Testing of MEMS Materials Using Thermal Actuation, AFM Image Correlation and Capacitance Measurement - PowerPoint PPT Presentation

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Testing of MEMS Materials Using Thermal Actuation, AFM Image Correlation and Capacitance Measurement

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Northwestern University. H. D. Espinosa ME 495 ... Northwestern University. H. D. Espinosa ME 495 (a) Strain of undeformed specimen at x direction ... – PowerPoint PPT presentation

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