LED,%20LD,%20HEMT

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• LED, LD, HEMT
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• LPE, HVPE, MOVPE, MBE

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LED GaAs AlGaAs GaP GaAsP AlGaInP GaInN ?? ??? ??? ????? ??? ??????????? GaAs GaAs GaP GaAs, GaP GaAs Al2O3
LD InGaAsP AlGaAs AlGaInP GaInN ?? ??(780nm) ?(650nm) ??(405nm) InP GaAs GaAs Al2O3
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??? Pa dyn/cm2
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??? dyn/cm2 dyn?cm / cm3 erg / cm3
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• ???(epitaxial layer)???(substrate)????????????????
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• epi ?sub?????(homo-epitaxy)
• ?GaAs/GaAs, GaP/GaP, Si/Si
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• epi?sub?????(hetero-epitaxy)
• ?InGaAs/GaAs, GaN/Al2O3, SiGe/Si
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??? (10mm)
?? (500mm)
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aepi gt asub
epi.
aepi
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sub.
asub
epi.
aepi lt asub
aepi
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sub.
asub
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a?
a?
asub
asub
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GaAs InP
aRTÅ 5.6533 5.8687
aK-1 6.910-6 4.510-6
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