Semiconductor Equipment Security: Virus and Intellectual Property Protection Guidelines

1
Semiconductor Equipment Security Virus and
Intellectual Property Protection Guidelines

• Anant Raman
• anant.raman intel.com
• Harvey Wohlwend
• harvey.wohlwend ismi.sematech.org

Advanced Materials Research Center, AMRC,
International SEMATECH Manufacturing Initiative,
and ISMI are servicemarks of SEMATECH, Inc.
SEMATECH, the SEMATECH logo, Advanced Technology
Development Facility, ATDF, and the ATDF logo are
registered servicemarks of SEMATECH, Inc. All
other servicemarks and trademarks are the
property of their respective owners.
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Two Key Elements of Security

• System Integrity due to
• Network integration of equipment is required
• Highly integrated network likely to get cyber
  attacks
• Cyber attacks are growing
• Intellectual Property (IP) due to
• Business integration of various roles process,
  yield, equipment engineering, industrial
  engineering, field service, equipment design,
  factory automation, etc.
• Joint Development OEMs and IC Makers working in
  compensatory environments

Sources of Vulnerability
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Shrinking Time to Vulnerabilities

Vulnerability reported Patch in progress
Bulleting andpatch available No exploit
Exploit code in public
Worm in the world
Days between patch and exploit
there is no more patch window," wrote Johannes
Ullrich, Chief Research Officer at the SANS
Internet Storm Center. "Defense in depth is your
only chance to survive the early release of
malware."
331
180
151
25
Zero Day Attack Vulnerability exploited before
it was reported to the rest of the security
community
0
Blaster
ZoToB
Welchia/ Nachi
Nimda
SQL Slammer
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Virus Protection Guidelines

• ISMI and Member Company Working Group reviewed
  the issues and requirements and established
  guidelines to address semiconductor equipment
  security for IC Makers and Equipment suppliers
• Established guidelines at factory network and
  equipment level
• Describe capabilities to successfully integrate
  equipment into an IC Makers intranet, including
• Guidelines based on standard capabilities
• Configuration guidelines for the IT personnel for
  components such as network equipment, computers,
  operating systems, and products
• Security design guidelines for equipment
  application architects and designers

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IC Maker Guidelines

• Use firewalls in the IC Maker factory network to
  control access
• Provide proxies for communications between
  equipment and factory
• Proxies provide virus protection capabilities
• Institute business process for local equipment
  users
• Backup and recovery procedures
• Scanning of removable media (memory sticks,
  floppies, CDs, etc.)
• Security requirements for mobile devices
  (laptops, PDA, Tablets, etc.)
• Infrastructure for anti-virus protection

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Equipment Supplier Guidance

• Institute business process
• Backup and recovery procedures
• Procedures and training for field service
  engineers
• Hardened computer configurations
• Strong password, non-blank password, etc.
• No public network shares
• Avoid installing or enabling unnecessary programs
  and services on equipment (e.g., telnet, ICMP,
  FTP)
• Support applications running with minimum
  privileges
• Wherever applicable, equipment runs independently
  of each other from network perspective
• Support logging and audit of security related
  configuration changes
• Record all security related errors

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Equipment Supplier Guidance (contd)

• For new equipment, provide operating systems and
  anti-virus capabilities that are in the currently
  supported phase of their life cycle
• Security software upgrade support for equipment
  is optional and provided as a service for
  interested IC Makers
• The service details include qualification and
  support for operating system, applications, and
  anti-virus capabilities
• The IC Maker and the equipment supplier shall
  agree upon the frequency of security updates
• Network security layer 3 device for equipment
  (optional)
• Allow only controlled access to / from equipment
• Additional packet filtering and firewall
  technology for equipment
• Wireless Not Allowed
• Equipment internal wireless networks / LAN
  replacements
• Wireless networks between equipment
• Wireless Allowed
• Factory components (e.g., ID readers) and
  equipment

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2007 Virus Protection Guidelines Update

• Best Known Methods
• Network Security
• Create equipment security model
• Create mapping of security to equipment groups,
• Port Security
• New equipment installation
• Move equipment to a known location,
• Virus Management
• Support network segmentation (links to network
  BKMs)
• Shut down unneeded network ports at the tool,
• Patch Management
• Identify patching candidates
• Create software upgrade plan,

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Vulnerability Paths
System Integrity
Field service laptops
Removable media

