Environmental Stewardship in Electronics: Chemicals and Materials in Production Processes

1
Environmental Stewardship in Electronics
Chemicals and Materials in Production Processes

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Environmental Stewardship in Electronics
Chemicals and Materials in Production Processes

• The Electronics Industry ensures sound
  environmental, health and safety (EHS)
  stewardship through
• EHS-related Research Development
• Chemical Selection/Phase-out where feasible
• Supply Chain initiatives
• Process Management
• Pollution Prevention Resource Conservation
• Voluntary Industry Partnerships

3
EHS Research and Development

• EHS RD in the Semiconductor Industry is
  performed both within individual companies and
  through collaborative industry efforts
• National Science Foundation(NSF)/Semiconductor
  Research Corporation (SRC) Center for
  Environmentally Benign Semiconductor
  Manufacturing
• International Sematech (Semiconductor Industry
  research consortium)
• International Technology Roadmap for
  Semiconductors
• These organizations help ensure EHS
  considerations are integrated into process
  equipment and materials development, leading to
  more efficient and benign manufacturing processes

4
NSF/SRC Center for Environmentally Benign
Semiconductor Manufacturing

• Established in 1996 to develop science,
  technology, and educational methods that promote
  environmentally benign manufacturing methods
• Participating Universities
• - University of Arizona (Lead)
• - MA Institute of Technology
• - Stanford University
• - University of California, Berkeley
• - Cornell University
• - MIT Lincoln Laboratories
• - Arizona State University
• - University of Maryland

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International Sematech (ISMT)

• Research consortium located in Austin, Texas
• Includes leading semiconductor manufacturers
  based in the US, Europe and Asia.
• Mission Strive to ensure that future
  technology is safe for the environment and the
  industry's workforce... integrate proactive
  environment, safety and health technologies into
  all aspects of the semiconductor industry.
• Four Main Initiatives
• Chemical management,
• Design-for-Environment tools
• Energy use reduction water recycling
• Workplace safety

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International Technology Roadmap for
Semiconductors (ITRS)

• Assessment of semiconductor technology
• research requirements
• Cooperative effort by manufacturers and
  suppliers, government organizations, consortia,
  and universities.
• Ensure integration of ESH considerations into
  technology
• development
• Priority technology areas
• Interconnect
• Front End Processing,
• Lithography
• Factory Integration
• Assembly and Packaging.

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International Technology Roadmap for
Semiconductors (ITRS)

• ESH Technology Requirements/Potential Solutions
  identified for
• Chemicals, Materials and Equipment Management
• Climate Change Mitigation
• Workplace Protection
• Resource Conservation
• Design for Environment, Safety and Health (DFESH)

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Material Selection

• Industry reviews new chemicals carefully to
  anticipate and address potential EHS concerns.
• Companies use various data to assess EHS hazards
• Toxicology Information
• Chemical and Physical Properties
• Environmental Properties
• Regulatory Requirements
• The Semiconductor Industry Association (SIA)
  continues to expand chemical stewardship
  initiatives
• new materials screening
• toxicology testing
• disclosure from chemical suppliers
• equipment and process design specifications.

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Material Phase-outs CFCs and Halogenated
solvents

• Chlorofluorocarbons (CFCs)
• Linked to depletion of the earths stratospheric
  ozone layer.
• Widely used due to effectiveness and low toxicity
• Production of CFCs and related Ozone-depleting
  substances was banned by International treaty
  (the Montreal Protocol).
• Electronics Industry action
• Electronics uses of CFCs and related materials
  were phased out in the early 1990s, well before
  Montreal Protocol phase-out dates.
• Related halogenated solvents, including 1,1,1
  Trichloroethane (TCA), Trichloroethylene (TCE),
  Methylene Chloride and Perchloroethylene have
  been eliminated or sharply reduced.
• Replacements are low-toxicity solvents and
  water-based cleaning processes.

