wafers are not inspected at all. A
    patterned IC needs to be inspected at the end.
    Both types of defects can cause serious problems
    of the semiconductor wafer.

For Example
  • A defect in a patterned silicon wafer will not
    pass through an unpatroned wafer.

  • Address 2487 Industrial Pkwy W, Hayward, CA
  • Email mcgnsmith_at_yahoo.com
  • Website www.siliconspecialists.com
  • Phone Number (510) 732-9796
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