RION KS93 Particle Counter for Special Gas corrosive gas

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RION KS-93 Particle Counter for Special Gas
(corrosive gas)

• By Dr. K. Kondo RION Co., Ltd.
• Distributed by MGN International, Inc.

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Sales Route

• MGN International, Inc. is RION Factory
  Representative in charge of N. America, Europe,
  and W. Asia, offering full technical support,
  maintenance and Sales of RION Particle Counters.
• MGN will distribute KS-93 to all markets upon
  agreement of each customer to sign provided hold
  harmless agreement.
• For KS-93, all maintenance should be done at the
  Factory (Tokyo, Japan)
• MGN will schedule, coordinate, and liaison PM of
  KS-93 between the customer and RSC (Rion Service
  Center). Customer will ship to MGN facility, and
  receive repaired/serviced units FOB Temecula, CA
  (MGN Service Center)

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Why is KS-93 marketed for Corrosive Gases?

• KS-93 was developed with leak tight design using
  flow cell (contrary to traditional APC design)
• KS-93 has been sold and successfully used for
  particle detection in corrosive gases in Japan
  and ROW for gt12 years. (91 units total)
• Customer reports and maintenance records indicate
  compatibility and reliability for many corrosive
  gases (no Hydrogen Fluoride or similar)

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Schematic diagram of Traditional (0.3?) Airborne
particle counter
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Particle counter KS-93 for special gas
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Leak test for KS-93

• Hood method lt 110-10Pa.m3/sec

• Bell-jar method lt 110-7Pa.m3/sec

• Leak rate of Case of LS-93 lt
  110-6Pa.m3/sec
• by sniffer method

Reference standard JIS Z2331 Method for helium
leak testing
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Moisture removal performance by N2 purge
Purge flow rate Flow cell type (KS-93)
100mL/min? High pressure type 2.83L/min
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Flow rate (velocity) dependability of particle
detection sensitivity
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Sealing case
Particle detecting sensor is arranged in a
sealing case (the leak rate lt1x10-6 Pa m3/s
). The electrical circuits are intercepted by
vacuum connector connection. The inside of the
case can always be purged with inactive gas.
Sensor
Outlet
Sample gas
Inlet
to scrubber
Purge port
Purge port
N2
to scrubber
Electric circuits
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Particle measurement system in special gases
MFC
Pressure regulator
Pressure gauge
Particle counter
valve
MFC
N2
to scrubber
Gas cylinder
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Maintenance Record

• RION has sold 91 units worldwide since
  introduction in 1992 (both models) (26 x KS-93)
• 18 of these have been returned for other than
  routine maintenance or cell cleaning due to
  corrosion at some pointall were successfully
  cleaned
• Only 6 times we have replaced the laser due to
  high hours
• RION has NEVER replaced SUS316 in/out fittings to
  flow cell

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Thank you for your time!

• QUESTIONS?