ADI MEMS

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ADI MEMS Sensor Technologies Division
APGC DFAE Training August 2011
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ADI iMEMS Selection Table 50 parts approx.
Gyro
Single Axis Gyro
1 2 Axis Analog 35/70g
Automotive, Industrial, Military
High-g
Single/Dual Axis XL
AD22300 AD22301/302
1 2 Axis Analog 5/18g
Dual Axis Analog 5g
Single/Dual Axis XL
Low-g
AD22293 ADW22035/37
ADXL206
Tri Axis XL
Consumer
ADMP421 Digital PDM - SNR of 61dBA
ADMP441 Digital I2S - SNR of 61dBA
Microphone
ADMP401//4/5 Analog - SNR of 62dBA
Digital or Analog Output
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ADI MEMS/Sensors Strategic FocusLeadership High
Performance MEMS Product Portfolio

• Technology Robustness
• Automotive Origin
• Manufacturing Strength
• gtgt600 Million Units Shipped
• Portfolio Depth
• Full Sensor/Signal-Processing Capability

Combining gt20 years of MEMS expertise and gt40
years of signal processing leadership
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Analog DevicesMEMS Accelerometers
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ADI iMEMS Accelerator Roadmap
Optimized for Noise and Tempco
In Progress
xyz digital Interface 3/4/1
ADXL350
xyz digital Interface 5/5/1.45
AEC-Q100 Qualified
Performance
6DOF XL Plus MAG 3/5/1
ADXL312
xyz digital Interface 3/5/1
xyz digital Interface 3/3/1
xyz analog Interface 4/4/1.45
xyz analog Interface 3/3/1
ADXL345
ADXL346
ADXL335 ADXL325 ADXL326 ADXL327
Cost Optimized
ADXL337
2009 2010 2011 2012
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How to Choose the Right Part

• Low cost, low-g
• Analog output ? ADXL337
• Digital output ? ADXL345
• Digital output ? ADXL346
• Digital output ? ADXL312
• High precision low-g
• ADXL103/203
• AD22293
• ADW22035/22037
• ADXL206
• High g and/or very wide bandwidth
• ADXL001

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ADXL345/6Product Overview Key Features

• User Selectable g Range From 2 g To 16 g
• 3.9mg/LSB resolution at all ranges
• Digital I2C (2 selectable addresses) or SPI (3-
  and 4-wire) interfaces
• User Selectable Bandwidth/Output Data Rate
• 1600Hz/3200Hz down to 0.05/0.1Hz in octave steps
• Optimized for Ultra Low power
• 23uA140uA _at_ 2.5V (typ) Operation Mode (Scales w/
  BW)
• 0.1 µA in Standby Mode
• 32 stage Multimode output FIFO for efficient host
  operation
• Numerous Built-In Functions
• Single/double tap detection, activity/inactivity
  monitoring, free-fall detection
• Unique component- and system-level power saving
  features
• 3D Orientation
• 6D Tapping
• Supply Voltage
• ADXL345 2.0V to 3.6V
• ADXL346 1.7V to 2.75V
• Package Size
• ADXL345 3mm x 5mm 1mm

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ADXL312 AEC-Q100 Qualified Accelerometer High
quality accelerometer for both automotive and
non-automotive applications

• Selling Points
• Ultra high performance like ADXL34x
• User selectable g range from 1.5 g to 12 g
• User selectable ODR up to 3200Hz
• Up to 13-bit resolution at 12 g
• Multimode output FIFO for efficient host
  operation
• Build-in motion detection functions for
  activity/inactivity monitoring
• I2C (2 selectable addresses) and SPI (3-wire and
  4-wire) interfaces
• 10000 g shock survival
• Qualified for automotive applications, healthcare
  and high-end industrial customer also prefer it
  because of quality assurance
• Versatile Design
• Car alarm, Hill start aid, Electronic parking
  brake, Data recorder, Inclination sensing,
  Motion-based power management

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ADXL350Product Overview Key Features

• User Selectable g Range From 1 g To 8 g
• 13, 12, 11, 10bits (8g, 4g, 2g, 1g)
• 2mg/LSB resolution at all ranges
• Maintains ADXL345 Power Levels and features
• Optimized for Noise and TempCo Performance
• Noise 105 µg/rtHz (X/Y), 175 µg/rtHz (Z)
• Temperature coefficient 0.12 mg/C (X/Y), 0.2
  mg/C (Z)
• MAX TempCo 0.25 mg/C (X/Y), 0.4 mg/C (Z)
• Supply voltage
• 2.0V to 3.6V
• Operating Temperature
• -40 to 85 C
• Package Size
• 3 mm x 4 mm x 1.2 mm

