Customer Presentation

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Not All Servo Motors Are Made of Magnets and
Copper!
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Ceramic Servo Motors
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Agenda

• Corporate Introduction
• Market Landscape
• Product Technology
• Theory of Operation
• Competitive Technology
• Envelope of Performance
• Features / Benefits
• Product Line Up
• Drive Technology Comparison
• Markets Applications
• Question / Answer

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Corporate Introduction

• Nanomotion
• Established in 1992 for the design, manufacture
  and marketing of piezo-ceramic motors and
  electronics (for linear and rotary motion)
• 51 owned by Johnson Electric (1.8B, 38,000
  employees, 3 million motors/day)
• Nanomotion is 70 people with 40 in the
  engineering and RD.
• 30,000 motors in field
• 2500 linear axes in the field

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Nanomotion

• Theory of Operation
• Traditional Piezo VS
• Reversed Piezo VS
• Standing Wave VS
• Traveling Wave VS
• Ultrasonic Pusher

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Piezo Direct and Reverse Effect
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Poling a Piezo Element
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Summary of Traditional Reversed Piezo Motors

• Travel
• Very limited displacement (lt.1 of overall
  length)
• Speed
• Slow speed (1 to 2mm/sec)
• Positioning
• High Hysteresis

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Reversed Piezo MotorInchworm Technology

• Travel is unlimited
• Speed is very slow
• High positioning Hysteresis
• Very loud operation
• Mechanical Hysteresis during brake activation

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Traveling Wave Piezo

• Stadium Wave creating mechanical force
• Each element driven as a separate motor
• High Torque, Locked when no energized
• Expensive to control

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Ultrasonic Pushing Piezo

• Limited Force
• Very high operating frequency
• Impossible to tune
• More for an actuator, not a positioning device

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Basic Structure of Nanomotions Piezoelectric
Element
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Nanomotion Motor Basics Ultrasonic Standing
Waves
Bending Mode
Longitudinal Mode

• Simultaneous excitation of both modes
• creates motion at the edge of motor fingertip

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Finite Element SimulationLongitudinal
Mode Bending Mode
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Piezo Element Operation
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Motor Ellipse

• Amplitude of ellipse varies with voltage
• Slow speed ellipse at the few nm level
• High speed- ellipse at the tens of microns
• The larger the ellipse, the more the mechanical
  stress, the more the heat, the less the duty
  cycle

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Nanomotion Motor Basics
Rotary Table

• Linear Motion Rotary Motion

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Same Motor for Linear or Rotary Motion
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Capabilities LimitationsEnvelope Of
Performance

• Ultimate performance of a motor stage is based
  on
• Output force and speed
• PZT losses
• Friction losses
• Heat dissipation

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HR1 HR8 Curves
Force Vs. Velocity Curve
FN 5
40N
HR-1
HR-8
250 V mm/sec
250 V mm/sec
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Output Force Speed

• Typical max speed of 275mm/sec at input signal of
  10V
• High speed of 300mm/sec (can guarantee)
• Low speed of 250mm/sec
• Max force of 4N per element
• Max power consumption 5 watt at input signal of
  10V

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PZT Friction Losses

• Nanomotion specifications based on a 60
  efficiency to account for losses. However Power
  Density (force/motor volume is very high)
• /- 10 variation motor to motor (taken into
  account with published specs)

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Heat Dissipation

• Maximum allowed operating temperature on the PZT
  is 100º C (212ºF)
• Motor heat dissipation at maximum temperature
  (per element)
• .42 Watt in Vacuum
• 1.5 Watt in ambient of 50ºC
• 2.5 Watt in ambient of 25ºC
• (based on NO cooling but expectation of heat
  transfer)

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Duty Cycle (for HR8)
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Motor Selection Guide
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Amplifier Selection Guide
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Features of Nanomotion Motors
Velocity vs. Command
250 V mm/sec
Dead Band
10 Command V
0.5
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Voltage to Velocity
Velocity
Desired Linear Profile
Typical Piezo Motor Profile
Voltage
AB5 linearizes the profile in the amplifier.
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Motor Assembly
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(No Transcript)
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Motor Features

