?????????????? AlGaN/GaN ? ????

1
??????????? ??????? ???????? ??
?????? ?????????????? AlGaN/GaN ? ????
????????-???????????????? ?????????????
?.?. ??????? 1,2, ?.?. ???????? 1,2, ?.?. ??????
1,2 1 - ???? "??? "???????", ?. ??????, 2 - ????
?????, ?. ??????
2
??????????? ?? ?????? AlGaN/GaN

• ????????????
• ??????? ???????? ??? ?????????? ??????????, ??? ?
  ????????? ????
• ??????????? ???????? ? ???????? ??????????
  ??????????? (?? 400 oC)
• ??????????? ???????? ? ???????? ???????????
  ?????? ???????? ()

• ??????????
• ?????????? ??????????? ???????? (????????????
  ????????), ??? ???????? ? ????????????
  ??????????? ??? ????? ?? ????????? ?? ??????
  ?????????? (SiC, Al2O3, ??????????? (gt104 ????)
  ???????)
• ??????????? ????? ??????? ??????? ????????????? ?
  ???????? ??????? ?? ??????????? ? ????????????
  ?????????????? ?? ????????? ? ????????????? ??
  ?????? GaAs.

??????? ??????????? ????????????
?)
?)
?)
???. 1 ??????????? Toshiba TGI5896-50 (?),
Nitronex NPTB00004 (?), ???? ??? ??????? (?)
3
???? ??????

• ??????????? ???????????? ?????? ??? ????????
  ?????????????? ? ???????????? ?? ?????? ???????
  ??????
• ???????????? ???????? ????????????? ????????
  ???????? ? ???? ????????-????????????????
  ?????????????
• ???????? ??????????? ??????????? ???????????????
  ? ?????????????? ????????????? ????????.

4
??????????? ?????????????? AlGaN/GaN

• ?????????? ? ?????????????????? ???????????
• ????????? ???????
• ??????????? ????????? ??????
• ???????? ? ????????????? ???????, ???????
  ???????????
• ??????????????.

5
?????????? ? ?????????????????? ???????????
?????? ????????1,2
???. 2 ??????????? ?????? ?? ??????? ???? Al

1. O. Ambacher et al. Two-dimensional electron gases
   induced by spontaneous and piezoelectric
   polarization charges in N- and Ga-face AlGaN/GaN
   heterostructures. // Journal of Applied Physics,
   Vol. 85, NO. 6, 1999. P. 32223233.
2. O. Ambacher et al. Two dimensional electron gases
   induced by spontaneous and piezoelectric
   polarization in undoped and doped AlGaN/GaN
   heterostructures. // Journal of Applied Physics,
   Vol. 87, NO. 1, 2000. P. 334344.

6
????????? ???????
????????? ????????? ??????????
???. 3 ????????????? ???????????? ??????????
????????? ????????? ????
??? h ?????????? ??????, a ? ? ???????????
????????????, M-1 - ?????? ???????? ???????????
?????, n - ????????? ????????? ??????.
???. 4 ????????????? ???????????? ??????????
7
??????????? ????????? ??????
?????? ?????????? (???????????????? ?????? ??? -
??????)1
???. 5 ??????????? ???????? ????????? ?????? ??
?????????????? ????, ?????????? ? ??????? ??????
??????????

1. Maziar Farahmand, et al. Monte Carlo Simulation
   of Electron Transport in the III-Nitride Wurtzite
   Phase Materials System Binaries and Ternaries
   // IEEE Transactions on electron devices, Vol.
   48, No. 3, March 2001. P 535-542.

8
???????? ??????? ? GaN
???. 7 ????????????? ???????????? ?????????? ?
?????? ???????
???. 6 ?????????????? ?????? ???????? ??????? ?
GaN
??????? 11

1. Aditya Kalavagunta. Understanding the impact of
   bulk traps on GaN HEMT DC and RF characteristics
   (dissertation)

9
?????????????? ??????????? ??????? (PhAT)1,2
???. 8 ???????? ?????-???????? ??????????????
????? ?????? ????-??????
???. 9 ?????? ?????-???????? ?????????????? ?????
?????? ????-??????