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Head to Head
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ADXL103/203 Low-g Accelerometer Family

• Features
• /- 1.7g Analog Output
• Single- and Dual-Axis Versions
• Best in Class Stability
• High 0g Bias Stability
• High Sensitivity Accuracy
• Low Tempco
• Low Cross Axis Sensitivity
• Low Noise
• Hermetic LCC Package
• -40C to 125C
• 3,500 g Shock Survivability
• Applications
• Industrial Military (Inclination Sensing,
  Machine Monitoring)
• Platform Stabilization
• Navigation

• Product Derivatives
• ADXL213 1.2g Dual-Axis, PWM
• AD22293 5g Dual-Axis
• AD22035W 18g Single-Axis
• AD22037W 18g Dual-Axis

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Introducing ADXL206 Precision, High Temperature
iMEMS Accelerometer

• High performance, 5g dual-axis accelerometer
• -40C to 175C ambient temperature range
• Diminishing performance above 175C but 100
  recoverable
• Long life guaranteed 1000 hours at TA 175C
• 1 mg resolution at 60 Hz
• Low power 700 µA at VS 5 V (typical)
• High zero g bias repeatability of 10mg
• High sensitivity accuracy
• Single-supply operation
• RoHS-compliant
• 13 8 2 mm side-brazed ceramic dual in-line
  package

ADXL206 in Ceramic S-DIP package
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ADXL001 Wide Bandwidth Accelerometer

• Features
• 70g, 250g, 500g Versions
• Single-Axis Analog Out
• Industrys widest bandwidth
• 0Hz 22KHz
• Low Noise
• Hermetic LCC Package
• -40C to 125C
• 3,500 g Shock Survivability
• Applications
• Predictive Maintenance
• Bearing monitoring
• Shaft monitoring
• Vibration Analysis

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ADIs Motion Signal Processing Enables Industrial
Machine Health Applications

• An accelerometer with a wide bandwidth and low
  noise floor can be utilized to identify anomalous
  vibrations for predictive and/or preventative
  maintenance

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Shock and Vibration

• High frequency vibration produces a lot of
  acceleration
• Acceleration 4 ?² ƒ² displacement
• For example, 1kHz vibration with 1µm displacement
• A 4 ?² (10³)² 10-6 39.5g
• 10kHz vibration would produce 100 times more
  acceleration!

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Significant Error Sources

• Bandwidth too low
• Reducing the bandwidth is like adding a low pass
  filter
• This can make large acceleration look too small

A 1000g shock through the same accelerometer set
to various bandwidths
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Analog DevicesMEMS Gyroscopes
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ADI High Performance iMEMS GyroIndustrial /
MilAero / Navigation Targeted
Popular Gyro
Tactical grade gyro with 8 o/hr bias stability
Analog single axis
ADXRS646
New Gyro
Quad-Core Designs Industry Leading Vibration
Immunity
Analog single axis
Production Soon
Bias Stability
ADXRS642
ADXRS450 ADXRS453
VMP/SOIC package option temperature compensated
Performance upgrade to ADXRS622
Analog single axis
Analog single axis
Analog single axis
ADXRS620 ADXRS622 ADXRS623 ADXRS624
ADXRS652
ADXRS649
Extendable to 50,000o/sec high rate sensing gyro
Cost down to ADXRS622
2009 2010
2011
Analog Devices Confidential Proprietary
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ADXRS45x High Performance Digital GyroHigh
Performance Via Innovation

• Selling Points
• Superb Vibration Rejection Enable Low System
  Error
• Advanced Quad Differential Sensor
• Sensitivity to Linear Acceleration as low as 0.01
  /s/g
• Vibration Rectification as low as 0.0002 /s/g2
• Innovative Vertical Mount Package Easy Building
  Orthogonal System
• SOIC package for Z-axis response
• Innovative Vertical Mount Package for pitch/roll
  response

