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Title:

SEM

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1. SEM & EDX. Seminarie 2006-2007. Constructiematerialen & Technische Materiaalkunde ... Interaction of Electrons with Matter. 5. Backscattered Electrons. 6 ... – PowerPoint PPT presentation

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Title: SEM


1
SEM EDX
  • Seminarie 2006-2007
  • Constructiematerialen Technische Materiaalkunde
  • Prof. Walter Bogaerts, Ing. Rudy De Vos
  • K.U.Leuven MTM

2
SEM Introduction
3
Grass pollen Ca. 25,000 X
4
Interaction of Electrons with Matter
5
Backscattered Electrons
6
Secondary Electrons
Eggshell (inner surface)
7
SE Image Formation
8
Schematic Representation of a SEM
9
SEM SEM Chamber
10
SEM Working Parameters
11
Generation of X-rays ( Auger electrons)
12
EDS/EDX X-ray Spectroscopy
13
Quantitative Analysis
14
Auger Spectroscopy SAM
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