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Material Phase-outs (continued)

• Ethylene glycol ethers (EGEs)
• These widely used materials are considered
  potential reproductive hazards.
• Electronics Industry action
• In 1989, the SIA funded the largest
  epidemiological study ever performed by private
  industry in response to concerns
• Conducted by the University of California at
  Davis and completed in 1992, the study and
  industry recommendations resulted in the
  elimination of certain ethylene-based glycol
  ethers (EGEs) that were previously used within
  the semiconductor industry.
• EGEs replaced by lower-toxicity solvents such as
  propylene glycol ethers and ethyl lactate.
• Other Toxic Release Inventory (TRI) - listed
  solvents
• Methyl Ethyl Ketone (MEK), Methyl Isobutyl
  Ketone (MIBK).
• Electronics Industry action (pending TRI data)

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TRI Trends Show Large Reductions

• What is TRI? The Toxics Release Inventory (TRI)
  is a publicly available EPA database that
  contains information on toxic chemical releases
  and other waste management activities reported
  annually by certain covered industry groups as
  well as federal facilities. This inventory was
  established under the Emergency Planning and
  Community Right-to-Know Act of 1986 (EPCRA) and
  expanded by the Pollution Prevention Act of
  1990.
• Work in Progress by Don Lassiter, consultant to
  SIA
• (see next two slides as examples of TRI portion
  of the presentation)
• Source U.S. EPA Website http//www.epa.gov/tri/
  

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TOTAL TRI RELEASES by US ELECTRONICS INDUSTRY
2000 (SIC Code 36)The U.S High-tech industry
accounts for approximately 6 of Gross Domestic
Product (GDP) and 26 of total exportsHowever,
SIC Code 36 (Electrical Equipment) accounted for
only 1.5 of Total US TRI Releases and Transfers
in 2000Source AeA and the U.S. Bureau of
Economic Analysis

• TRI Releases to Air were 1.4 of national
  totals
• TRI Releases to Water were 1.6 of national
  totals
• TRI Releases to Land were less than 1 of
  national totals

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TOTAL TRI RELEASES by US INDUSTRY - 2000
2.28 Billion Pounds
Electrical (SIC 36)
Chemicals
Mfg. Metals
Trans Eqpt.
Plastics
Multiple SIC codes
Food
Metals
Paper
MAJOR TRI INDUSTRIES
Source EPA TRI Database for 2000
14
TOTAL TRI RELEASES TRANSFERS by ELECTRICAL
INDUSTRY (SIC 36) - 1988-00

Off-Site Transfers
Land Releases
Pounds
Water Releases
Air Releases
Sic 36 Family Electronic Other Electrical
Equipment Components, except Computer Equipment
Year
Source EPA TRI Database 1988-00
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Supply Chain Initiatives

• Semiconductor Equipment and Materials
  International (SEMI) and its members (suppliers
  to industry) are committed to environmentally
  sound policies and employee health and safety
• Key Programs include
• Executive EHS Committee
• International EHS Standards for Equipment
• Technical Seminars and Educational programs
• Customer support for chemical information and
  management
• Chemical Suppliers participate in American
  Chemistry Councils Responsible CareTM program

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Supply Chain Initiatives Global CareTM

• SEMIs Global Care initiative is centered on
  five key principles that can be implemented in
  ways that are consistent with existing corporate
  EHS management programs
• Workplace Health and Safety
• Resource Conservation
• Product Stewardship
• Community Service
• Excellence
• Global Care's mission is to demonstrate the
  semiconductor industry's commitment to
  environmental, health and safety leadership, to
  innovation and to improved quality of life.
• Industry suppliers help the semiconductor
  industry ensure environmental protection and
  ongoing worker health and safety.

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Process Management and Control

• Leading edge technology utilizes state-of-the-art
  equipment including best available environmental
  controls
• Chemicals usage is tightly controlled to meet
  precise process requirements
• Engineering controls reduce potential for
  employee exposure
• Engineered systems capture, collect and, in some
  cases, destroy waste products
• Licensed disposal contractors destroy wastes in
  accordance with RCRA requirements
• Appropriate personal protective equipment is
  always provided when necessary to protect worker
  safety

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Pollution Prevention (P2) and Resource
Conservation

• EPAs Design for Environment Program
• Active partnership with the printed wiring board
  industry to develop environmental, economic, and
  performance data regarding possible pollution
  prevention practices
• Goal Promote the implementation of cleaner
  technologies through education and technical
  assistance.
• Developed Cleaner Technologies Substitutes
  Assessments (CTSAs) for Printed Wiring Board and
  Computer Display Industries
• Original project evaluated substitutes for
  electroless copper plating of through holes,
  resulting in significant decrease in glycol ether
  use
• Second DfE project focused on alternatives to
  standard tin-lead surface finishes
• Currently conducting assessment of lead-free
  solders
• For more information http//www.epa.gov/dfe/
  projects/index.htm

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Pollution Prevention Reducing Photoresist Use in
Semiconductor Manufacturing

• Historical trends show significant reduction in
  the amount of photoresist used per silicon wafer
  area.
• Future projections indicate continuing
  reductions.
• Benefits include lowered use of photoresists and
  auxiliary solvents and less waste (subsequently
  destroyed through incineration).

