Sputtering and Thermal Effects on the Titania/Si Interface - PowerPoint PPT Presentation

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Sputtering and Thermal Effects on the Titania/Si Interface

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Annealing performed in vacuum sealed ampoules. Sputtering of TiO2 on Si(100) ... Annealing of TiO2 on Si(100) ... seen in film upon annealing of TiO2 up to 850 ... – PowerPoint PPT presentation

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