ADXRS45x Gyros Feature ADIs Unique Quad
Differential Sensor Design
SOIC
VMP
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ADXRS45x Gyro FamilyPerformance Competitive
Comparison
ADI ADXRS450 ADI ADXRS453 Silicon Sensing CRG20 VTI SCR1100
Axis Three axis, X/Y/Z Three axis, X/Y/Z Single axis, Z Single axis, Z
Power supply 3.3V/5.0V 3.3V/5.0V 5.0V 5.0V
Rate Range 300/sec 300/sec 300/sec 300/sec
Temp Range -40C to 105C -40C to 105C -40C to 105C -40C to 125C
Bias Stability 25/hr 16/hr 5/hr 2/hr
Sensitivity to Linear Acceleration 0.03/sec/g 0.01/sec/g 0.1/sec/g 0.1/sec/g
Vibration Rectification 0.003/sec/g2 0.0002/sec/g2 0.005/sec/g2 Not Sepcified
Current Consumption 6mA typ 6mA typ 60mA typ 26mA typ
Rate Noise Density 0.015/sec/rtHz 0.015/sec/rtHz 0.016/sec/rtHz 0.02/sec/rtHz
Start up Time 100ms 100ms 500ms 800ms
Package 10.3x10.4x3.5 SOIC 9x9 x4 VMP LCC 10.3x10.4x3.5 SOIC 9x9 x4 VMP LCC 9.5x9x3.4 LCC 19.7x12.1x4.5 SOP
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Superb Vibration Rejection Enable Lower Overall
Error
Error Source ADI ADXRS450 ADI ADXRS453 Silicon Sensing CRG20 VTI SCR1100
Bias Stability 25/hr 16/hr 5/hr 2/hr
Sensitivity to Linear Acceleration 0.03/sec/g 0.01/sec/g 0.1/sec/g 0.1/sec/g
G Sensitivity (10 tilting environment) 0.0052/sec 0.0017/sec 0.0174/sec 0.0174/sec
RSS of Error (/hr) 31.23 17.13 62.84 62.67
Higher bias drift Lower g-sensitivity Lower
overall error Both CRG20 and SCR1100 gt 2x cost of
the ADXRS45x
Note g and g² sensitivity are generally the
largest error source in the system and they
usually cannot be compensated for. Even adding
rubber anti-vibration mounts does nothing to
improve static g sensitivity performance.
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ADXRS64x High Performance Analog Gyro High
Performance Via Innovation

• Enhanced ADXRS62x electronics Quad Sensor
  Technology on a single chip
• Pin and package compatible to ADXRS62x family
• Superb Vibration Rejection
• Advanced Quad Differential Sensor
• Sensitivity to Linear Acceleration as low as
  0.015 /s/g
• Vibration Rectification as low as 0.0001 /s/g2
• Bias stability as good as 8/hour
• Rate Noise Density as low as 0.01 /s/vHz (0.6
  /vhr)
• Angular Measurement Range up to and beyond 20,000
  /s
• Startup time as fast as 3 ms
• Power Consumption down to 3.5 mA

ADXRS64x Gyros Feature ADIs Unique Quad
Differential Sensor Design
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ADXRS649 Ultra High Rate Sensing GyroSilicon
Micromachined Gyroscope on a single chip

• Selling Points
• Ultra wide measurement range enable high speed
  tachometry
• 20,000/sec Angular Measurement Range
• Extendable to 50,000/sec
• Low power consumption and ultrafast startup allow
  for quick power cycling of ADXRS649, enable very
  low system power consumption
• 3.5mA supply current
• 3ms turn-on time
• Superb vibration rejection enable ADXRS649 to
  offer rate sensing in harsh environments where
  shock and vibration are present
• Advanced Quad Differential Sensor
• Sensitivity to Linear Acceleration as low as 0.1
  /s/g
• Vibration Rectification as low as 0.0006 /s/g2
• Versatile Design
• Sport equipments, High speed tachometry, Platform
  Stabilization, Rotation sensing in high vibration
  environments, Industrial applications

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ADXRS646 Tactical Grade Gyro Silicon
Micromachined Gyroscope on a single chip

• Selling Points
• Tactical Grade Gyro with 8 /hr bias stability
  enable ADXRS646 for high precision navigation
• 3 times better bias stability than ADXRS62x
• Excellent noise density allow the system have
  better performance with short averaging times.
• 0.01 /s/vHz rate noise density
• 6 times better noise performance than ADXRS62x
• Superb vibration rejection enable ADXRS646 to
  offer rate sensing in severe mechanical
  environments
• Advanced Quad Differential Sensor
• Sensitivity to Linear Acceleration as low as
  0.015 /s/g
• More than 9 times better g sensitivity than
  ADXRS62x
• Vibration Rectification as low as 0.0001 /s/g2
• Versatile Design
• High Performance Platform Stabilization,
  UAV/Robot Navigation, Rotation sensing in severe
  mechanical environments

