WP1: Design for Testability of Micro and Nano Systems

1
WP1 Design for Testability of Micro- and Nano-
Systems

• 2005 Activity Report
• March, 27th, 2006 Brussels
• Pascal NOUET, Professor, University of
  Montpellier / CNRS

2
Outline

• M13-M30 JPA and WP1 objectives
• Overview of 2005 Activity
• Joint research
• Dissemination
• Integration of research
• Deliverables
• Financial status
• Summary Highlights
• Plans for 2006 M25-42 JPA

3
WP1 Profile

• Six partners
• Design for Testability of MNS
• Development of knowledge and know-how based on
  test case
• Establish WP1 as a consultancy resource for
  industry
• Offer services in DfT and Test Engineering of MNS
  via a web-based interface
• Increase integration and excellence of partner
  research
• Not generating products excepted the literature
  database

4
JPA M13-M30

• Establish WP1 as a consultancy resource for
  industry
• Demonstrate and disseminate our expertise as much
  as possible
• Offer services in DfT and Test Engineering of MNS
  via a web-based interface
• Become a valuable source of information
• Increase integration and excellence of partner
  research
• Develop our research groups (QQ)

5
Outline

• M13-M30 JPA and WP1 objectives
• Overview of 2005 Activity
• Joint research
• Dissemination
• Integration of research
• Deliverables
• Financial status
• Summary Highlights
• Plans for 2006 M25-42 JPA

6
WG1.1 TS PCM

• IEF, QinetiQ and ULAN (total grant 18 k)
• Proposal and Evaluation of Integrated Electrical
  Quality Factor Measurement (QFM) Architectures
• High-Level approach
• Many potential industrial applications
• Dissemination DTIP2005, WP1 workshop (budapest)
• To be resume in 2006

7
WG1.2 Bias superposition

• ULAN, LIRMM, QinetiQ and IEF (total grant 50 k)
• Principle
• Altering the bias of a sensor to extract the
  measurement data and an indication of the
  sensors health
• Uses out-of-bandwidth signals to enable filtering
  of signal
• Complex biasing schemes can be multi-physical
• Electric, Thermal, Magnetic
• Evaluation of Bias Superposition
• On-line test solution
• Investigate what MEMS devices can use technique
• Go/No-Go test
• Applications
• Review of Wheatstone bridge applications
• Feasibility study for 2 demonstrators
• Magneto (piezoresistive)
• Accelerometer (capacitive)
• Comparison between bias superposition and bias
  modulation techniques
• Dissemination SA, Conference papers, WP1
  workshops

8
WG1.3 Biosensors

• MESA, ULAN, QinetiQ, LIRMM (total grant 83 k)
• Basic idea high-level modelling of a BioMEMS
  (Fluidic, DNA sensor, electronic circuitry) ? DfT
  and testability evaluation
• Fault-free Faulty Model of FlowFET-based
  Micro-Electronic Fluidic (MEF) and DNA Bio-Arrays
• Modelling of fluidic crossings
• Modelling of fault-free and faulty DNA sensor
• Overall MEF VHDL-AMS modelling fault simulation
• Preliminary solutions/suggestions on testing the
  array
• Dissemination WP1 workshop, conference papers,
  Numerous visits to industry ? initiate company
  involvement
• Continuation as part of a flagship project

9
WG1.4 accelerometers

• LIRMM, ULAN, QinetiQ, IEF (total grant 20 k)
• Shaker tests still dominate test procedure - can
  they be eliminated?
• Low-cost testing solutions ? Low-cost
  accelerometers ? Low-cost technologies
• Preliminary state of the art study
• Capacitive, piezoresistive and thermal
  accelerometers
• Dissemination WP1 workshop (budapest), review
  paper, report, presentation to industry ?
• Continuation as a co-funded project in 2006

10
Outline

• M13-M30 JPA and WP1 objectives
• Overview of 2005 Activity
• Joint research
• Dissemination
• Integration of research
• Deliverables
• Financial status
• Summary Highlights
• Plans for 2006 M25-42 JPA

11
Dissemination

• Scientific papers
• DTIP, Symposium on Design Test Integration and
  Packaging of MEMS/MOEMS.
• ETS, IEEE European Test Symposium.
• VTS, IEEE VLSI Test Symposium.
• Sensors Actuators, submitted.
• Total of 13 papers directly linked to WP1
  activity.
• 5 of them authored by at least two partners

