End-to-End Mass Production Solutions for Gen 1

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End-to-End Mass Production Solutionsfor Gen 1
2 Silicon Thin Film ModulesDetlev Koch-Ospelt,
Head Oerlikon Solar

• June 13, 2007

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Agenda

• Oerlikon Solar Thin Film Technology
• Integrated Path to Turnkey
• FAB 1200 - Tailored Configurations
• Conclusion

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Lower Cost, High Performance and Good Looking
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Thin Film and Cell Technologies
Module Cross Section
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Technology Roadmap from Amorph to Micromorph
a-Si Amorph
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The Visible Difference between Amorph and
Micromorph
Generation 1 Amorph
Generation 2 Micromorph
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Oerlikon Solar Production Technology
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Electrical Contact Layers TCO 1200
TCO
TCO back contact
TCO Transparent Conductive Oxides
TCO
TCO
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KAI 1200 Proven Technology for a-Si and mc-Si

• Plasma Box for single reactor processing
• 40 MHz for increased deposition rates
• Parallel processing (20 reactors) and load lock
  for high throughput

a-Si a-Si/µC-Si
PECVD
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Laser Scribing LSS 1200 for Module Patterning

• Only system qualified for
• mass production
• all 3 laser scribing patterns

Laser
Laser
Laser
Pattern 1
Pattern 2
Pattern 3
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Agenda

• Oerlikon Solar Thin Film Technology
• Integrated Path to Turnkey
• FAB 1200 - Tailored Configurations
• Continuous Improvement Program
• Conclusion

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Integrated Path to Turnkey
KAI 1200
TCO 1200
LSS 1200
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Integrated Path to Turnkey
Glass Preparation and Cleaning
Line Automation
Manufacturing Execution System
KAI 1200
TCO 1200

LSS 1200
Encapsulation Lamination Assembly
Contacted Tested Device
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Integrated Path to Turnkey
Glass Preparation and Cleaning
Line Automation
Manufacturing Execution System

FAB 1200
Encapsulation Lamination Assembly
Contacted Tested Device
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Agenda

• Oerlikon Solar Thin Film Technology
• Integrated Path to Turnkey
• FAB 1200 - Tailored Configurations
• Conclusion

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Tailored Configuration Fab 1200 Standard
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Smallest Line 20/30 MWp Configuration
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Agenda

• Oerlikon Solar Thin Film Technology
• Integrated Path to Turnkey
• FAB 1200 - Tailored Configurations
• Conclusion

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Customers like ersol Thin Film
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and a Strong and Highly Motivated Team
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Thank You for Your Attention