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Department Imaging Science

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Title: Department Imaging Science


1
Department Imaging Science Technology
Acoustical Imaging and Sound Control Charged
Particle Optics Optics Quantitative Imaging
6 February 2009
2
IST Organization
TNW MT
  • IST Bestuur
  • van Vliet (chair)
  • Urbach Gisolf
  • Kruit

IST Secretariaat 2 OBP
people, not ftes
  • Acoustical Imaging
  • Gisolf
  • vd Berg (0.2)
  • 4 WP
  • 4 OBP
  • Charged Particle Optics
  • Kruit
  • 2 WP
  • 6 OBP
  • Optics
  • Urbach
  • Planken
  • 4 WP
  • 5 OBP
  • Quantitative
  • Imaging
  • van Vliet
  • Niessen (0.2)
  • Young (0.2)
  • 3 WP
  • 3 OBP

3
Acoustical Imaging Sound Control
  • Chair Prof.dr.ir. Dries Gisolf
  • Room acoustics/wave-field synthesis Dr.ir.
    Diemer de Vries
  • Sound control/wave-field analysis Dr.ir. Rinus
    Boone
  • Acoustical imaging/seismic Dr.ir. Eric
    Verschuur
  • Medical ultra-sonic diagnostics Dr. Koen van
    Dongen
  • Non-linear inversion Prof.dr.ir. Peter van den
    Berg (emeritus)
  • Research program
  • To take acoustical imaging into the world of
    full elastic non-linear inversion in strongly
    inhomogeneous media. This includes both 3D
    elastic imaging of the earth, the human body or
    construction materials as well as wave-field
    analysis and synthesis in room acoustics and
    sound control.

4
Acoustical imaging and sound control
  • Fields of research
  • Room acoustics (full simulation coupling to
    audiology)
  • Audiological technology ('hoorbril' and mobile
    telephony in variable acoustic environments)
  • Seismic imaging (Delphi consortium is one of the
    leading geophysical consortia in the world full
    elastic non-linear inversion)
  • Medical imaging (emerging research field
    recently-awarded STW project on breast cancer
    detection non-linear propagation)
  • Non-destructive testing (NDT) (transfer of
    seismic technology has revolutionised the NDT
    world hair fracture detection)
  • Enabling science and technology
  • Wave propagation in inhomogeneous media
  • Spatial sampling of wave-fields (array
    technology, sparse data)
  • Non-linear inversion of multiply scattered data
    (coda)

5
Acoustical imaging and sound control
3D ultra-sonic image of defects in steel plate
Linear imaging
Full non-linear inversion
Model for ultra-sonic detection of breast tumor
3D interpretation of very inhomogeneous earth by
slicing through image cube
Room acoustic analysis Audiological
technology
6
Charged Particle Optics
  • Chair Prof.dr.ir. Pieter Kruit
  • Nanolithography Dr. Kees Hagen
  • Correlative microscopy Dr. Jacob Hoogenboom
  • Research program
  • Our ambition is to discover new eyes to look at
    the microscopic world and to invent new hands to
    create microscopic structures. For that purpose
    we advance the fundamental understanding of
    relevant physical phenomena such as electron
    emission and we design innovative, sometimes
    revolutionary optical instruments.

7
Charged Particle Optics
  • Electron and Ion sources
  • example Shape changes of nano-crystals in strong
    E-field
  • Optical systems
  • example 100 beam Schottky source
  • Particle matter interaction
  • example Sub nm Electron Beam Induced Deposition

8
Nanoned 2 20 nm lithography (with TNO and NS)
Method Electron Beam Induced Deposition
Experiment world record in electron lithography
New instrumentation multi-beam
Theory electron scattering
9
Electron Source
Principle for Maskless Lithography
  • Nr of electron beams
  • 13,000
  • 30 nm
  • Resolution

Collimator lens
  • 2.25 nm
  • Address grid
  • Data rate
  • 100.000 Gb/sec

MAPPER Lithography
Aperture array
  • Funded and launched July 1, 2001
  • Spin-off from TUDelft
  • Team of 170 people
  • Industrial team

Beam Blanker Array
Beam Deflector Array
Projection lens
10
Optics
  • Chair Prof.dr. Paul Urbach
  • THz Imaging Prof.dr. Paul Planken
  • Quantum Optics Dr. Sylvania Pereira
  • Geometric Optics Dr. Florian Bociort
  • Modern Optics Dr. Nandini Bhattacharya
  • THz Imaging Dr. Aurele Adam
  • Research program
  • The teaching and research of the group focus on
    wave propagation and imaging in various spectral
    regions that extend from TeraHertz frequencies to
    the Extreme Ultraviolet. Current research topics
    are related to optical lithography for the
    nanofabrication of integrated circuits, optical
    aperture synthesis for astronomy, Terahertz
    imaging and optical metrology..

