Section 5: Thin Film Deposition part 1 : sputtering and evaporation - PowerPoint PPT Presentation

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Section 5: Thin Film Deposition part 1 : sputtering and evaporation

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1 atmosphere = 760 torr = 1.013x105 Pa. 1 bar = 105 Pa = 750 torr. 1 torr = 1 mm Hg ... 3. Dalton's Law of Partial Pressure. EE143 Ali Javey. v = (8kT/ p. m) 1/2 ... – PowerPoint PPT presentation

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