Summary of Environmental, Health and Safety Chapter ITRS 2006

1
Summary of Environmental, Health and Safety
ChapterITRS 2006
ESH ITWG
July 12, 2006 San Francisco, California
2
Outline

• Changes from 2005 ESH chapter in 2006
• 2007 Agenda
• Materials
• Green Fab

3
Corrections to 2005 ESH Chapter - 2006 ESH
Chapter Summary

• Few editorial changes to the text
• Minor revisions to the tables (e.g., adding the
  definition of utilization)

4
Plans for 2007 - Materials

• Consider definitions for recycle vs. reuse vs.
  reclaim in SEMI standards
• Utilization more efficient use of process
  materials
• Waste reduction through utilization as a raw
  material in other industries
• Future regulatory challenges
• New chemicals (e.g., transition metal oxides)
• Existing chemicals (e.g., PFOS, NMP)
• Consider regional differences in regulations
  (e.g., REACH)
• Infrastructure requirements for research
  materials (e.g., nanomaterials, macromolecules)

5
Plans for 2007 - Green Fab Concept

• Energy
• Total equivalent energy reduction of process
  equipment (e.g., SEMI S 23)
• Enabling idle/sleep mode for tools
• Energy use reduction of EUV lithography tools
• Consumables
• Reduce feed water to site
• UPW (optimized manufacture and use)
• Efficient use of process chemicals and materials
• Air, Liquid and Solid Waste
• Concentration of constituents (e.g., mg/liters)
• Total mass of constituents (e.g., Kg/day)

6
ESH Chapter ITWG Representatives

• ESIA - Hans-Peter Bipp (Infineon)
• JSIA - Takayuki Oogoshi (NEC Electronics)
• - Tetsu Tomine (Seiko-Epson)
• SIA - Jim Jewett (Intel)
• - Walter Worth (SEMATECH)
• Other Participants
• - Phil Naughton (ISMI)
• - James Beasley (ISMI)