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Industry/Government Partnerships

• Electronics companies have demonstrated
  leadership in voluntary partnerships, within
  industry and with government agencies and other
  stakeholders in key areas
• Pollution Prevention Reducing generation of
  waste and improving reporting tools
• Climate Protection Reducing emissions of
  greenhouse gases, conserving energy and improving
  reporting
• Regulatory Leadership and Reinvention Rewarding
  superior environmental performance while
  developing flexible regulatory mechanisms

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Industry/Government Partnerships

• EPAS 3350 Program
• Voluntary program to reduce TRI emissions 33 by
  1992 and 50 by 1995.
• The 33/50 Program achieved its goal in 1994, one
  year ahead of schedule.
• EPAs Design for Environment Partnership
• extensive collaboration between electronics
  industry and EPA on multiple aspects of green
  manufacturing
• EPA WasteWie Solid Waste Reduction/Recycling
  Program
• WasteWie members develop goals for waste
  reduction, recycling, and buying recycled
  products
• TRI Reporting Guidance for Semiconductor
  Manufacturing
• SIA collaborated with EPA to publish a
  comprehensive guide to Community Right-to-Know
  Reporting
•  

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Industry/Government Partnerships

• Climate Protection
• Reducing emissions of greenhouse gases,
  conserving energy and improving reporting
• SIA/EPA PFC Reduction/Climate Partnership
• SIA and EPA commenced a joint program on
  perfluorocompound (PFC) emission reduction in
  1995, including a Memorandum of Understanding.
• Program was expanded in 1999 to include the
  industrys worldwide 10 reduction goal
• Participants include Advanced Micro Devices,
  Inc., Agere Systems, Agilent Technologies,
  Conexant Systems, Dominion Semiconductor, L.L.C
  Eastman Kodak Company, Fairchild Semiconductor
  Corporation, Hewlett Packard, Hyundai
  Semiconductor America, IBM Microelectronics
  Division, Intel Corporation, Intersil
  Corporation, LSI Logic, Micron Technology, Inc.,
  Motorola, National Semiconductor, NEC
  Electronics, Inc.,Philips Semiconductors, Inc.,
  Sony Semiconductor company of America, ST
  Microelectronics, Texas Instruments
• EPA Climate Leaders
• Program promotes voluntary inventory reporting
  and reduction goals for greenhouse gas emissions
  from US operations 
• Participants include Advanced Micro Devices, Inc,
  IBM, STMicroelectronics and Sun Microsystems,
  Inc.

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Industry/Government Partnerships

• Regulatory Leadership and Reinvention
• Rewarding superior environmental performance
  while developing flexible regulatory mechanisms
• EPA National Environmental Performance Track
• Public/private partnership that encourages
  environmental excellence, involves communities in
  environmental protection, and focuses on
  measurable results
• EPA Project XL
• National pilot program that allows state and
  local governments, businesses and federal
  facilities to develop innovative strategies to
  test better or more cost-effective ways of
  achieving environmental and public health
  protection.
• EPAs Common Sense Initiative (CSI)
• Innovative program that sought cleaner, cheaper,
  smarter approaches to protecting environment and
  public health.
• Addressed environmental management by industrial
  sector (including electronics) rather than by
  environmental medium (air, water, land).

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Industry Partnerships - WSC

• World Semiconductor Council (WSC)
• Consists of semiconductor trade associations
  representing Europe, Japan, Korea, the US, and
  Taiwan.
• Considers environmental, health and safety as
  important area for global cooperation.
• Adopted a global PFC emissions reduction goal of
  10 below the baseline year by the year 2010.
• WSC and several member companies have received
  EPAs Climate Protection Award.
• WSC ESH Task force is also pursuing projects in
  Energy Savings and Chemical Management, including
  chemical risk assessment, pollution prevention,
  and regulatory evaluation
• In May 2002, WSC adopted Guiding Principles for
  Environment, Safety and Health.
• WSC believes that it is necessary for our
  industry to be at the forefront of sustainable
  development, fostering world economic growth
  based on sound environmental practices.