HotWire CVD Grown Epitaxial Films and a Model of Epitaxial Breakdown - PowerPoint PPT Presentation

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HotWire CVD Grown Epitaxial Films and a Model of Epitaxial Breakdown

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P 5x10-7 torr. 2.5 cm. Rd = 1 2 /s. shutter. TS = 300 450 C. Si (100) ... Base Pressure 5e-7 torr. O Pressure 1e-7 torr. Rate of Change 1st Monolayer ... – PowerPoint PPT presentation

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