1. P. Pipinys, V. Lapeika. Analysis of reverse-bias
   leakage current mechanisms in metal/GaN Schottky
   diodes // Advances in Condensed Matter Physics. -
   2010.
2. Wei Lu, Lingquan Wang, Siyuan Gu, Aplin D.P.R.,
   Estrada D.M., Yu P.K.L., Asbeck P.M. Analysis of
   reverse leakage current and breakdown voltage in
   GaN and InGaN/GaN Schottky barriers // Electron
   Devices, IEEE Transactions on. - 2011. - V. 58,
   - ? 7. - P. 1986 1994.

10
??????????? ?????????????? Nitronex corp. ? ????
??? ???????
????????? ??????????? ?????? ?????? Wg 60
???. ????? ??????? Lg 0.5 ???. ??????
?????????? ?? ????????. ?????????? ????/????? L??
4 ???.
????????? ??????????? ?????? ?????? Wg 1000
???. ????? ??????? Lg 0.5 ???. ??????????
??????/????? L?? 1 ???. ?????????? ????/?????
L?? 4 ???.
???.10 ??????????? ?????????????? AlGaN/GaN,
???????????? ??? ???????????? ????????????
Nitronex corp. ? ???? ??? ???????
11
????????????? ??????????? ?????????? NPTB00004
?)
?)
??? 11. ????????? ??????? (?) ? ???????? (?)
?????-???????? ????????????? ?????????
??????????? (???????? ?????) ? ???????????
???????? (?????????? ?????)
??? 12. ????????? ????????????? ????????
????????? ??????????? (??????? ?????) ?
??????????? ???????? (????? ?????)
12
????????????? ??????????? ?????????? ???? ???
???????
?)
?)
??? 13. ????????? ??????? (?) ? ???????? (?)
?????-???????? ????????????? ?????????
??????????? (?????????? ?????) ? ???????????
???????? (???????? ?????)
13
????????????? ?????-???????? ? ??????????
?????????????
?)
?)
???. 14 ??????????? C? f (U??) ??? ?????????
????????????? ???????? ??????? (U??5 ?)
???. 15 ?????????? ?????-???????? ??????????????
14
?????????????? ?????? ??????? ???????????? ????
????????? ????????? ????
?????????? ??????????
??????????? ????
Fmin ??????????? ??????????? ???? Z0
??????????? ???????? ????????? gn ???????
????????????.

1. F. Bonani, G. Ghione, M. R. Pinto, and R. K.
   Smith, An efficient approach to noise analysis
   through multidimensional physics-based models,
   IEEE Trans. Electron Devices, vol. 45, pp.
   261269, Jan 1998.
2. T. C. McGill, M.-A. Nicolet, and K. K. Thornber,
   Equivalence of the Langevin method and the
   impedance-field method of calculating noise in
   devices, Solid-State Eletronics, vol. 17, pp.
   107108, 1974.

15
????????? ????
???????????? ???
??????????? ????????
??? ?????????-????????????
2) ?????????-???????????? ? ??????? ???????
1) ?????? ?????????-????????????
???????? ?????????-????????????
???????? ?????????-????????????

• Muth, J., et. al., "Absorption Coefficient,
  Energy Gap, Exciton Binding Energy, and
  Recombination Lifetime of GaN Obtained from
  Transmission Measurements", Appl. Phys. Lett.Vol.
  71 (1997) 2572-2574.
• Zhou, B., Butcher, K., Li, X., Tansley, T.,
  "Abstracts of Topical Workshop on III-V
  Nitrides". TWN '95, Nagoya, Japan, 1995.
• Walker, D., Zhang, X., Saxler, Z., Kung, P., Xj,
  J., Razeghi, M., "AlxGa(1-x)N(0ltx,1)Ultraviolet
  Photodetectors Grown on Sapphire by Metal-Organic
  Chemical-Vapor Deposition", Appl. Phys. Lett.
  Vol. 70, No. 8 (1997) 949-951.

