Title: Know About the Crucial Part of the Wafer Transmitting System-Wafer Pre Aligner
1Wafer Pre Aligner- A Crucial Part of the Wafer
Transmitting System
2Introduction
Wafer pre aligners are a very vital component in
the manufacturing of wafers. It positions the
wafers precisely before they are actually
transferred onto the exposure platform. The
positioning precision highly affects the exposure
accuracy of the wafer and efficiency of the work
in the whole manufacturing system.
3Position The Wafers With Wafer-Pre Aligner
These cs are used to accurately place the silicon
wafers before photo-etching. As the precision
requirement of machining is more than that of
transportation of wafer, there is the need to
position the wafers with wafer-pre aligner to
balance the position error produced during the
transportation. Due to the improvement of the
manufacturing system of the wafer, it demands
greater accuracy and speedy alignment of the
wafer-pre aligner system.
4Features
Kensington automation offers high-speed type,
non-contact type, a built-in controller, compact
design, and provides one-chuck system wafer
pre-aligners that are ready to meet the various
client demands for the exterior colors and
materials.
- Rotational Accuracy lt 2 arc sec
- Centration Accuracy lt 0.002 (0.051 mm)
- Supports Transparent Substrates
- Glass and Quartz
- Plastic
- SiC
- Throughput of up to 450 WPH
- Accurately measures location and orientation in a
single rotation for high throughput - All combinations of SEMI standard wafers are
supported - Station Self Teach Functionality
5Classification
The pre-aligners are classified into two
different types namely mechanical and optical.
In the mechanical type, it utilizes the
mechanical structure to place the center of
wafers, and its precision is too low to meet the
high accuracy demands of today. On the other
hand, the optical type is highly used in the
pre-alignment of the wafers as it offers great
position accuracy and satisfies the high
precision requirements. As the optical type uses
optical sensors as well as mechanical structure
to meet the high accuracy position of a wafer
thats why it provides greater precision.
6Conclusion
Kensington Laboratories is one of the finest
laboratories based in Dublin, CA, selling the
best products since 1976.It is a leading supplier
of wafer handling robots, precision motion
control, linear stages, rotary stages and
integrated stages designed to meet the most
demanding requirements.
7Contact Us
Kensington Laboratories, LLC 6200 Village
Parkway Dublin , CA 94568
510.324.0126
www.kensingtonlabs.com
510.324.0130
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