CREATING SILICON NANOSTRUCTURES WITH CONTROLLABLE SIDEWALL PROFILES BY USING FLUORINE-ENHANCED OXIDE PASSIVATION - PowerPoint PPT Presentation

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CREATING SILICON NANOSTRUCTURES WITH CONTROLLABLE SIDEWALL PROFILES BY USING FLUORINE-ENHANCED OXIDE PASSIVATION

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Fabrication. After patterning a masking layer, a reactive ion ... herein an approach to fabricate silicon nanostructures with controllable sidewall profiles. ... – PowerPoint PPT presentation

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Provided by: ozNth
Learn more at: http://oz.nthu.edu.tw
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