Brief Introduction to Wafer Handling Equipment & Stage Repair

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Brief Introduction to Wafer Handling Equipment
Stage Repair

• SCARA Wafer Robot

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• Due to the growing numbers of semiconductor FABs,
  the demand for robotic systems is getting high as
  it plays a vital role in handling the material
  from both front-end and back-end. There are
  several processes, including the transformation
  of wafers can be made by the wafer handling
  equipment to increase the speed of the machines.

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How Robot Handling Systems Support in Task
Manipulation?

• The essential functions of robot handling systems
  for task manipulation are given below
• The RHS allows a restricted straight-line
  movement to place the wafer in the center
  position.
• Once the wafer sets the positioning in the
  center, the straight line segment connects the
  process chamber, open cassette, FOUP with the
  longitudinal axis.
• The linear motion coordinated with vertical
  movement to adjust the in-accurate positioning of
  the robotic-arm deflection.
• Based on the straight line segment, the wafer
  handling equipment works on the distinct RHS
  mechanical structures and functions to manipulate
  the task operations.

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Types of Wafer Handling Equipment/ Wafer Handling
Robots

• Multilink Scara Wafer Robot
• The Multilink Scara wafer robot is the reliable
  and robust semiconductor wafer handling
  robot/equipment which fulfills the needs of
  quartz substrate by using the beam wafer sensors
  and end-grip end-effector. Multiple link wafer
  robots of SCARA include the semiconductor
  spectrum likewise, the etch systems and
  deposition systems, thermal processing, and
  reticle process systems.

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• Random Access Cylindrical Wafer Handling Robot
• It is another fully reliable cylinder-shaped
  wafer managing robot that gives high-throughput,
  broad recovery intelligence, simple commands,
  real-time sensing, an off-axis barcode reader to
  maintain the process. Moreover, WFH proffers a
  class 1 cleanroom applications, exceptional
  repeatability, flexible Wafer end-effectors to
  meet the high standards of performance
  capabilities.

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• The innovative functionalities of wafer handling
  equipment, stage repair are the one-stop
  solutions to increase the performance of
  semiconductors.

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CONTACT US

• Sales  Kensington Robots Stages, Newport PM500
  Stages, Spare Parts
• sales_at_kensingtonlabs.com
• Service - Kensington robot and stage repairs,
  Newport PM500 stage repairs
• service_at_kensingtonlabs.com

Kensington Laboratories, LLC 6200 Village
Parkway Dublin , CA 94568 Phone
510.324.0126 Fax [phone] www.kensingtonlabs.
com
Our Toll Free Number 1-888-977-7800