SiNANO Workshop - PowerPoint PPT Presentation

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SiNANO Workshop

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Uniformity restored after anneal. IMEC. Thinner EOT? Mobility increase with thinner HfO2 ... ? decreases after anneal from 0.6nm to 0.5nm, hence SR increases by 35 ... – PowerPoint PPT presentation

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Learn more at: http://www.sinano.eu
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