Convective Flow Zones in FilamentDischarge Plasma Sources - PowerPoint PPT Presentation

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Convective Flow Zones in FilamentDischarge Plasma Sources

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G. Hancock, J. Sucksmith, J. Vac Sci. Technol. A20, 270 (2002) ... R.A. Gottscho, J. Vac. Soc. Technol. B11, 1884 (1993) Magnetron ... – PowerPoint PPT presentation

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