11
Near Field Light through apertures in a metal
  • 90x more light squeezed through a slit than
    expected PRL 2007
  • Rigorous 3D EM models (FEM, FDTD, RCWA)
    benchmarked with 5 international groups JEOS
    2007
  • Time-resolved THz electric near-field
    measurements of all vector components with ?/100
    resolution Optics Expr 2008
  • Applications
  • biosensors, LEDs, solar cells
  • material analysis with THz
  • THz microscopy/spectroscopy/imaging
  • Collaboration with industry
  • Philips
  • IMA Edwards Free Drying Solutions

12
High NA Imaging Extended Nijboer Zernike Theory
  • ENZ Theory an analytical approach to fields near
    focus Progress in Optics 2008
  • Optimum focused spots determined analytically
    PRL 2008
  • Applications Collaborations
  • aberration retrieval ? Nikon, Leica
  • mask imaging in lithography ? Fraunhofer
    Institut (IIS), Erlangen
  • optical recording ? Thomson
  • optical disk mastering ? Singulus Mastering GmbH
  • scatterometry ? ASML

13
Interferometry/Metrology Polarization nulling
interferometry
  • Wideband IR exo-planet detection Darwin Mission
  • Use several beams with rotated polarization
    states Optics Express 2006, Collaborations
    TNO, ESA
  • Length metrology with femtosecond frequency-comb
    laser. Goal accuracy 100 nm over a distance of
    1 km in space JEOS 2008, Collaborations TNO,
    NMi, ESA
  • Laser Doppler velocimetry for detection of
    cardiovascular diseases Collaboration Philips

14
Optimization of high quality optical systems
  • Global optimization with many variables and many
    local minima
  • Chaotic dependence on initial values
  • Improved algorithm yielded new optimum with less
    glass
  • 600,000 cheaper lithographic systems
  • Collaborations Zeiss, ASML

15
Quantitative Imaging
  • Chair Prof.dr.ir. Lucas van Vliet
  • Medical Imaging Prof.dr. Wiro Niessen
  • Molecular and Electron Imaging Dr. Bernd Rieger
  • Imaging Physics Dr. Sjoerd Stallinga
  • Medical Imaging Dr. Frans Vos
  • Quantitative Microscopy Prof.dr. Ted Young
  • Research program
  • Image-based measurement and analysis is done
    through fundamental research in image sensing,
    image processing, image analysis, and image
    recognition. The work is applied in medical
    imaging for computer-assisted diagnosis and
    treatment, in quantitative microscopy for
    bio-molecular imaging and in industrial and
    security applications.

Erasmus MC (0.8) FEI Company (0.2) Philips Res
(0.2) AMC (0.5) Emeritus (0.8)
16
Quantitative Imaging
medical imaging
image processing and analysis
industrial imaging
bio-molecular imaging in microscopy
17
Medical Imaging
Diffusion Weighted MRI
Computer Aided Detection in CT colonography
  • Low dose CT
  • Electronic cleansing
  • Automated detection and segmentation
  • Pattern recognition
  • Optimal scanning protocol (dir b-values)
  • Estimate diffusion in crossing fibers
  • Build 4D atlas of aging brain
  • Find biomarkers for neuro-diseases

False positives
Phase-contract X-ray tomography
4D modeling of the wrist
Miniature synchrotron (Japan) ? Soft tissue
contrast
Registration 3Dpose, multi modal CT MRI,
shape model normals, detect pathologies model
Bone overlap
Arteries no contrast agent
Cartilage
Hard X-rays, Forward model, phase estimation,
high resolution
Unconstrained vs constraint registration
18
Bio-molecular imaging
Super-resolution / Localization microscopy
cryo-TEM at molecular resolution
raw
FBP
SIRT
l
l/30
contrast
SNR0dB
  • Low dose lt 40 e/A2 very low SNR
  • Resolution through CTF correction
  • SNR by structure-driven filtering
  • Sparse solution through L1-norm
  • Missing cone in tilt series

control
10 QDs in 300nm
QD blinking
Tethered Particle Motion
  • DNA-protein interactions
  • Persistence length
  • Diffusivity mobility
  • Protein aggregation

19
Super-resolution from 2D projective motion
4x up-sampling by pixel replication
256x236x64 sequence of a moving car captured by a
stationary CCD camera
4x super-resolution with deblur
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