Lecture 1 Introductions of NanoMicro ElectroMechanical System - PowerPoint PPT Presentation

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Lecture 1 Introductions of NanoMicro ElectroMechanical System

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MEMS/NEMS is a batch-fabricated integrated nano- and microscale system ... low melting point, is easy to fabricate, noncorrosive, may cause spikes in Si ... – PowerPoint PPT presentation

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