• Standard motors for most operating environments
• Unlimited travel with small operating package
  (Drive strips to 4m length)
• Superior move settle Slow speed CV
• Vacuum motors for high and UHV
• Up to 10-10 Torr
• Non-Magnetic motors / No EMI from motor
• No servo dither no hysteresis
• Built in holding / braking, without power
  consumption
• Wide range of dynamic performance
  (Resolution to 1nm, velocity from 1u/sec to
  300mm/sec)
• Cost effective direct drive solution

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Product Overview

• Components (Motors, Drives, Ceramic)
• Standard Stages
• Custom Solutions

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Components

• HR Series Motors
• ST Motor
• MM Motor
• AB1A Amplifier (and 3U)
• AB2 Amplifier
• AB4 / AC4 amplifier
• AB5 Amplifier (and 3U)

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Components

• Motors with drive strips up to 4m travel lengths.
• Motor sizes offer different force levels with
  similar velocity capability.

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FB Series Standard Stages

• FB Series offers standard stage configurations in
  50mm, 75mm, 100mm and 150mm widths, with a
  variety of travels up to 200mm.
• All stages are based on crossed roller bearings,
  Renishaw linear encoders and HR Series motors.
• Standard in Single and multi-axis configurations.

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FB Series Standard Stages
Single axis FB150
3 Axis FB050 in XYZ Configuration
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Custom Solutions

• Designed solutions to meet customer specific
  requirements
• Solutions for unique operating environments such
  as vacuum, non-magnetic, radiation, high RF, etc.
• AutoFocus stage defined as a Product for
  vertical high speed focus operation. Stage has
  anti-migration device in bearings and spring
  counter balance. Able to mount single optic or
  multi-optic turret.

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• Positioning
• Application Presentation

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Ultrasonic Standing Wave
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How Do We Position Ourselves?

• Ceramic Servo Motors used at the level of
• Motion Control Components
• Sub-Systems (stages)
• Systems (multi-axis motion control)

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Drive Technology Comparison
2 Piece Construction

• ?? Piece Construction

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Drive Technology Comparison

• Nanomotion positions its ceramic servo motors
  against other applications using step or servo
  motors or stages with closed loop rotary step or
  servo motors (using ball/lead screw) or brushless
  linear servo motors.

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Drive Technology Comparison
VS
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Performance Comparison

• Dynamic/Static Stiffness
• Smoothness of Motion
• Control Interface
• Special Environments
• Cost

• Travel
• Accuracy / Repeatability
• Velocity
• Accel / Decel
• Load

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Travel Comparison

• Travel can be configured for any length in both
  systems
• Once ballscrew length is defined, travel is fixed
• Ballscrew has length limitations by diameter and
  bearing span
• Nanomotion can travel any length defined by
  bearing structure
• Advantage Ceramic Servo Motors

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Accuracy / Repeatability Comparison

• Nanomotion relies on direct feedback on the
  motion platform and does NOT induce any potential
  errors from mounting or compliance.
• Ballscrews can use either linear or rotary
  encoders which can introduce errors related to
  lead error, screw mounting, or compliance.
• Ceramic servo motors have no negative effects
  with respect to accuracy and work to the limit of
  the feedback.
• Advantage Ceramic Servo Motors

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Velocity Comparison

• While ballscrews are limited by the pitch and
  critical speed, based on mounting, Nanomotions
  motor technology is limited to 250mm/sec.
• High pitch ballscrews can go much faster
• Advantage Ballscrews Rotary Motor for Speed
• However, Nanomotion has a significantly higher
  bandwidth in velocity, with a ratio of 1250,000
• Advantage Ceramic Servo Motors for Range

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Accel /Decel Comparison

• In terms of pure acceleration, Nanomotion has
  achieved rates in excess of 10gs.
• Ballscrews have a practical limit of 1g, before
  balls start jamming in the return tubes.
• While ceramic servo motors can achieve a high
  rate, it is very load dependent.
• Advantage Shared / Application Dependent

