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MultiLink Robot- 300mm Single Arm

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MultiLink Single Arm robot incorporates a host of unique, proprietary design features which combine to provide unsurpassed reliability, superior performance, and high throughput. – PowerPoint PPT presentation

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Date added: 28 August 2019
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Title: MultiLink Robot- 300mm Single Arm


1
Multilink Robot- 300mm Single Arm
  • Atmospheric Wafer Handling Robot

2
About Us
  • Kensington Laboratories 300mm single arm
    atmospheric wafer handling robot, part of the
    Multilink robot family, is designed to meet the
    industrys most rigorous 300mm performance
    standards. The Multilink Single Arm robot
    incorporates a host of unique, proprietary design
    features which combine to provide unsurpassed
    reliability, superior performance, and high
    throughput.

3
  • Automated Self Teach The patented Automated Self
    Teach feature reduces time required to bring
    systems online and provides faster time to
    production ramp.
  • High Throughput Continuous rotation translates
    to short, discrete theta moves less than 180
    degrees, which significantly increases
    throughput.
  • Accurate Wafer Placement High performance design
    provides precise motion control and eliminates
    structural deflection and creep. All robot axes
    are guided by preloaded bearings mounted on
    monolithic frames machined from single ingots of
    highly stable aircraft-quality aluminum.
  • Cleanliness Patented edge grip technology
    provides better than ISO Class 1 particle
    performance. In addition, the side-mounted
    MultiLink robot, combined with Kensington
    Laboratories side-mounted MultiLink robot track,
    maximizes the exhaust opening of the equipment
    front end module allowing uniform air flow from
    the fan filter unit through the perforated fab
    floor.

4
  • High Reliability The MultiLink robot achieves
    industry-leading MCBF by employing direct-drive
    DC servo motors with real time force feedback and
    non-contacting glass scale encoders that monitor
    actual drive train output.
  • Precise Wafer Mapping High performance
    through-beam wafer mapping allows fast, accurate
    wafer detection.
  • Zero Preventative Maintenance Superior precision
    design requires no periodic lubrication or
    adjustments under standard operating conditions.

5
Key Features
  • Patented edge grip technology
  • Patented Automated Self Teach
  • Through-beam wafer mapping
  • Advanced wafer cassette error detection
  • Direct drive technology
  • Continuous rotation
  • State-of-the-art motion control
  • Off center pick and place
  • Machine tool quality construction
  • High resolution optical encoders on all axes
  • Reduced wear Z axis counter balance

6
Key Patents
  • Robot Arm with Specimen Edge Gripping End
    Effector, 6256555
  • Robot Arm with Specimen Sensing and Edge Gripping
    End Effector, 6275748
  • Self-Teaching Robot Arm Position Method, 6360144
  • Self-Teaching Robot Arm Position Method to
    Compensate for Support Structure Component
    Alignment Offset, 6366830

7
Options
  • 4th axis supinator wafer flipper
  • Vacuum end effectors (200mm and 300mm)
  • Reflective mappers
  • E-diagnostics with GUI

8
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9
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10
CONTACT US
  • Sales  Kensington Robots Stages, Newport PM500
    Stages, Spare Parts
  • sales_at_kensingtonlabs.com
  • Service - Kensington robot and stage repairs,
    Newport PM500 stage repairs
  • service_at_kensingtonlabs.com

Kensington Laboratories, LLC 6200 Village
Parkway Dublin , CA 94568 Phone
510.324.0126 Fax 510.324.0130 www.kensingtonlabs.
com
Our Toll Free Number 1-888-977-7800
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