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ADXRS642 Upgrade To Existing ADXRS622Silicon
Micromachined Gyroscope on a single chip

• Selling Points
• Customer can upgrade their system performance
  very easily by using quad-core gyro ADXRS642 to
  replace dual-core gyro ADXRS622
• ADXRS642 is pin-to-pin compatible with ADXRS622
• ADXRS642 offer 1.25 times better bias stability
  than ADXRS622
• ADXRS642 offer more than 3 times better g
  sensitivity than ADXRS622
• ADXRS642 offer 3 times better noise performance
  than ADXRS622
• Versatile Design
• Platform Stabilization, Navigation, Inertial
  Measurement Units, Industrial applications,
  Rotation sensing in severe mechanical
  environments

ADXRS622
ADXRS642
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Analog Devices MEMS iSensor
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ADI iSensor Intelligent SensorsSystem Ready,
Fully Integrated, and Calibrated Inertial Sensors
Bring Affordable Motion Sensing to Industrial
Control

• Fully Integrated
• Precalibrated
• Programmable
• In-system auto-zero
• Standard Interfaces

iSensors Eliminate the need for Production
Motion Test and Simplify the Adoption of MEMs
into Challenging Systems
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iSensor The Simple Solution for Sensor
Integration Product Overview
iSensor
Gyroscopes
Inertial Measurement Units
Accelerometers
9DOF
6DOF
4DOF
Module
LGA
Vibration
Tilt
Shock
10DOF
ADIS16210 0.1accuracy tilt tri-axis, 180
range, temp cal ADIS16240 18g, 3-axis
shock 1mA for 1024SPS ADIS16227 tri-axis
vibration 70g, 22kHz, capture, FFT
ADIS16265 21/hour 300/sec, 11mm
LGA ADIS16135 6/hour 300/sec ADIS16133
6/hour 1200/sec
ADIS16305 4DOF, 21/hour ADIS16365 6DOF,
21/hour ADIS16385 6DOF, 6 21/hour ADIS16375
6DOF, 12 /hour ADIS16405 9DOF,
21/hour ADIS16407 10DOF, 21/hour
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Integration Options
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ADIS16210Precision Tri-axial Inclinometer and
Accelerometer

• Triaxial, digital inclinometer system
• /- 180 measurement range, roll and pitch axes
• /- 90, gravity axis
• /- 0.1 relative accuracy
• Triaxial, digital accelerometer
• /-1.7 g measurement range
• High Accuracy
• /- 0.05 axis-to-axis alignment
• Digital internal temperature measurements
• Digital internal power supply measurements
• Programmable user calibration options
• Single command, frame alignment
• Manual accelerometer bias correction
• Programmable operation and control
• Sample rate/filtering
• Alarm conditions and indicator output
• Data ready output
• General-purpose I/O
• Automatic self test function

Applications
Platform Control, Stabilization, and Alignment Tilt Sensing, Inclinometers, Leveling Motion/Position Measurement Monitor/Alarm devices (security, medical, safety) Navigation Robotics
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Hi-Performance Inertial Cores Optimized IMU
Integration Enabling the Industrial Motion
Sensing Market
INS

• The Sensor to Nav-Engine divide, represents
• Development Cycle measured in Person-years
• Performance Improvement measured in
  Orders-of-magnitude
• Test Equipment measured in Multi-100Ks
• Per-Device Production Test Time measured in
  Hours
• Sensor Processing measured in State-of-Art

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Sensor Background

• Accelerometers use the earths gravitation force
  and a simple trigonometry function to compute
  tilt angles, with respect to the horizon.
• Integrate accelerometer outputs to estimate
  change in linear velocity

• Gyroscopes measure the angular rate at which an
  object is spinning.
• Integrate gyroscope outputs to estimate angular
  displacement

• Magnetometers measure the earths magnetic field
  and use three orthogonal axes to calculate
  orientation and heading angles.

• Barometers measure pressure and are used
  primarily for sensing change in altitude for
  navigation systems.

