Motion control platform for accurate measurement and manufacturing of nano-structures

1
Motion control platform for accurate measurement
and manufacturing of nano-structures
Hua Yang and Richard M. Seugling Advisors Dr.
Stuart T. Smith Dr. Robert J. Hocken Dr. David L.
Trumper
Vacuum Chamber
Introduction
This
project is a combined effort between The
University of North Carolina at Charlotte
(UNC-Charlotte), Massachusetts Institute of
Technology (MIT) and The National Institute of
Standards and Technology (NIST) and has been
funded by The National Science Foundation for
three years (award DMI-0210543).

• 304 stainless steel
• ID 44 inches
• Height gt 24 inches
• Two stage isolation
• external isolation
• internal isolation
• Multiple access ports
• Maglev turbo pump with roughing pump

Motivation
The
primary motivation for this project is to help
facilitate the transition from nanoscience to
productive nanotechnology. The current system
will provide the ability to pick and place at
nanometer levels and compare system performance
with other comparable designs at international
locations such as, National Physical Laboratory
(NPL) in the UK, Technical University of
Eindhoven (TUE) in the Netherlands and
Physikalisch-Technische Bundesanstalt (PTB) in
Germany.
Conceptual designs of translation stage

• Fine motion stage Richard Seugling
• Coarse stage for long range motion
• Stacked coarse/fine stage possibilities

FMS

• Objectives
• Development of integrated position measurement
  system with nanometer uncertainties traceable to
  national standards.
• Translation mechanism for multi degree-of-freedom
  motion control.
• Integration of fine motion controllers into
  long-range instrumentation for nano-scale
  manipulation in centimeter-sized workspaces.
• Integration of combined uncertainty analyses for
  determination of system error budget.
• Integration of cascaded multi degree-of-freedom
  control systems.

Hockey Puck Stacked Slides
Double C
Polymer bearing assessment

• Critical Requirements
• Vacuum Compatibility
• 10-3 to 10-4 Torr
• Range
• 50 mm ? 50 mm ? 10 mm
• Velocity
• 5 mm/sec max velocity
• Resolution
• 25 nm positioning
• 10 nm accuracy

UHMWPE bearing
Vacuum test facility for polymer bearings

• Key Components
• Mechanical systems (UNCC)
• Vacuum chamber
• Precision translation stage
• Coarse/Fine stage
• Optical system (UNCC/NIST)
• Laser interferometer
• Lawall, J., Pedulla, J. M. and Coq, Y.L., 2001
  Ultrastable laser array at 633 nm for real-time
  dimensional metrology, Rev. Sci. Instrum., 72
  (7), pg. 2879-2888.
• Lawall, J. and Kessler, E., 2000, Michelson
  interferometry with 10 pm accuracy, Rev. Sci.
  Instrum., 71 (7), pg. 2669-2676.
• Control system (UNCC/MIT)
• DSP based cascading multi-degree-of freedom
  (MDOF) controller

• Immediate Goals
• Vacuum system procurement
• Optical systems specification and component
  identification
• Verify polymer bearing performance and vacuum
  compatibility
• Choice of design strategy for coarse stage
• Identification of calibration methodology and
  comparative assessment with competing systems