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background images from www'mdl'sandia'govmicromachinegallery

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This work was funded by the NSF through the Cornell Center for Materials Research. ... were cut from silicon-on- insulator substrates by electron beam lithography, ... – PowerPoint PPT presentation

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Title: background images from www'mdl'sandia'govmicromachinegallery


1
Light Actuated Radio Frequency Micromechanical
Oscillators Christopher P. Michael, University
of Illinois at Urbana-Champaign
Thanks to Dr. Maxim Zalalutdinov and Prof. Jeevak
Parpia for their guidance. This work was funded
by the NSF through the Cornell Center for
Materials Research.
(background images from www.mdl.sandia.gov/microma
chine/gallery/ )
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