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Title: Fab Automation Standards – SECS/GEM & EINNOSYS SOLUTIONS - PowerPoint PPT Presentation
Description: The organization that defines and governs the standards for semiconductor manufacturing, equipment, automation and other relevant areas is SEMI.org. It is an international body for semiconductor manufacturers and equipment manufacturers. Factory automation standards defined by SEMI are generally known as SECS/GEM standards, which for 200mm wafer processing is comprised of four main standards: SECS-I (E4), SECS-II (E5), HSMS (E37) and GEM (E30) standards. – PowerPoint PPT presentation
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