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Load Comparison

• While ceramic servo motors are competitive within
  the defined speed/force curves, the mechanical
  advantage of the ballscrew is much greater than
  the force capability of our direct drive.
• Advantage Ballscrew Rotary Motor

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Dynamic Stiffness Comparison

• Dynamic stiffness is a function of the motor
  response, control loop, and mechanical system.
• The compliance in a rotary motor coupling-
  bearing mount- ballscrew creates a much slower
  response.
• The direct drive of a motor coupled to the load,
  without any internal motor inertia, makes ceramic
  servo motors a much faster responding technology
• Advantage Ceramic Servo Motors

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Static Stiffness Comparison

• The static stiffness of the ballscrew can be
  significantly higher that the ceramic servo
  motors.
• However, it is dependent on the shaft bearing
  configuration and type and ball nut preload.
• Advantage Ballscrew Rotary Motor

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Smoothness Comparison

• The impact of ball bearings running in/out of
  preload creates vibration that will be
  transmitted to the mechanical structure.
• The issues of ball screw pitch diameter
  variations and preload variations create torque
  fluctuations that will effect smoothness of
  travel.
• Ceramic servo motors do not effect the bearing
  structure and can travel smoothly at the level of
  1 micron/sec.
• Advantage Ceramic Servo Motors

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Control Interface Comparison

• Most rotary servo motors and amplifiers have the
  ability to accept step/direction inputs as well
  as analog inputs
• Nanomotion amplifiers are limited
• /-10 vdc analog input
• SPI digital input
• However, the new AB5 allows use with ANY
  controller that provides /-10 vdc, including
  PLCs
• Advantage Ballscrew Rotary Motor

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Special Environment Comparison

• Nanomotions ceramic servo motors are well suited
  to
• Vacuum UHV
• High Magnetic Field
• Clean Room
• Radiation
• High RF
• Rotary motors with ballscrews (and lubricants)
  are far more limited
• Advantage Ceramic Servo Motors

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Cost Comparison (150mm travel)

• HR8 Ceramic Servo Motor, Ceramic Strip,
  Amplifier, Mounting Bracket and Linear Encoder
• 1655

• 16mm Dia. Ballscrew, All Mounting Blocks, Shaft
  Bearings, Rotary Motor, ROTARY ENCODER, Amplifier
• 1942

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Cost Comparison (150mm travel)

• HR8 Ceramic Servo Motor, Ceramic Strip,
  Amplifier, Mounting Bracket and Linear Encoder
• 1655

• 16mm Dia. Ballscrew, All Mounting Blocks, Shaft
  Bearings, Rotary Motor, LINEAR ENCODER, Amplifier
• 2575

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Cost Comparison (250mm travel)

• HR8 Ceramic Servo Motor Solution with linear
  encoder
• 1834

• 16mm Dia. Ballscrew Solution with Rotary Encoder
• 2107
• With Linear Encoder
• 2776

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Comparison Summary
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Comparison Summary

• Ceramic Servo Motors bring advantages in size,
  simplicity, force per volume, dynamic
  performance, and cost over traditional drive
  technology.

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Nanomotion Markets

• Motors VS Stages VS Systems

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Motor Only Sales

• The sale of motors are used for standard and
  custom stages built by either a stage
  manufacturer or the end customer.
• In some special environments (aerospace) the
  customer configures their own mechanical
  structure.
• Tooling and fixtures that do not use full
  bearings structures are excellent candidates for
  Motor Only

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(13) ST Motors on custom tool
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Key Stage Account Products
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Key Stage Account Products
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Key Stage Account Products
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Nanomotion Custom Stage Solutions
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Nanomotion Solution
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WHY? Whats the Value Proposition (regardless of
configuration)

• Size Remember Size Counts, were small but we
  vibrate! (Highest power per volume)
• Wide Dynamic Range of Performance Same device
  can run from 1u/sec to 250mm/sec (CV and
  point-to-point)
• Operation in special environments.
• Low Cost Actuation can operate open loop as an
  actuator
• Technology Differentiation (The Cool Factor)
• Combine Coarse Fine Eliminate the need for
  tandem axes (down to sub-nanometer)
• Light Weight for end of arm applications
• Cost Effect Solution