• Virus Protection Vis-à-vis System Integrity
• 2007 update includes IC Maker Best Known Methods
  for cyber security, shows greater IC Maker
  synergy and sharing
• Documentation shows that IC Makers have
  significantly matured in handling cyber attacks
  on equipment
• Most IC Makers are using two or more methods to
  handle cyber security for equipment

HSMS enabled
Process tool
Remote diagnostics
Automation apps
Direct to tool
Time to move on to other challenges
Office PC
Utility PC
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Equipment Security Roadmap
2004-2007
2007 Onwards
2007 ITRS Update
We are at an inflection point
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Ongoing Equipment Security Needs

• RD is a key element of business and operating
  strategy in semiconductor industry
• IC Maker focus on the process and end products
• OEM focus on the equipment for the process
• Collaboration is a mega trend
• Moving to a new technology node, shared cost
  model
• Results in more sharing of data, e.g., design
  data, recipe data, test data, equipment data,
  wafer characterization, contamination data, yield
  data, cycle time, etc.
• Operational challenges
• Environmental System Integrity due to cyber
  attacks
• Manufacturing IP sharing due to defects, yield,
  throughput and reliability issues
• Financial IP sharing due to joint development
• Challenge How can IC Makers and OEMs create a
  balance between protecting their investments and
  sharing IP for operations?

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Equipment IP Protection

• IP Protection
• Requirements for member companies have been
  collected and jointly analyzed
• Key observations from requirements
• IP protection currently enforced by business
  process such as NDAs with scant technology
  support
• Only a few objects need to be protected (limited
  depth-scope)
• Role-based security needed for specific IP-laden
  objects
• Dont focus on tool operations (limited
  breadth-scope)
• Some areas are more applicable than others
• Some timeframes are more applicable than others
• There are many Use Cases Tool Down/Repair,
  ICMICM Collaboration, ICM to foundry, ICM Nth
  N1th Gen separation
• Approach To create a multi-faceted security
  framework using
• e-Diagnostics security architecture
• Tiered architecture provides rich set of
  comprehensive security capabilities
• Status Revision 0 guidelines created

IP protection guidelines are based on business
requirements
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Equipment IP Protection Strategy

• Key Concept IP protection needs to be part of
  equipment software and not only a business
  process
• Identify key software security technologies such
  as role-based security
• Leverage existing software security architecture
  in equipment area (e-Diagnostics lineage)
• Identify Use Cases for different business models,
  e.g.,
• IC Maker-IC Maker collaborations
• IC Maker-Supplier collaborations
• IC Maker (N1)th Nth process generation
  handling
• IC Maker- Foundry collaborations
• Tool end-of-life
• Identify functional areas and times where IP
  protection is not relevant
• Pilot IP protection guidelines via OEM
  implementation
• Educate and reinforce industry needs for IP
  protection and current risks
• Supplier implications
• Incremental change required to the equipment
  controls software to add role-based security to a
  small set of files and directories
• User / Group access to IP based on Need to Know
• Sharing / Control of IP is automated through
  software (as opposed to manual) and can be
  dynamic depending upon business conditions
• Automatic software-based user accounting and
  auditing
• Ability to turn off security when not needed, but
  in controlled manner

Technology is available today to solve equipment
IP problems!
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2007 Equipment Security Summary

• Objective
• Strengthen the Equipment Virus Protection
  Guidelines due to complex network connectivity
  requirements
• Drive the need to protect IP within equipment
  amongst IC Makers and create industry-level
  guidelines
• Benefits
• Protects stakeholder financial investments in the
  technology
• Enables factory-wide standardized IP protection
  and cyber security
• Strengthen the enforcement of NDA through
  technology
• Provides clear operating procedures for IP
  protection and cyber security for situations such
  as troubleshooting, joint design, technology
  transfer, sub-contracting, etc.

Need for Cyber Security
Need for Equipment IP Protection
?ISMI Guidelines Provided!
?Current Project Focus
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Summary

• e-Manufacturing and Collaboration era brings need
  for enhanced security
• Interface A standards define equipment-level
  security
• Interface C defines moving data securely from the
  factory to supporting organizations
• ISMI Virus Protection Guidelines published
• Gives guidance to equipment suppliers on
  expectations and requirements
• Provides IC Maker Best Known Methods
• ISMI IP Protection Guidelines being developed
• Development of security framework is central to
  the solution space
• Use Case development critical to overall success
• Need collaboration from all ICMs and OEMs