300MM FOUP & its Advantages

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Advantages of 300mm FOUP

• Kensington Labs

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What is FOUP?

• FOUP is Front Opening Universal Pod. 300mm FOUP
  is an exclusive plastic enclosure, which has the
  potential for handling silicon wafers in a
  secured environment. FOUP is also known as the
  Front Opening Unified Pod. The principal
  objective of FOUP is to allot the wafers in the
  machines to increase the processing performance.

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• 300mm FOUP with only the detachable cassette for
  placing the wafer in the apt position. with the
  advancements in technology, 400 mm wafer FOUP
  load ports are also readily accessible from the
  robotics laboratory.
• The FOUP comprises many coupling plates, pins,
  holes that can be managed by the automatic
  material handling system and can locate over the
  load port.

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Ways to Control Humidity with FOUP in a
Mini-Environment

• The wafer is placed when the production chain is
  on the waiting mode. It is the usual approach in
  order to remove the contamination in which the
  FOUP is cleaned with the gas, and the cleanliness
  level inside the machine is maintained.
• As per the researchers, the very first step is to
  supply the CDA to the air curtain, and the system
  is purified. After the flow of clean air gets
  transferred to the FOUP door, it automatically
  blocks the moisture from going inside.
• In the initial pre-purged FOUP, there is around
  0 RH. The ratio of relative humidity in the
  mini-environment has been observed by 43. If the
  FOUP door is opened, it very quickly holds the
  moisture without using a purge system or air
  curtain.

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Advantages of Using the 300 mm FOUP Wafer Load
Port

• The 300mm FOUP load port is compatible with all
  SEMI standard FOUPs.
• CE certification, The ROHS Compliant, and SEMI
  Complaint ensure top-level performance.
• No door and plate alignment needed with the 300mm
  FOUP.
• The repeatable precision movements can be
  performed with electro-mechanical servos, or the
  DSP operated pneumatic closed-loop.
• It comes with the bearings and lubrication-free
  screws.
• The programmable buttons, lights, AMHS options,
  RFID, Barcode, Class 1 cleanliness, OCR scanning
  are some robust characteristics of 300mm FOUP.

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• Are you looking for the wafer front end and 300mm
  FOUP applied material solutions?
• Kensington Labs provide these solutions along
  with precision motion control stages for
  increasing the life of the equipment. We have
  qualified and skilled engineers who have a great
  amount of experience in robot repairing.
• The focus of Kensington is to provide the most
  reliable, innovative, outstanding wafer handling
  robots, end-effectors, ADOs, and aligner all at
  the most affordable price. Customers also get a
  lifetime of warranty on all products of
  Kensington Labs.

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CONTACT US

• Sales  Kensington Robots Stages, Newport PM500
  Stages, Spare Parts
• sales_at_kensingtonlabs.com
• Service - Kensington robot and stage repairs,
  Newport PM500 stage repairs
• service_at_kensingtonlabs.com

Kensington Laboratories, LLC 6200 Village
Parkway Dublin , CA 94568 Phone
510.324.0126 Fax [phone] www.kensingtonlabs.
com
Our Toll Free Number 1-888-977-7800