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Nanomotion Applicationsin the Following Markets

• Bio-Medical/Pharmaceutical
• Semiconductor (standard to UHV environment,
  non-magnetic motors)
• Metrology/Inspection Laboratory
• Telecommunications
• Light Assembly Automation
• Consumer Products (cell phones, automobile,
  cameras)

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(13) ST Motors on custom tool

• Nanotechnology Tool for assembly/test of carbon
  nanotubes
• Working at the nanometer level to place atoms
  test tensile strength of tubes.
• Placing tubes on semicon devices

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(24) ST Motors on custom tool Closed loop XYZ
assembly
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Biomedical Application Base

• Cell Imaging (Cytopathology, Gene/DNA analysis)
• Surgical Robots Manipulators (MRI compatible)
• Microfluidics (drug discovery development)
• Device Manufacturing (Angioplasty balloons,
  implant devices)

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Cell Imaging Bioprocessing
Focus on automating handling processes and imaging
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Cell Imaging Performance

• Move Settle
• Moves of 300 to 400 microns in 35msec with
  lifetime of 1.8 billion moves
• Settle, stable to /- 2 encoder counts
• Resolution to .1 micron
• Z Axis
• Moves from 1 to 300 microns, typical move of 3
  microns in 20msec
• Constant Velocity
• 10 microns/sec to 10mm/sec with .1 CV

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Virtual Microscopy Solutions forAnalysis and
Discovery

• Digitized entire microscope slide with scanning
  operation
• Scanning resolution to .23u/pixel with 40x
  objective (motion system to 50nm resolution)
• CV for scanning and integrated Z axis for
  managing Cell Terrain
• 151 Data compression ratio for file management
• 15mm sq region scanned in 5.6 minutes (at 20x)

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Cell Imaging Benefit

• Ability to achieve high move settle rate due to
  inherent motor braking capability
• Higher resolution, faster moves for increased
  throughput and image accuracy.
• Ability to track autofocus, on-the-fly.
• Highest performance in smallest motor/stage
  package
• Simple drive assembly (2 piece construction)
• Cost effective technology compared to other
  devices

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Single Molecular Sequencing

• Primary axis drive for decoding Human Genome in
  days (DNA Sequencing)
• Using Auto Focus Z axis and XY with Nanomotion

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neuroArm

• neuroArm robotic system will be 2 robotic arms,
  each with 6 degrees of freedom for extra
  intra-cranial functions (ultimately for spinal
  surgery)
• Designed to perform
• soft tissue manipulation
• needle insertion
• blunt dissection
• Suturing
• grasping of tissue
• Cauterizing, Cutting, Manipulation of retractor
• Suction irrigation

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Multi-Axis Motion PlatformsFor Microfluidics

• Travel Unlimited (typically up to 600mm X/Y/Z)
• Speeds to 300mm/sec
• Reduced form-factor for table top machines
• Built-in holding braking.

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Biomedical Device Applications

• MRI Process (with non-magnetic motors
• Robotic arm for micro surgery of the brain
• MRI breast biopsy
• Other diagnostic tools

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MRI Probes
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Biomedical /Pharmaceutical

• Flow Cytometry
• Cell Analysis
• Medical Robot (end of arm tooling / grippers)
• Micro-Fluidics
• Dispensing
• Pumps

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Semicon Application Base

• Ebeam /Ion Beam wafer processing
• Mask correction machines
• Surface analysis equipment
• Wafer inspection, processing, and packaging
• Hard disk drive certification
• Other storage media

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Semiconductor / Electronics

• E-Beam writing inspection
• Wafer Metrology
• Thin Film Measurement
• Head Testing
• Storage Media testing/ writing

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Disk Media Testing

• Hard Disk Certification
• 2000 Tracks per hour
• Moves 1 to 15 um in 5msec settle to 100nm.
• Inspection rates increase to 3000 and 4000 tracks
  per hour next year

