Jrg Westermann, Georg Schfer, Dietmar Funnemann

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Advances in Chemical Imaging NanoESCA

• Jörg Westermann, Georg Schäfer, Dietmar Funnemann
• Omicron NanoTechnology GmbH
• Fred Henn
• Omicron NanoTechnology USA

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• NanoESCA

• Motivation and Theory
• Experimental Setup
• Initial Characterization Synchrotron and
  Laboratory Measurements
• - Spectroscopy (UPS/XPS)
• - Imaging (UPS/XPS)
• Conclusions/Further Work

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NanoESCA Working Partners
AG Prof. Schönhense Dr. Ziethen Dipl. Phys.
Bernhard
AG Prof. Hüfner Dr. Reinert Dr. Schmidt
Dr. Merkel Dipl. Phys. Escher
Dr. Berghaus Dr. Funnemann Dipl. Phys. Krömker
Part of the work was funded by the BMBF, Germany
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NanoESCA System Concept
Lens
Analyzer
Detector
Excitation source
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NanoESCA Entrance Lens

• Based on FOCUS PEEM lens
• Advantages
• lateral resolution lt 20 nm
• in-situ selectable Contrast
• Aperture
• integrated deflector/stigmator
• reliable mechanics
• integrated sample stage

Objective Lens
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NanoESCA IDEA Analyzer

• Question Energy filter with smallest
  aberrationhigh transmission?

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NanoESCA IDEA Analyzer
Entrance
Exit

• practically useable
• compensated aberrations!
• Side effect
• Excellent time resolution!

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NanoESCA IDEA Analyzer
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NanoESCA IDEA Analyzer
3 modes
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NanoESCA IDEA Analyzer
Projective exit optics
2nd EA
Image detector for XPS mode
Sample position
1st EA
Image detector for PEEM mode
PEEM lens
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NanoESCA Entrance Lens and Analyzer
Holes for excitation light
Complete mu-metal shielding
Piezo-driven sample stage
Sample position (insertion hole)
Analyzer base flange
Mounting flange (DN 150CF, 8 OD)
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NanoESCA - Instrument View
ISE 10 sputter source
HIS 13 VUV source
Fast entry system
XM 1000 Monochromator (or synchrotron)
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NanoESCA - Instrument View
Imaging detector for XPS mode
Sample stage with piezo motors
Imaging detector for PEEM mode