Kensington MultiLink Robotic Systems

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Kensington MultiLink Robotic Systems
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About Multilink Robotic

• Multilink robotic systems combine mature, proven
  technology with state of the art performance.
  These robots are mainstays in fabs throughout the
  industry.

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• Exceptional throughput Proprietary z axis design
  enables market leading peak speeds of 55
  inches/second and acceleration rates of up to 200
  inches/second2.
• Precision wafer placement High performance
  design provides precise motion control and
  eliminates structural deflection and creep.
• Fast swap times Dual arm systems have
  demonstrated swap times of less than 3 seconds
  and throughput greater than 360 wph on a 4 port
  configuration.
• 300mm installed base Multilink robots are
  currently installed at 98 of all 300mm fabs.

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Central Controller
Prealigner

• High-speed pre-alignment provides state of the
  art placement accuracy in both vacuum chuck and
  edge contact configurations.

The optional central controller provides a simple
single wire host interface, coordinating all EFEM
operations. A straightforward, user-friendly
command set makes interfacing and controlling
the Performix fast and easy.
System Features
The Performix systems unique monocoque frame
forms a rigid enclosure that reduces vibration
and enhances stability. This design eliminates
the need for a traditional skin-on-frame EFEM
design. A patented datum plane serves as a
reference point to ensure precision alignment of
components and eliminate tolerance variability.
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Key Patents

• Latchkey opening mechanism opens all SEMI
  standard FOUP configurations, in any condition.
• FOUP latchkeys require no vacuum door attachment.
• Dual end effector, multiple link robot arm system
  with corner reach-around and extended reach
  capabilities.
• High torque, synchronously operating multiple
  link robot arm mechanism.
• Continuously rotatable multiple link robot arm
  mechanism.
• Robot arm with specimen edge gripping end
  effector.
• Robot arm with specimen sensing and edge gripping
  end effector.
• Self-teaching robot arm position method.
• Through-beam wafer mapping.

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Ease of Use

• The Performix advantage resides in its ease of
  use. The impact is superior system availability.
• Automated Self Teach is patented software that
  speeds system start ups in a highly repeatable
  manner. To utilize Automated Self Teach, an
  operator simply selects pre-programmed,
  approximate locations for the load port,
  prealigner, and process equipment. Kensington
  Laboratories patented, optical through-beam
  wafer locating system automatically registers
  these locations and calibrates the robot with
  high accuracy through a short motion operation.
• Largest installed base of edge grip end effectors
  is the result of industry leading, proprietary
  edge grip wafer handling technology, ensuring low
  backside wafer particle contamination.
• Simplified command set from the central
  controller allows for fast, intuitive customer
  programming of the Performix EFEM automation.
• Embedded E-Diagnostics enable remote, high level
  functional testing of components for fault
  isolation/detection, and provide software
  teaching of automated material handling system
  drop off position.

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CONTACT US

• Sales  Kensington Robots Stages, Newport PM500
  Stages, Spare Parts
• sales_at_kensingtonlabs.com
• Service - Kensington robot and stage repairs,
  Newport PM500 stage repairs
• service_at_kensingtonlabs.com

Kensington Laboratories, LLC 6200 Village
Parkway Dublin , CA 94568 Phone
510.324.0126 Fax [phone] www.kensingtonlabs.
com
Our Toll Free Number 1-888-977-7800