16
????????????? ?????????? ???? ?? ?????????
???.16 ????????????? ?????????? ???? ?? ?????????
???.17 ????????????? ?????????? ???? ?? ?????????
(??????????? ???????)
17
?????????????? ??????????? ???? ??? ???????
(Wg1000 ???)
???. 19 ??????????? Icf(U??)
???. 18 ??????????? I?f(U??)
???. 20 ??????????? gmf(U??)
18
?????????????? ???????????
???. 22 ??????????? h21f(f) U?? 10 ?, U?? 0
?
???. 21 ??????????? NFminf(f) U?? 10 ?
???. 23 ??????????? Gmaf(f) U?? 10 ?, U?? 0 ?
19
??????????? ??????????? ???? AlGaN
???. 24 ??????????? I?f(U??) U?? 0 ?
???. 25 ??????????? NFminf(f) U?? 10 ?, U?? 0
?
?????????? ?????? ????? ????????? ??????????
????????? ????????? ?????? ???????? ? ????, ???
?? ??? ????? ??????????????? ???? ?????????
????????? ?????? ?? ???????? ? ??????????????????
???? AlGaN ?, ??????????????, ????????
??????????? ? ??????? ?????????? ????????????
????. ????? ???????, ??????????? ????????
??????????? ???? ?????????????? ??????? 1-2 ??.
20
?????????? ???? AlGaN
?)
?)
?)
???. 26 ????????????? ???????? ???????
?????????? ?? ?????????? y ?) ??? ???????????
???? ?) d (AlGaN) 1 ?? ?) d (AlN) 1 ??
21
??????? ???????? ??????? ? ???????? ???????????
???????? ???????
??????? ???????????
???. 28 ??????????? NFminf(f) U??10 ?, U??0 ?
???. 27 ??????????? NFminf(f) U??10 ?, U??0 ?
???. 29 ??????????? Gmaf(f) U??10 ?, U??0 ?
???. 30 ??????????? Gmaf(f) U??10 ?, U??0 ?
22
??????? ?????????? ? ??????????????????? ?????
AlGaN
????????? ???? AlGaN
?????????????????? ???? AlGaN
???. 31 ??????????? I?f(U??) U??10 ?, U??0 ?
???. 32 ??????????? I?f(U??) U??10 ?, U??0 ?
???. 33 ??????????? NFminf(f) U??10 ?, U??0 ?
???. 34 ??????????? NFminf(f) U??10 ?, U??0 ?
23
??????????? ??????????? ???????????????
???. 35 ??????????? Nfmin f (f) ?? ???????
?????????? ???? ??? ??????? ????????????? ????
15 ?? U?? 0 ?, U?? 10 ?
???.36 ??????????? Gma f (f) ?? ???????
?????????? ???? ??? ??????? ????????????? ????
15 ?? U?? 0 ?, U?? 10 ?
24
??????????? ??????????? ???????????????
???. 37 ??????????? ???? ????? ?? ?????? ?????
AlGaN ??? U?? 0 ?, U?? 10 ?
???. 38 ??????????? NFmin ?? ?????? ????? AlGaN
??? U?? 0 ?, U?? 10 ?, f 10 ???
????? ??????????? ??????????? ??????????????? ??
??????????? ??????? ? ??????????????
?????????????? ?????? ????????? - ???????
?????????? AlGaN ???? 5 ?? - ???????
????????????? AlGaN ???? 18 ?? - ???????
??????????? AlGaN ???? 2 ??.
25
??????

• ???????????? ?????? ??? ??????? AlGaN/GaN
  ???????????? ? ????????????, ?????????? ??? ????
  AlGaN.
• ?? ??????????? ????????????? ????????
  ??????????? ???????? ?????? ????? AlGaN ???
  ?????????? ??????????? ????????????.
• ?????????? ????????? ?????????? ????????? ??????
  ??? ??????????? ????????????? ??????????????
  ????? ??????? ???????????, ? ????? ?????
  ?????????? ???????? ??? ??????-???, ?????????????
  ???????????????? ????????????, ? ?.?.

26

• ???????
• ?? ????????!