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Lecture 25 NEMS and MEMS

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S. Ami, M. Hliwa, C. Joachim, Chemical Physics Letters, vol.367, ... Thermoelectric Cooling. 33. 5. Optical Effect. 34. Grating Switch. 35. 6. Chemical Effect ... – PowerPoint PPT presentation

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Title: Lecture 25 NEMS and MEMS


1
Lecture 25 NEMS and MEMS
  • April 20, 2004
  • (Fisher) Yumin Zhang

2
Part I Nano-Electronics
3
1. Molecular Logic Gate
  • S. Ami, M. Hliwa, C. Joachim, Chemical Physics
    Letters, vol.367, no.5-6, 10 Jan. 2003, p. 662-8.

4
Equivalent Circuit and Operation
5
2. Programmable Logic Gates
  • J. M. Tour, W. L. Van Zandt, C. P. Husband, S.
    M. Husband, IEEE Transactions on Nanotechnology,
    vol.1, no.2, June 2002. p. 100-9.

6
On-Off States
7
Inverter (NOT Gate)
8
NAND Gate
9
Full Adder
10
Full Adder
11
Part II Nano Mechanical System

12
Planetary Gear

13
Gear and Shaft

14
Microtubule

15
Cross-Section of Microtubule

16
Microtubule Motor

17
Spherical Complex Self-Assembling

18
Part III MEMS

19
World Market for MEMS
  • 10B http//www.memsnet.org/news/1037733566-0/

20
MEMS Sensors

21
MEMS Sensor Market
22
1. Resistive Effect
  • Gregory Kovacs, Micromachined Transducers
    Sourcebook, McGraw-Hill, 1998.

23
Strain Sensor
24
2. Capacitive Effect
25
Pressure Sensor
26
Accelerometer
27
Fluid Flow Sensor
28
Humidity and Temperature Sensor
29
3. Piezoelectric Effect
30
Accelerometer
31
4. Thermoelectric Effect

32
Thermoelectric Cooling
33
5. Optical Effect

34
Grating Switch
35
6. Chemical Effect

36
Oscillator Chemical Sensor

37
7. Biological Effect

38
Biological Sensor
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