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Sensors Software Service
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Presentation

• Agenda

• The Company
• Products
• Applications

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Companyprofile

• History

• 3D-Shape develops and produces optical
  measurement systems for industrial and medical
  applications worldwide
• Founded in March 2001 - Spin off from the Chair
  for Optics, University of Erlangen
• 6 shareholders
• 10 employees students and part time workers
  (trend increasing numbers)

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Companyprofile

• Competences

• Patents for WLI, Deflectometry and Fringe
  Projection Systems (mirror construction)
• Market leader for optical eye glass measurement
  systems
• Fundamental technology competence in three
  different optical measurement methods
• Worldwide fastest WLI
• Worldwide largest WLI measurements fields
• Customer oriented Full-Service Concept

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Companyprofile

• Product Overview

• White light interferometer KORAD3D
• µKORAD3D

• Fringe projection sensors FaceSCAN3D
• BodySCAN3D
• CAM3D
• SCAN3D

Measurements principles

• Phase measuring SpecGAGE3D
• deflectometry

• Software KorINSPECT3D

SLIM3D / 3DViewer/
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Explanations

• White-Light-Interferometry

Advantages

• Coaxial illumination and observation No shading
  effects
• Measurement in deep boreholes, with high
  resolution
• Measurement of optically smooth and rough
  surfaces
• Roughness of the surface measurement
  uncertainty
• Measurement uncertainty Independent of aperture
  and working distance
• Up to 4 Mio data points within a single scanning
  sequence

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Products

• White-Light-Interferometry

KORAD3D-S

• Area 2x2 - 13x13 mm2
• Camera Up to 3 MP
• Lat. Res 1,1 7 µm
• Uncertainty 1µm
• Speed Up to 500µm/sec

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Products

• White-Light-Interferometry

KORAD3D-M

• Area 13x13 - 40x40 mm2
• Camera Up to 3 MP
• Lat. Res 7,5 23 µm
• Uncertainty 1µm
• Speed Up to 500µm/sec

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Products

• White-Light-Interferometry

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Products

• White-Light-Interferometry

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Products

• White-Light-Interferometry

µKORAD3D

• Area 0.1mm to 1mm
• lat. Resolution lt 1µm
• Uncertainty dz 10nm

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Products
White-Light-Interferometry
KorMASTER3D
Semi-automatic measuring device for
quality-control in the production
Solid-housing Vibration-cushioned Dust
Protection Splash Water Protection
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Products

• White-Light-Interferometry

KorINSPECT3D

• Extensive software solution for in-line,
  semi-automatic and single measurements.
• Includes the
• control software for the measuring head,
• the evaluation tools (e.g. planarity/step-height)
  and
• 3 different input-levels.

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Applications

• Examples

Deep Boreholes (e.g. Injector nozzles)
Ball-Grid-Arrays
Engine-Parts (e.g. Valves)
Sealing surfaces
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Applications

• Bumps and soldering paste height (electronic
  market)

Inline system 24/7 Application FoV 13 x 13
mm² Measuring of dimensions of bumps
(coplanarity) Measuring of warpage High speed
(app. 1 sec.) for 100µm height
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Applications

• Bumps and soldering paste height (electronic
  market)

Laboratory System µKORAD3D Application FoV 0.9
x 0.7 mm² Exact dimensions High lateral
resolution 1.3µm High longitudinal precision ltlt
1µm
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Applications

• Sealing surfaces

• Inline system
• Original Application
• FoV 15 x 15 mm²
• Flatness lt1 µm
• Measurement time 5 sec.

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Applications

• Rotary valve

• Semi-automatic system near the
• production line
• Original Application
• FoV 50 x 50 mm²
• Flatness 5 µm
• Step height 15-20 µm

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Applications

• Injection nozzle

• Offline system production line
• Original Application
• FoV 3 x 3 mm²
• Ø 3mm, depth 45mm
• Measuring of cone angles
• High precision (? 0.02)

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Products

• Deflectometry

SpecGAGE3D

• Field 20-500mm2,
• Quantitative Asphere-
• measurement
• Refr. error lt 0.01 Dpt
• Sensitivity 1nm

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Products
Deflectometry
SpecGAGE3D

• 47 LCD-Panel for large fields of view.
• Extendable measuring head.
• Tracking camera for fast stitching.
• Large castors for easy movability.

Mobile measurement system for car windows, e.g.
windshields.
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Applications
Deflectometry
SpecGAGE3D
Mobile measurement system for car windows, e.g.
windshields.

• Pseudocolor image of a complete windshield.
• 6 measurements stitched together
• Measurement time app. 4-6 min.

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Explanations
White-Light-Interferometry
Light waves reflected by the object and the
reference mirror pass through the beam splitter
again and on a detector (camera chip). If the
path length to the object matches the path length
to the reference mirror, the instrument produces
interference patterns that are sensed by the
camera and can be analysed.
Software interprets fluctuations in brightness in
order to compute the object distance for each
object point. As the object moves along the
optical axis, a height map of the object with
sub-micrometre precision can be created in this
way. The scanning speed is typically between a
few micrometres per second and 500 µm/s,
depending on the precision required.
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Explanations
Measuring Principle
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Explanations
Deflectometry
Local variations of the surfaces gradient cause
deformations of the reflected fringe pattern.
Thus, compared to other optical 3D sensors,
deflectometry does not measure the local height
of a surface but the local gradient.
The shape of the surface can be calculated by
integration of the measured slope data.
Sinusoidal fringes are projected on a screen and
observed by a camera using the specular surface
under test as a mirror. As we cannot focus onto
the surface and the reflected pattern at the same
time, sinusoidal fringes are optimal for
deflectometry the phase does not change even if
the fringes are blurred.