Evaluation of the Cu atomic density during sputter deposition process with optical emission spectroscopy - PowerPoint PPT Presentation

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Evaluation of the Cu atomic density during sputter deposition process with optical emission spectroscopy

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Computed Tomography. (Vacuum 74 (2004) 387.) Evaluation of Cu density: Concept ... 6 nm line can be obtained by the Computed Tomography (no absorption for 510.6 nm) ... – PowerPoint PPT presentation

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