12
Dissemination

• Workshops
• WP1 open workshop on latest Advances in MEMS
  Testing, May, 30th, 2005 Montreux, Switzerland
  (M1.8).
• Welcome address and WP1 activity overview,
  Pascal Nouet,
• DfT for Biosensors, Hongyuan Liu,
• Bias superposition for MEMS Testing, Frederick
  Mailly,
• On-chip testing for mechanical characterization
  of thin polysilicon films, Alberto Corigliano.
• WP1 workshop, Budapest, November, 29th, 2005
  (M1.14).
• Overview of WP1 activities in 2005, P. Nouet,
• Quality Factor modeling, measurement and
  reliability for MEMS resonators, H. Mathias,
• DfT for Biosensor and for Biosensor Interface,
  H.G. Kerkhoff and A. Richardson,
• Motionless testing of accelerometers, P. Nouet,
• MEMS Testing through Bias Superposition, C.
  Jeffrey,
• WP1 JPA and budget for 2006, P. Nouet.

13
Dissemination

• Visit to industry
• Philips, ST Milano, Lionix, Micronit, C2V,
• Tutorials Invited papers
• Introduction to Testing MEMS, H.G. Kerkhoff,
  Invited Tutorial, European Test Symposium (ETS).
• Challenges in Manufacturing Test of Micro and
  Nano-Systems, P. Nouet, Invited talk, The
  Innovative Manufacturing Research Conference,
  Scottish Manufacturing Institute, Edinburgh, June
  28th, 2005.
• Design and Test of MEMS a Case Study, Laurent
  Latorre Florence Azaïs, PATENT-DfMM Summer
  School.
• Adding Value to Design and Test through
  Education What are the Challenges?, P. Nouet,
  LATW-IBERCHIP Joint Panel, 6th IEEE
  Latin-American Test Workshop.

14
Dissemination

• Litterature database practical DfT solutions for
  MNS
• Accessible as a free service since July 2005,
• Expected to become a real service for customers
• Value of this database in comparison with
  standard web-based tools
• the database concentrates on design for
  testability of MNS,
• each item in the database is associated with at
  least one comment from an expert of the network.
• The database is accessible freely on the web from
  the PATENT-DfMM homepage (http//www.patent-dfmm.o
  rg/).
• More information and updated information can be
  obtained from the website or in the specific
  public deliverable (ref D1.10).

15
Dissemination

• Litterature database
• Accessible as a free service since July 2005,
• Expected to become a real service for customers ,
• More information in the specific deliverable
  (D1.10).

16
Outline

• M13-M30 JPA and WP1 objectives
• Overview of 2005 Activity
• Joint research
• Dissemination
• Integration of research
• Deliverables
• Financial status
• Summary Highlights
• Plans for 2006 M25-42 JPA

17
Integration of research
18
Integration of research
N. Dumas, PhD, Research Associate
A. Chaehoi, PhD, MEMS Designer
19
Outline

• M13-M30 JPA and WP1 objectives
• Overview of 2005 Activity
• Joint research
• Dissemination
• Integration of research
• Deliverables
• Financial status
• Summary Highlights
• Plans for 2006 M25-42 JPA

20
Deliverables
21
Outline

• M13-M30 JPA and WP1 objectives
• Overview of 2005 Activity
• Joint research
• Dissemination
• Integration of research
• Deliverables
• Financial status
• Summary Highlights
• Plans for 2006 M25-42 JPA

22
Financial Status (1/2)

• 2nd year budget 156 k (98 completion)
• 20 k for WP coordination (13)
• 15 k for basic support (10)
• 3 k for literature database (2)
• 13 k for dissemination/integration grants (8)
• 105 k for joint research (67)

23
Financial Status (2/2)

• Budget per partner

24
Outline

• M13-M30 JPA and WP1 objectives
• Overview of 2005 Activity
• Joint research
• Dissemination
• Integration of research
• Deliverables
• Financial status
• Summary Highlights
• Plans for 2006 M25-42 JPA

