Oerlikon Solar’s path to grid parity Solar Plaza, 11.June Munich Gerold Bьchel, Director PECVD

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Oerlikon Solars path to grid parity Solar
Plaza, 11.June Munich Gerold Büchel, Director
PECVD
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Solutions for a solar powered world

• Introduction to Oerlikon
• Grid parity on the horizon
• Leading thin film technology
• End-to-End manufacturing solution

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Oerlikon group at a glance

• 5.6 billion CHF revenue in 2007
• 19,750 employees worldwide
• 2500 global support
• 1500 scientist and engineers
• 35 countries
• 170 global locations
• 270 million CHF RD investment in 2007
• 6700 living patents

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Oerlikon Solar - Key member of the Oerlikon group
Oerlikon Drive Systems
Oerlikon Components
Oerlikon Coating
Oerlikon Vacuum
Oerlikon Textile
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It all started 14 years ago at the University of
Neuchatel (Oerlikon Solar cooperation partner)

• 1994 1st WCPEC Hawaii
• Johannes Meier Head of RD Neuchâtel

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Oerlikon Solar as first mover in thin film silicon
Product Milestones
2003 2004 2006 2006 2007 2007 2008-2009

• RD Lab opening by Dr. J. Meier and Dr. U. Kroll
• 1.4m2 RD equipment delivered to Schott Solar
• 40 MWp equipment contract with Schott Solar
• 40 MWp front end line contract with ERSOL
• Several contracts for end-to-end solutions
• First Micromorph production line contract
• First Micromorph production line ramp-up

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Our mission
To be the leading supplier of product and
fabsolutions for the PV manufacturing
industry - Equipment and processes - Process
integration and ramp-up - Guaranteed performance
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Solutions for a solar powered world

• Introduction to Oerlikon
• Grid parity on the horizon
• Leading thin film technology
• End-to-End manufacturing solution

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Grid parity for PV in California and Spain
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Grid Parity Lowering the cost per watt
Total Cost Throughput x Power
Wp

High Efficiency Micromorph Tandem Solar Modules
Proven Turnkey Solutions
Oerlikon Advantage
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Path to Grid Parity Oerlikon Leading Technology
Fab nominal capacity
Module efficiency
GW/p
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12
1
11
0.3
capacity
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0.12
9
0.08
Micromorph Tandem
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0.04
Next Generation Thin-Film
MicromorphTandem
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Amorph
2012
2006
2007
2008
2009
2010
2011
2010
2009
2008
2006
2007
2011
2012
Cost of ownership
CapEx per Watt
/Wp
/W
1.5
2007 for 20 MWp fabs lt 1.5 /Wp (lt1.12/Wp)
4.00
3.50
Grid Parity
1.0
3.00
2.50
GigaCampus
2010 for GWp fabs lt 0.7 /Wp (lt0.52/Wp)
2.00
0.5
1.50
2012
2011
2007
2008
2009
2010
2012
2010
2009
2008
2006
2007
(Calculated with an exchange rate of 1.00 1.34)
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Solutions for a solar powered world

• Introduction to Oerlikon
• Grid parity on the horizon
• Leading thin film technology
• End-to-End manufacturing solution

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Technology - From amorph to micromorph Tandem
a-SiH
mc-SiH
Visible
Near IR
Amorph
Up to 50 more energy absorbed
Micromorph Tandem
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Proven core equipment technology...
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TCO 1200 - Higher efficiency and lower CoO

• Proprietary LPCVD technology
• High electrical conductivity to avoid losses
• High transparency to minimize absorption
• Transparent conductor deposition and tunable
  texturing in a single step
• No wet etch step required
• Integral to Micromorph process
• High transmission in visible and near IR light
  spectrums
• Thinnest bottom cell due to improved haze

TCO 1200
TCO
TCO
a-Si/µc-Si
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TCO 1200 - Higher efficiency and lower CoO
The principle of light trapping
TCO 1200
TCO
TCO
a-Si/µc-Si
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LSS 1200 - Efficient and reproducible Laser
scribing

• Production proven thin film PV Laser scribing
  system
• Excellent linearity and precision
• Narrow scribe lines
• Reliable, stable platform

• Result
• Minimal PV area removal for more power per
  modules
• High throughput using multiple beam concept
• More than 20 systems in production

Laser
Laser
Laser
a-Si/µc-Si
Pattern 3
Pattern 1
Pattern 2
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KAI 1200 - Proven product for PV layers

• KAI 1200 with Plasma Box reactor
• 40 MHz for highest rate and quality
• 28m2 of 40 MHz deposition area
• Amorph microcrystaline PIN layers
• Single chamber processing
• insitu-clean after every step
• Result
• Proved best in class TF silicon modules
• High throughput
• High system flexibility utilization

lt10 uniformity
PECVD
a-Si/µc-Si
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Micromorph module on 1.4m2Using commercial
reactor
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Module installation at Oerlikon Solar in
Switzerland
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Solutions for a solar powered world

• Introduction to Oerlikon
• Grid parity on the horizon
• Leading thin film technology
• End-to-End manufacturing solution

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End-to-End production solutions
a-Si/ µ-Si
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followed by process integration and production
ramp-up
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Production ramp-up e.g. 60MW micromorph
for illustration purpose only, output curve
depending on project schedule
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Conclusion

• Oerlikon has successfully transferred RD results
  into mass production
• First customers delivering certified thin-film
  silicon solar modules since Q3/2007
• With a proven end-to-end production solution
  fastest time to money.
• Oerlikon customers of Micromorph Tandem
  Technology going mass production in 2008
• On track to achieve grid parity by 2010
• Strong commitment on achieving 0.54/Wp thin film
  silicon module production cost in 2010

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Thin-Film Silicon mass production A reality,
here and now
Thank you !