Sputtering and Thermal Effects on the Titania/Si Interface

1
Sputtering and Thermal Effects on the Titania/Si
Interface Patrick R. McCurdy, Laura Sturgess,
Sandeep Kohli, and Ellen R. Fisher, Colorado
State University
SEM/SAM of Annealed TiO2 Films
a)
b)
5 mm
5 mm
5 mm
10 mm
SEMas deposited
SEM850oC anneal
c)
d)
20 mm
20 mm
20 mm
20 mm
SEM950oC anneal
SAM of Si950oC anneal