25
2005 achievements

• Research activities
• Support of two existing WG
• DfT for microfluidics and BioMEMS
• Bias superposition
• Launch of a new WG
• Motionless testing of accelerometers
• Dissemination
• Major conferences
• Submission of a common paper to SA
• Integration of research
• Mobility of young researchers
• Literature database opens to public
• DTIP workshop

26
2005 reviewer recommendations

• A proper self assessment procedure must be put in
  place for every WP.
• See 3.1.3.4 (Activity of individual partners) of
  D7.2c ? 2nd Periodic Activity Report (Month
  13-24).
• Addendum QinetiQ participates to all WG of WP1.
  Higher implication is difficult due to both the
  high manpower costs and the low budget.
• The internal call mechanism for internal
  projects should take account of IAB
  recommendations.
• New WG launch in 2005 driven by the IAB.
• Dissemination activities should preferentially
  target high quality outlets and give greater
  emphasis to communicating the achievements of
  PATENT outside Europe.
• Top class conferences, Intl workshops, SA, USA,
  Brazil.

27
2005 assembly IAB recommendations feelings

• Attendees Robert Aigner (triquint division
  sawtek, formerly with infineon), Benedetto Vigna
  (ST Microelectronics), Andreas Menz (Proton
  Mikrotec)
• Overall feeling on WP1 activity very positive,
  positive
• In your opinion, what are the strengths of this
  WP ?
• Relatively compact, right number of partners,
  willingness to work, clear objectives.
• In your opinion what are the weaknesses of this
  WP ?
• Simulation alone is maybe not sufficient.
  Validation on demonstrators will be appreciable.
  For any of the projects, an external industrial
  partner is recommended.
• How useful are the technical activities for your
  company ?
• If you advertise in the right way you may find
  collaboration. All useful. In doubt with BioMEMS.
  Not directly usable due to our current
  development.
• Is there any topic that are valuable for your own
  activity that could be addressed?
• Work on accelerometer may be applicable to
  pressure sensors (former activity). Test
  structures for reliability (WP3 ?). More work on
  damping effect (flagship). Contact behaviour and
  contact testing for RF switches (in relation with
  WP3)
• Do you think, you may use us as a service
  provider for your company in a near future?
• Not really (Just moving to a US company), maybe
  in the case motion less testing (Consultancy, RD
  collaboration), maybe in twelve months (RD
  collaboration)

28
Outline

• M13-M30 JPA and WP1 objectives
• Overview of 2005 Activity
• Joint research
• Dissemination
• Integration of research
• Deliverables
• Financial status
• Summary Highlights
• Plans for 2006 M25-42 JPA

29
2006 expectations

• Dissemination
• journal papers authored by at least two partners
  or may be more
• Let industry knows our know-how
• General publications in industry oriented
  journals (MST News)
• Literature database search engine
• Strengthen research links between partners
• Co-funding of research projects
• industry or any other national or european program

30
2006 budget

• Integration of research
• grants for training and short visits
• joint research to address bottlenecks and gaps
• Integration across WP ? flagship projects
• Virtual laboratory
• literature survey ? state of the art service
• common dissemination
• review / state of the art paper, tutorial,

10 k
40 k
60 k
20 k
10 k
31
M25-42 JPA

• WP coordination 30 k
• Joint research 60k
• Support of existing WG in their collaboration
  with customers
• Quality Factor monitoring for self-test and/or
  self-calibration of MEMS-based resonators
• Use of bias superposition
• Dft of biosensors
• Motionless testing of accelerometers
• Support new working groups in any of our field of
  interests (see website)

32
M25-42 JPA

• WP coordination 30 k
• Joint research 60k
• Literature database 27 k
• Maintenance and development of the database
• Paper reviewing and indexing
• Target 40-50 papers (_at_300 each)
• Preparation of survey and white papers
• Target 2 papers, a non-limited list includes
• Alternative electrical methods to exercise
  electro-mechanical sensors,
• BIST solutions for capacitive MEMS.

33
M25-42 JPA

• WP coordination 30 k
• Joint research 60k
• Literature database 27 k
• Integration/dissemination grants 53 k
• Partner to partner visits (around 1 week)
• Dissemination grants
• tutorial, mini-tutorials
• presentation of research papers in major
  conferences
• course common materials ? training activities
• Grants to visit industry
• Flagship project contribution 75 k