DEVELOPMENT OF ION ENERGY DISTRIBUTIONS THROUGH THE PRE-SHEATH AND SHEATH IN DUAL-FREQUENCY CAPACITIVELY COUPLED PLASMAS* - PowerPoint PPT Presentation

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DEVELOPMENT OF ION ENERGY DISTRIBUTIONS THROUGH THE PRE-SHEATH AND SHEATH IN DUAL-FREQUENCY CAPACITIVELY COUPLED PLASMAS*

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* * * * * * * * AGENDA Introduction to dual frequency capacitively coupled plasma ... Institute for Plasma Science & Engr. Inductively coupled plasma with multi ... – PowerPoint PPT presentation

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