Design and Packaging of a MEMS Acoustic Sensor Utilizing Galfenol Nanowires Ronald DiSabatino - PowerPoint PPT Presentation

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Design and Packaging of a MEMS Acoustic Sensor Utilizing Galfenol Nanowires Ronald DiSabatino

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The sensor is fabricated using standard microfabrication techniques, and it can ... 2. DRIE Si to fabricate release beams and optical fiber insert holes ... – PowerPoint PPT presentation

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