Altitude changes help discriminate linear
acceleration from changes in tilt
0.5 Gauss
?
?
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Introducing the ADIS16407 10 DoF IMUSimplifies
Designs for Unmanned Vehicle and First Responder
Navigation

• Combines ADIs industry-leading iMEMS
  technology and signal conditioning expertise
• High performance triaxial, digital iMEMS
  gyroscope with digital range scaling
• 75/sec, 150/sec, 300/sec settings
• High performance triaxial, digital iMEMS
  accelerometer
• 18 g
• Triaxial digital magnetometer
• 2.5 gauss
• Digital pressure sensor
• 10 mbar to 1200 mbar
• All sensors aligned and calibrated at the factory
• With autonomous dynamic compensation

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ADI iSensor Inertial Measurement Units

• LATEST INTRODUCTIONS

• ADIS16334
• 40 Volume Reduction over previous generations

• ADIS16375
• 50 Stability Improvement (Gyros and Accels) over
  previous generation

• ADIS16407
• Addition of Barometer for Altitude Sensing 10
  Degrees of Freedom

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ADIS16228 Programmable Frequency Domain
Vibration Monitor

• The ADIS16228 is
• A tri-axis wide bandwidth vibration monitor, with
• FFT Analysis and Storage
• Programmable Spectral Alarm Bands
• On-chip data capture
• User configurable multimode operation
• An Embedded Autonomous Solution
• Monitor, Detect, Analyze,and Capture in a Single
  Cost-Effective Component

ADIS16228
ADIS16228 vs ADIS16227 Noise 248ug vs
3300ug Range 18g vs 70g Improved Package
Mounting
Easiest Earliest Detection, Identification, and
Isolation
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ADIS16228 Digital Tri-Axis Vibration Sensor,
with FFT Analysis and Storage

• Digital acceleration data, /- 18 g measurement
  range
• Digital range settings 0-1g, 0-5g, 0-10g, 0-20g
• Flat Frequency Response up to 5kHz
• Sample rate 20.48kSPS
• 11 decimation filter settings
• FFT, 512 point, real valued, all three axes (x,
  y, z)
• Windowing options Rectangular, Hanning, Flat Top
• Programmable FFT averaging
• Storage, 14 FFT records on all three axes (x, y,
  z)
• Storage on Alarm, or always
• Programmable alarms, 6 spectral bands
• Two level settings for warning and fault
  definition
• Adjustable response delay to reduce false alarms
• Trigger modes
• Command, timer, external trigger
• Multi-record capture for selected filter settings
• Operating Modes
• Manual/Automatic FFT, with Spectral Alarm
  analysis
• Manual capture mode for time-domain data
  collection

Applications
Vibration Analysis Condition Monitoring Machine health Instrumentation, Diagnostics Safety, shut-off sensing
Programmable Features
Package
15x24x15 mm cube
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ADIS16228Uniquely Capable of Enabling Embedded
Vibration Monitoring

• Technology, Design-Features, and Integration
  Approach Simplify and Improve Embedded Vibration
  Sensing
• MEMs Technology Value
• Tri-Axis Directional Sensing, for better
  problem isolation
• Digital Self-test In-system verification,
  reliability
• Design-Feature Value
• Frequency Domain Processing Better problem
  isolation
• Embedded Filtering/Windowing noise reduction,
  signal isolation
• Programmable Operation Tune to application,
  equipment life-cycle
• Integration Value
• Fully Integrated Eliminate design risk/time
• Simple detection/analysis out-of-box
• Compact Embed closer to vibration source, detect
  more and earlier
• No repeatability (location/coupling) issues, as
  with handheld monitors
• Cost-Effective Potential to monitor more points
  in system

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Analog DevicesMEMS Microphone
Hear the Difference
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Applications Trend Towards Higher Quality Record
and Playback
Enhancing the User Experience

• Audio Trends
• Stereo Audio Record
• HD video (with HDMI Tx)
• 5.1 Surround Sound
• Beamforming
• Wind Noise Cancellation

• Microphone Trends
• Higher SNR
• Higher Frequency Response
• Better Sensitivity
• Good Part-to-Part Matching
• Multi-transducer Designs

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Typical Audio Signal Chain

• Audio signal chain starts with a microphone
• Microphone quality determines the overall sound
  quality and advanced sound processing (stereo,
  beam forming, voice recognition)
• Some microphone quality deficiencies may be
  corrected by extensive (and costly) signal
  conditioning
• With poor quality microphone no amount of
  processing or conditioning results in good sound

