Field Replaceable Spares: Kensington Robot, Kensington Stage, Newport PM500 (1)

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Field Replaceable Spares Kensington Robot,
Kensington Stage, Newport PM500
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About us

• Kensington is a leading supplier of wafer
  handling robots, precision motion control, linear
  stages, rotary stages and integrated stages
  designed to meet the most demanding requirements.
  The systems combine nanometer-scale-precision and
  fine-resolution capabilities with robust
  performance to meet customers needs for high
  reliability, long operational life and low
  cost-of-ownership. One unique feature of
  Kensington robots and stages is the Zero Backlash
  design, which delivers precise positioning and
  enhanced repeatability.

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Newport M500

• Kensington FRUs, Kensington robot spare parts and
  Newport PM500 spare parts Field Replaceable
  Units, are designed to minimize downtime and
  maximize productivity and can be quickly and
  easily installed on-site by customers without
  special tools or testing. The Kensington robot
  spare and Newport PM500 spare FRU assemblies are
  the same components used for new Kensington robot
  and stage manufacturing and in the repair center,
  with additional testing for field replacement
  certification.

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Features

• Smooth rapid movement immune to linkage backlash
• Hysteresis and wear eliminated by non-contacting
  read-head design
• Real-time force-sensing with programmable soft
  limits for safe operation
• EMO features halts motion immediately
• System initialization not required to restart
  after EMO
• Quite operation without resonances or excessive
  heat
• No PID parameter tuning with high step-and-settle
  performance via mechanical controls and design
• Resolution Linear 100nm, 50nm and 25nm
  Rotary 0.0003
• Bi-directional Linear 200nm, 100nm and 50nm
  Rotary 0.0006
• Acceleration 0.001 to 0.25g
• Velocity range

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Electronics

• Axis cards which feature current versions of
  firmware
• Single Board Computers (SBC) which feature
  current versions of firmware
• Kensington M4000 Controller, Newport PM500
  Controller

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Sub-Assemblies

• Robots Multilink and WFH
• Tri-CCD Modules, WFH Pre-Aligner
• CCD Modules for all Multilink and stand alone
  pre-aligners
• Stages Kensington 6000 Series, Kensington 8500
  Series and Newport PM500 Series

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End-Effectors

• Available as new products for immediate
  installation
• MultiLink Through-Beam End-Effectors
• MultiLink Edge Grip End-Effectors
• MultiLink Vacuum Grip End-Effectors
• WFH robot paddles, double and single.

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CONTACT US

• Sales  Kensington Robots Stages, Newport PM500
  Stages, Spare Parts
• sales_at_kensingtonlabs.com
• Service - Kensington robot and stage repairs,
  Newport PM500 stage repairs
• service_at_kensingtonlabs.com

Kensington Laboratories, LLC 6200 Village
Parkway Dublin , CA 94568 Phone
510.324.0126 Fax [phone] www.kensingtonlabs.
com
Our Toll Free Number 1-888-977-7800