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7 Axis SEM Motion Plaform

• X Axis
• Tilt Axis
• Y Axis
• Rotary Axis ( 3 point leveling)
• Uses round bodied motor
• Bottom axis moves 65kg
• All motors vacuum/non-magnetic

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Custom UHV Stages

• 3 Axis stage in UHV for semicon applications.
• Replaced inchworm with crossed roller stage and
  HR2-U motors
• Now using custom motion system built by Nanomotion

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Custom Motion Platform

• Focused Ion Beam motion platform with high
  position stability
• Providing the ability to image below 1nm
• Complete X/Y/Theta

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Aerospace Application Base

• Space Vehicles
• Spectrometers
• Sensors

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UHV Motors reduce platform size
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Metrology
3-Axis system for Optical Surface Scanning,

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Automation / Assembly
Long travel inspection device for fiber optic
wire. Travel up to 3m, while carrying a small
optical inspection tool.
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Automation / Assembly
Spot Welding Gun driven by (4) HR8
Motors. Acceleration 250 m/s2 (25gs) Max
Force 150 N
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Photonics / Telecommunications

• Component Mfg
• Component placement, test, assembly
• Fiber alignment attach
• MEMs
• Tunable (Active) Devices
• -Linear Rotary Switches

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Airbearings Ceramic Servo Motors

• Compact / Cost Effective Air Bearing Performance
• Absolute Position Stability
• Ability to move 1nm
• Built by Ibex Marketed through Minarik

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Unique Solution Configurations

• Smallest available footprint.
• Can use smaller encoder
• IC alignment tool with ST motor.
• Position against two reference surfaces and
  adjust angle of IC

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Airbearings Ceramic Servo Motors

• Compact / Cost Effective Air Bearing Performance
• Absolute Position Stability
• Ability to move 1nm
• Built by Ibex Marketed through Minarik

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High Volume Applicationson a Component Level

• Motor housing replicated in customers part.
• Nanomotion provides motor sub-assembly.
• License electronics

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Competitive Large Volume Applications

• The economical XXXX delivers big performance in
  a small package. It pans a full 360º
  (non-continuous) and tilts 90º, giving you more
  coverage than multiple fixed cameras.

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Application Specific Motors (ASM)

• Motors are available in different sizes
• Nanomotion cantailor a motor to meet your
  requirements
• Size
• Force
• Speed

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Use Nanomotion

• As our motor is often the Enabling Technology
  to meet application requirements, contact us for
  support. (regardless of who provides the system)
• We can provide application know-how, test data,
  and engineering guidance to meet customer needs.
• Nanomotions technology can easily replace
  lead/ball screws in positioning applications
  brushless linear motors, at the slower speed or
  constant velocity applications
• Use us, but dont wait for us.

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Simple Linear or Rotary Motion
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Where Nanomotion Fits

• Performance
• Operating Environment
• Commercial

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Performance

• We have a specific EOP (envelope of performance)
  that we cannot exceed. Must operate within the
  speed/force curve. (review motor sizing)
• The limits of performance is a based on thermal
  issues just like a dc motor.
• Max practical thrust is 200N (4 HR8s)
• Max velocity is 300mm/sec
• As with all motor sizing, we need to look at how
  much force is required at the necessary velocity
  to meet application requirements. (Dont assume
  acceleration rate limitations as our technology
  has a much lower time constant and we can
  start/stop faster, leaving more time for the
  move)

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Operating Environment

• Nanomotions motor technology is very robust and
  well suited to operating in challenging
  environments.
• Vacuum UHV
• High Magnetic Field (non-magnetic motors)
• Radiation (Teflon VS Kapton)
• Clean Room (particulate)
• RF
• Deep Space (vacuum and temp)
• However, the vast majority of installed motors
  are in normal factory, laboratory, clean room
  environments.

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Particulate

• Nanomotion motors transmit motion through a
  mechanical contact.
• There is particulate generation in the sub-micron
  particle size and compatible to Class 10
  clean-room.
• Total particulate generation is a function of the
  stage design as well as servo tuning, so our data
  shows particulate results based on crossed
  rollers with good servo tuning.
• New particulate reports will be generated as we
  have new alumina materials being tested.