PLASMA WAVES

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PLASMA WAVES DIFFUSION
2

µ ,
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SUMMARY OF PLASMA WAVES
(1)
BO 0
uncoupled
cs
IAW
(2) BO 0 coupled
csvi
IA
IA hot electron shield ion -
wave
(3) Bo 0
vA
UH
wLH210
R
vA
wL
L
200
C
LH
EC
4
4
W
IC
MS
0.1
SA
4
Almost
(4) Bo 0
C
ICW
Cs

MS
5
wpi
Cs
0
k
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Bohm velocity of bi-Maxwellian electron
distribution
2006. 2.27 .
G.J. Kim
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Godyak, IEEE TRANSACTIONS ON PLASMA SCIENCE,
VOL. 23, NO. 4, 728
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Ion velocity at the bulk-sheath boundary is
correspond to the low energy electron group in
case of bi-Maxwellian EEPF.
5mTorr, 0.2A, 40.12MHz
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Dispersion relation
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Dispersion relation
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H.S. Lee
Ch.5 Diffusion(Transport) of Ptls, Heat, Momentum
Classification -without or with plasma
instabilities anomalous
diffusion(defends on source type)
our subject this ch. -weakly Ionized
plasma vs Fully Ionized plasma
collision of charged (high-Temp.)
ptls e,I with abundant -no
neutral neutral gas particles
just collision of e,I (e-e,
e-i,i-i)

important!
PECVD R.I.E. I.C.P.
?
D
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H.S. Lee
MERIE E.C.R. Helicon
(?)
(?)
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S.E. Park
Mobility ? Diffusion Coeff
(?) (D)
from
S.S
Drift-Diffusion Approx.(PDP)
Ambipolar Diffusion
-Definition
MHD Eqs(conservation Forms)
A single fluid Eq.for ? ? Under EB
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S.E. Park
Transports(LL) ?5.1
(1.1)
(1.2)
(2) Other fluid eq
(1.7)
no source
Field-freeFree Diffusion (p130)
Const. For hi-pressure(pN)
(p136)
(1.9) Einstein rel
(3) Third fluid eq
? 5.2 steady solutions (1-D slab)
Three cases
(2.19)
Field free
(2.20)
? 5.3
(2)Low-pN(but finit collisions)
Solution (5.3.7)Fig 5.2(b)
(3)Collision-less Case(very-Low pNFree-Fall
solutions)
(3.10)Fig(5.3)
Langmuir soln
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