Spectroscopic ellipsometry study on the structure of Ta2O5/SiOxNy/Si gate dielectric stacks

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1. ?? (Title)
2. ????? (Authors and Affiliation)
3. ?? (Abstract)
4. ?? (Introduction)
5. ???? (Experimental)
6. ????? (Results and discussion)
7. ?? (Conclusion)
8. ???? (Reference)

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