Study of Hafnium Dioxide HfO2 by Atomic Layer Deposition ALD - PowerPoint PPT Presentation

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Study of Hafnium Dioxide HfO2 by Atomic Layer Deposition ALD

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Fabrication Method. Film structure. Applications of Atomic Layer Deposition. Background ... Fabrication Method. 4. HfO2 (Surface Film) purge. 3. HfCl4 (surface ... – PowerPoint PPT presentation

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