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Electret Condenser Microphone (ECM)

• Disadvantages
• Reflow problems (Mylar)
• Large size
• Large supply current
• Low PSRR
• Low SNR (in small sizes)
• High output impedance

• Advantages
• Low cost
• Multi sources

• Typical Specification
• Sensitivity lt -42 dBV/Pa
• SNR 55 - 58 dB
• IDD 500 µA
• PSRR 6 dB
• ZOUT 2.2 kohm

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Microphone Technology Trends Towards MEMS
ECM
MEMS
MEMS
JFET
Digital Output
Analog Output

• Performance is unaffected by lead-free solder
  reflow temperature
• Replaces high cost manual sorting assembly with
  automated assembly
• Higher SNR and superior matching
• Higher mechanical shock resistance
• Wider operating temperature range
• Consumes less current
• Superior performance part-to-part, over
  temperature, and with vibration

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Part-to-Part Response Variations ECM vs. ADMP421
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Sensitivity Variations vs. Temperature ECM vs.
ADMP421
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ADI MEMS Microphone Frequency Response Excellent
Performance for Wideband Applications Beamforming
for VoIP, Voice Recognition, Stereo Recording

• All top-port microphones (MEMS and ECM) currently
  on the market have sharp peaks in their
  high-frequency response, making them unacceptable
  for wideband voice applications
• All top-port microphones have low SNR (5558 dB)
• There are no top-port microphones with high
  performance currently on the market

ADI Bottom-Port MEMS Microphone
Competitor
Top-Port MEMS Microphone
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Microphone Construction
Customer PCB
Thousands of 6u diameter, 10u deep holes in
backplate
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ADI Bottom Port MEMS Microphone Products

• ADMP401, ADMP404, ADMP405,ADMP421Mass
  Production NOW
• ADMP441 Sampling NOW

Model Output Sensitivity SNR Frequency Response PSRR Package Size (mm)
ADMP401ACEZ Analog -42 dBV 62dB A-weighted Flat 100Hz to 15kHz 70 dBV 4.72 x 3.76 x 1.00
ADMP404ACEZ Analog -38 dBV 62dB A-weighted Flat 100Hz to 15kHz 70 dBV 2.50 x 3.35 x 0.88
ADMP405ACEZ Analog -38 dBV 62dB A-weighted Flat 200Hz to 15kHz 70 dBV 2.50 x 3.35 x 0.88
ADMP421ACEZ DigitalPDM -26 dB FS 61dB A-weighted Flat 100Hz to 15kHz 80 dB FS 3.00 x 4.00 x 1.00
ADMP441ACEZ DigitalI²S -26 dB FS 61dB A-weighted Flat 100Hz to 15kHz 80 dB FS 4.72 x 3.76 x 1.00
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ADI MEMS Microphones Advantages

• Performance
• High SNR, Sensitivity deliver superior near / far
  audio experience
• Flat frequency response superior to most MEMS for
  more natural SD/HD audio experience
• Lower current consumption than ECM for better
  battery life
• Sensitivity robust to high solder reflow temp
  (Pb-free)
• Best PSRR in the market enabling more freedom for
  system design
• Footprint
• ADI MEMS Mic is fully integrated - requires no
  LDO or external preamp
• ADI has smallest, thinnestanalog output
  packaging at 3.35 x 2.50 x 0.88 mm

• Manufacturing
• Standard pick-and-place equipment is used
• Can eliminate expensive sorting, manual assembly,
  or rubber boots to reduce TRUE cost
• Robustness to Pb-free solder reflow temps means
  higher yields and higher quality through life
• Superior Noise Immunity
• Digital output highest PSRR rejects electrical
  noise
• MEMS microphones less sensitive to mechanical
  noise than ECM
• Audio Signal Chain
• ADI codecs amplifiers complete the audio signal
  chain

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Best Potential Customers for ADI MEMS Microphones

• Need high performance microphone
• High SNR (low noise)
• Extended frequency response
• High power supply rejection and/or RF immunity
• Have space constraints, need small package size
• Especially thickness
• Require multiple microphones
• Stereo
• Noise reduction
• Beam forming microphone arrays
• We manufacture a premium product that delivers
  outstanding performance. If the customer is
  looking for a low-cost alternative for an
  existing ECM or MEMS microphone, this may not be
  a good opportunity worth pursuing.

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Thank You
iMEMS and iSensor The worlds leading MEMS
technologies